MHZ2/MHZJ2 Flat Finger Type [3] 4-MM thread depth L Attachment mounting thread K J A A D G B D B K J F C S W O Unit: mm Weight g F G Open Closed 2 2.5 3 4 J K MM L B C D Model A W 5.4 7.4 4.45 5.8 7.45 8.9 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 55 115 235 420 5.2 8.3 10.5 13.1 10.9 14.1 17.9 21.8 2.45 3.05 3.95 4.9 6 8 10 12 5 8 10 12 +2.2 0 2H9 2.5H9 3H9 4H9 1.4 1.4 1.6 2 0 -0.2 0 -0.2 0 -
) depth 4 17 32 4H9 (+0.030 0 ) depth 4 5 G x M5 x 0.8 x 10 G x 4.3 19 A A G x 8 4.6 18.2 2 x M5 x 0.8 x 10 Top mounting not available J F 11 With lock Connector Servo motor Step motor Lock cable (3.5) Motor cable Motor cable (2 x 5) 20 20 24 20 24 (1.5) 65 Lock cable 20 Cable length 280 134 15 15 Note 1) Range within which the table can move when it returns to origin.
35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 M5 x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x
35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 M5 x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x
x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Piping port M5 x 0.8 Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 71 46 6 Head cover port in axial direction (R) M5 x 0.8 Rod side cylinder port 31 Lock nut M14 x 1.0 M5 x 0.8 Head side cylinder port 5 5 32 34 48.5 6.5 M6 x 1.0 6 20 18 Width across flats 10 18 9.5 11.5 65 39 20 14
Note 3) M5 fittings for M5 thread are attached without being incorporated.
BUS adapter 126 12 11 SRP 8.5 M5 x 0.8 SRF M5 x 0.8 Air introduction port Air introduction port VCHR 19 34 19 34 ITV ITV VAC.
(2 position) Twist Selector (3 position) Foot Pedal Push-Pull P3.5-7 P.3.5-11 P3.5-19 Effective Area (Cv) Number of Ports 1 (0.055) 2, 3 Poppet 2.5 (0.14) 2, 3 19 (1) 2, 3 Poppet Poppet Function 3.5-1 Series VM Mechanical Valve SlA VlA VM400 VZM500 VZM400 VFM300 VFM200 VM800 21 X 35 X 53 18 X 28 X 87 18 X 30 X 91 26 X 35 X 94 23 X 40 X 115 30 X 40 X 57 SlA VlA VM/VR VH Roller Lever Adjustable
B1 A' Rod end nut Width across flats B2 30 D-1 D E J C MM Without rod end thread NN W B (mm) Symbol A A' B B1 B2 C D E F F' GA GB H J MM NN P S W Z Bore size 6 10 16 7 9 14 14 5.5 2 3 16.5 8 6.5 5.5 6.5 17 6 M3 x 0.5 M10 x 1.0 M3 x 0.5 16 3 33 10 12 15 17 7 2.5 4 19 8 6.5 6 7 20 7 M4 x 0.7 M12 x 1.0 M3 x 0.5 19.5 3 39.5 12 14 20 19 8 3 6 24.5 10 8.5 6.5 7.5 24 10 M5 x 0.8 M14 x 1.0 M5 x
x 0.5 0.9 Type SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 0.19 0.18 0.26 0.21 0.25 0.28 0.29 0.27 0.25 0.27 0.25 0.34 0.060 0.059 0.060 0.057 0.081 0.079 0.082 0.079 0.048 0.050 0.048 0.057 0.32 0.30 0.29 0.27 0.33 0.35 0.34 0.34 0.10 0.21 0.19 0.10 0.25 0.27 0.15 0.18 0.19 0.24 0.17 0.24
M5 X 0.8 0XY: M6 X 1 58 ISA ZSE1 ISE1 6.5 10.2 ZSE2 ISE2 8 10 17.6 10 5.5 ZSP 2-3.3 Mounting hole ISl ZSM PFl Connector style/ZSE2-0Xl-15C IFl Pressure setting Indicator light trimmer L H Vacuum Vacuum pad connection port 20 supply port 7 35.6 Circuit Lead wire length 600 (3000) 50 9.5 Vacuum pad connection port 0X: M5 X 0.8 0XY: M6 X 1 58 Vacuum supply port 0X: M5 X 0.8 0XY: M6 X 1 6.5
1 1 A A A A A A A A 18.5 9.5 7.5 (12) (7.5) C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 20.5 P = 10.5 34 L2 = L1 10.5 L3 = 10.5 x n1 + 65.5 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 45 L7 = 47 x n2 + 89.8 n1: Valve stations n2: I/O Unit stations L1: DIN
n1 + 9 x n2 + a + b x n3 L2 = 6.5 x n1 + 9 x n2 + 43.4 M = {(L1 + c) / 12.5} + 1 Decimal fractions are truncated.
Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 Series MB 4 x 1 m AS1301F-04 AN120-M5 SZ3120-M5 3-3-19 Series VZ3000 Construction 2 position single 2 position double 3 position closed center 3 position closed center/exhaust center/pressure center
1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 Up to 200 Up to 300 Up to 300 Up to 300 15.5 19.5 19.5 27 M4 x 0.7 depth 7 4 5 5.5 6 6 8 8 10 12 16 10 14 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17
switch mounting bracket RS H A Set screw (M4) RZQ Mounting bracket (b) Tie-rod MI W S Auto switch mounting screw (With hexagon socket head) M5 x 0.8 CEP1 CE1 Auto switch CE2 Bracket set screw M5 x 0.8 x 12 l ML2B Mounting bracket (A) C J G5-S 1.
A, B port location 1 8 1 4 1 8 1 4 P, EA, EB port 1 4 M5 x 0.8 C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) Port size C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) A, B port SV Manifold base weight W (g) n: Stations SZ W = 19n + 45 W = 43n + 77 W = 51n + 81 Applicable flat ribbon
S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2m LVA3m LVA4m LVA5m LVA6m 66.5 12.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 (mm) Dimensions A B Q R P C E F G H K L N Model LVA1m 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2m 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3m 36 47 78.5 13
5.3 4 5.5 2 34 18.5 12.6 9.2 35 4.5 7.5 29h9 29.5h9 14H9 5.3 2.5 4.2 10 3.3 3.5 M4 x 0.7 M5 x 0.8 7.5 2.5 6 4 5.5 3 38 23 15.5 10.5 40 4.5 9.5 33h9 34 h9 17H9 5.3 2.5 4.2 10 4.2 4.5 M5 x 0.8 M5 x 0.8 7.5 2.5 6 5 5.5 7 45 30 18.4 12.2 50 5 7 39h9 40 h9 20H9 6.5 2.5 4.5 11.5 4.2 4.5 (mm) JK P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 S WD M3 x 0.5 M3 x 0.5
OUT q (Port size) OUT q (Port size) Port size IN OUT OUT q e OUT w 1/8 Port size IN OUT OUT q e OUT w e Standard Specifications Fluid Air Ambient and fluid temperatures 5 to 60C (No freezing) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Dimensions Body type: Standard Body type: Front and back port selectable 2 x P1 2 x P2 2 x P1 2 x P2 B B Center of F.R.L. body C Center of F.R.L