10

(with surge voltage suppressor) Grommet U U1 U U1 X X X1 X1 300 Q F D D 300 Q F 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole E C R C R E 1.2 1.2 1.2 1.2 B1 B B1 B 2 x P Port size 2 x P Port size Y W Y W DIN terminal Conduit terminal U U1 U U1 X X X1 X1 Cable 6 to 12 F Q S 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole D 34 D G1/2 Q2 F (44) 31.5 32 25 E T E C R C R G1/2 S2 B B1 2 x P Port size

Fluoropolymer Piping Equipment

reducing LQ1E-T-R 3 4 5 P.905 6 2 Tubing extension union tee reducing LQ1T-T-R 3 4 5 P.906 6 Note) Basic size With reducer 868 Fluoropolymer Fittings Hyper Fittings Tubing O.D.

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

LEC-OM02704CN

/ m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1 2 3 0() 1() 2()

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order w y e r t u o !

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

3 (R) 1 (P) 5 (R) 3 (R) 1 (P) e t q r w w q t r A B A B SY SYJ u u R P R R P R SX y VK 3 position closed center/exhaust center/pressure center VZ 3 position closed center VF (A) 4 (B) 2 w t q r VFR 5 (R) 3 (R) 1 (P) 3 position exhaust center A B (A) 4 (B) 2 VP7 5 (R) 3 (R) 1 (P) VP4 3 position pressure center u (A) 4 (B) 2 R P R (This construction shows a closed center.) 5 (R) 3 (R) 1 (P

Basic type / Direct mount type Series CY3B/CY3R

D 2.8 x P 0.3 x Wcos + Wsin D 5.0 x P 0.3 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load mass & pressure Inclined operation (For vertical operation, refer to page 1193.)

New

) Grommet W W U U X X U1 U1 X1 X1 z300 Q F D D z300 Q F 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole R C C R E 1.2 1.2 1.2 1.2 E B1 B1 2 x P Port size 2 x P Port size B B DIN terminal Conduit terminal Y Y W W U U X X U1 U1 X1 X1 Cable 6 to 12 F Q 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole D D S G1/2 Qp2 F 34 (44) 31.5 25 T C R R G1/2 E E Sp2 B1 2 x P Port size 2 x P Port size B1 B B (mm)

NCA1

T I O N S A U T O S W I T C H E S R E E D T Y P E O P T I O N S M O U N T I N G B R A C K E T S F O R S W I T C H E S O P T I O N S A U T O S W I T C H E S S O L I D S T A T E T Y P E MODEL OPERATING MAX CURRENT OR INDICATOR MODEL OPERATING MAX CURRENT OR INDICATOR NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE MODEL BORE SIZE RANGE (MA) OUTPUT

Electric Actuator/Slider Type

How to Order LEFS 32 R T7 B 200 B S 5 S2 q w e r t y !

VM

(mm) Port size R Applicable tubing O.D. (mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

7.5

0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !

Table of Contents

for purge air discharge (Option: P) u t e q IN OUT i } r w y HA Purge air for dehumidification Purge air for dehumidification AT ID AMG Component Parts AFF Material Description No.

0.55

base W = 29n + 21 W = 51n + 35 W = 63n + 64 W = 97n + 80 W = 139n + 550 Weight: W [g] Stations: n Note) Supply pressure to 1(P) ports and exhaust pressure from R ports on both sides for 10 stations or more (5 stations or more for the VF5000).

MY1

Applicable cylinder Port variations MY1B10 MY1H10 L R L L R R R Note 1) Note 1) R R R L L R L L L L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

•

P R across flats 1 2 , oj Iir w w \ M8X 1.25 I . j 0 >-j / ~ P 3.5 I 'A ~.8 Flat type Flat with rib (mm) Flat type . Flat w~h rib (mm) Model . .A .8 C JD ' Model 'A .8 C D E F I:M6x1 I:Ma XI y I I: Ma x l Y E F I r.M6 Xl G c H G H ..JatlFlat1>ilt1 rib I . .

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ1000 Series P.1.10-124 P.1.10-128 P.1.10-132 Plug-in Plug lead VQ2000 Series P.1.10-124 P.1.10-128 P.1.10-132 VQ0 Series P.1.10-170 P.1.10-174 VQ1000 Series P.1.10-170 P.1.10-174 P.742 1.10-114 Manifold Variations T L C S Port size SUP EXH port Cylinder port kit kit kit Lead wire Direct electrical entry style Serial transmission unit Terminal box (Terminal block) SY P, R A, B Enables single-wire