5

Load voltage Auto switch model Lead wire length (m) Pre-wired connector Applicable load DC AC Tie-rod mounting Band mounting 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9N V V V v v 3-wire (NPN) G59 V V v v 24 V 5 V, 12 V IC circuit 3-wire (PNP) M9P V V V v v G5P V V v v Grommet 2-wire 12 V M9B V V V v v K59 V V v v Terminal

VQC

SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).

VEX1

terminal 2 T Conduit terminal 90 D DlN connector Body ported VEX3 12 0 01 5 D B Base mounted VEX3 22 0 01 5 D B B Bracket (Except VEX332) Option 0 Air operated Operation F Foot (Only VEX312, VEX332) 1 External pilot solenoid N Silencer for pilot exhaust (P2) port (Only solenoids) 2 Internal pilot solenoid None Indicator light and surge voltage suppressor Body size Port size Thread S With

Modular Type Regulator Series AR

G Plate thickness AR10 to AR30: Max. 3.5 AR40: Max. 5 Pressure gauge (option) L B Pressure gauge port M Q N F J K P E Bracket (option) AR50, 60 Port size Square embedded type pressure gauge (option) A D C L OUT IN G Pressure gauge (option) B Pressure gauge port M N Bracket (option) Q K P F E J Standard specification Accessory specification With pressure gauge Bracket mounting size Panel mount

Pressure Switch/Reed Switch Type

Example) IS10M-6LP 0.1 0.3 0.2 0.4 MPa C q V B Symbol Description Body size 30 40 20 50 60 Nil Set pressure 0.1 to 0.4 MPa 0.1 to 0.6 MPa V V V V V V V V V V a 6 Note 1) range Semi-standard + Lubricator Nil 0.5 m V V V V V V V V V V V V V V V Lead wire w V L Z b 3 m 5 m A D Regulator Air filter length + Applicable model A 11 13 15 17 22 B 74 85 93 97 91 C 61 67 72 75 64 D 28 30 36 44 53 Nil

ML1C

indication (2-color indicator) 2-wire 3-wire (PNP) 12 V 3-wire (NPN) 3-wire (PNP) IC circuit With timer 5 V,12 V 3-wire IC circuit E76A 5 V (NPN equivalent) Yes Grommet E73A E80A 24 V 12 V 5 V,12 V 100 V 2-wire Relay, PLC IC circuit N0 100 V or less Lead wire length symbols: 0.5 mNil (Example) M5BW 3 m L (Example) M5BWL 5 m Z (Example) M5BWZ Solid state auto switches marked with are produced

HRX-OM-T002

Output type Current consumption Flow switch SMC PF3W711--A(-M) NPN open collector output 50mA or less PF3W711--B(-M) PNP open collector output 50mA or less 3.3 Installation HRS090 Series 3-22 HRX-OMT002 Chapter 3 Transport and Setting Up 1. Prepare the flow switch described in the table purchasing separately. 2.

HRX-OM-S004

Out put type Current consumption Flow switch SMC PF3W711--A(-M) NPN open collector output 50mA or less PF3W711--B(-M) PNP open collector output 50mA or less HRS Series 3.3Installation 3-21 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.3 Installation HRS Series 3-22 HRX-OM-S004 Chapter 3 Transport and Setting Up 1.

Filter Regulator

AW-OMX0057-A PRODUCT NAME Filter Regulator MODEL / Series / Product Number AW20(K)-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AW30(K)-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)06(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW60(K)-(F,N)06(F,N)10(B,C,

Digital Flow Switches Series PF2A

Pin description Load is an analog input equipment such as a voltmeter, ammeter. 1 DC(+) PF2A7H-(-M) 68 69 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30 V 80 mA or less OUT1 Load Black H 0 V or Blue 50 msec 50 msec PF2A7H-(-M) 28 29 A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc1, NPT1, G1 36 M5 x

5 Port Solenoid Valve, Series VQC

B SOL. B (+) () () (+) 14 14 Some connector manufacturers: SOL. A SOL. A (+) () () (+) 15 15 Station 8 Station 8 SOL. B SOL. B (+) () () (+) 16 16 HIROSE ELECTRIC CO., LTD. Sumitomo/3-M Limited Fujitsu, Ltd. Japan Aviation Electronics Industry, Ltd. J.S.T. Mfg. Co., Ltd. Oki Electric Cable Co., Ltd. SOL. A SOL. A (+) () () (+) 17 17 Station 9 Station 9 SOL. B SOL.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum

PSxx-OMG0005CN

5(V)1(M)/(1(k)+1(M))4.995(V)0.005V ) ripple -8No.PS-OMG0005CN-E 20 mm A PSE56 PSE56-28 1 (DC+) (LINE(+)) 2 3 (DC-) 4 (IN15 V) (LINE(-)) A A PSE200/PSE300 (ZS-28-C) 3M 37104-3101-000FL 1473562-4 XN2A-1430 PSE200 PSE300 -9No.PS-OMG0005CN-E DC+ OUT PSE5615V 1 k DCLINE+ PSE56--28 420 mA 500 (24 V ) 100 (12 V ) LINELINE(+)LINE(-) -10No.PS-OMG0005CN-E (A/D ) () 20 2030 -11No.PS-OMG0005CN-E

7.5

LZ B edition Safety Instructions Be sure to read Precautions for Handling Pneumatic Devices (M-03-E3A) before using.

45

CC-LINK System Master unit: AJ61BT11 A1SJ61BT11 AJ61QBT11 A1SJ61QBT11 Uni-wire H System Send unit: SD-H2 SYJ No. of output points, 16 points SX No. of output points, 16 points No. of output points, 16 points a) 2-wire type DG Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) FG SG B A FG SG B A FG SG B A SG B

VXA21/22

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

90

Vacuum Pump System Flow-rate Characteristics of Flow Path and Vacuum Release Port size Flow-rate characteristics of V PV (Vacuum side) Flow-rate characteristics of PS V (Vacuum release side)() PV port V port C[dm3/(sbar)] C[dm3/(sbar)] b Cv b Cv 0.39 0.20 0.06 0.04 0.14 0.09 6 8 () When needle is fully open How to Read Flow-rate Characteristics Graph Flow-rate characteristics are expressed

45

CC-LINK System Master unit: AJ61BT11 A1SJ61BT11 AJ61QBT11 A1SJ61QBT11 Uni-wire H System Send unit: SD-H2 SYJ No. of output points, 16 points SX No. of output points, 16 points No. of output points, 16 points a) 2-wire type DG Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) FG SG B A FG SG B A FG SG B A SG B