VFR

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

KJ

K Reducer Elbow: KQ2L M Applicable fitting size d (inch) Model L2 A M Min. port size Applicable tubing O.D.

Electric Actuator with Integrated Guide

Model Allowable Moment (Nm) Allowable dynamic moment Model Mounting orientation Load movement direction LTF6 200 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep L1 (mm) Pitching 100 m a=1000 a=2000 a=3000 L1 30 20 10 0 Transfer load m (kg) L2 200 a=1000 a=2000 a=3000 Mer L2 (mm) Rolling Yawing 100 m L2 Mer 30 20 10 0 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100

One-touch Fittings

M L1 M L1 L2 D Plug-in Elbow: KQ2L Applicable tubing Effective area [mm2] Min. port size Release button dimensions D2 L1 L2 A M Applicable tubing O.D.

SV

Slave unit 75 Slave unit 03 Slave unit 01 Master unit ZW-31LM SI unit Master unit SI unit Master unit SI unit SI unit SHIELD SG L2 L1 SHIELD SG L2 L1 SHIELD SG L2 L1 SG L2 L1 + + FG + + FG + + + + + + SHIELD FG FG + Twisted pair wire with shield Type 3 ground Type 3 ground Type 3 ground Type 3 ground FG FG b) 3-wire type Wiring does not include signal ground line (SG).

SYJ300/500/700

cable L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) M: Common exhaust for the pilot and main valve + + + D: Push-turn locking slotted type + R port P, E port H: Lead wire length 600 mm Pilot valve exhaust is centralized to main valve.

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

SYJ3000/5000/7000

Load factor: ( (Load weight x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 Series MB/CA2 Series CJ2 Series CM2 4 x 1 m Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AS2301F-04 6 x 1 m 4 x 1 m AS1301F-04 AN120-M5 SYJ5120-M5 SYJ5140-01 AN101

Rotary Actuator/Vane Type

L2 + (3 x P) L2 + (3 x P) K axis (T axis) J axis Q1 = M L1 = L1 + (3 x P) L2 = The maximum dimension L1 is, as a rule, twice the thread size. (Example) For M3: L1 = 6 mm The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M3: L2 = 6 mm However, for M5 with T shaft, the maximum dimension L2 is 1.5 times the thread size.

Series KV2 Fittings

Tube OD (inch) L2 M Min. Flow Dia.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

VQ [ ] for AC VQ4 L plug connector (L) M plug connector (M) SS5YJ3-S32Station -M5, C4 VQZ 91.7(GZ,GS:93.1) [95.1] 78.8 (GZ, GS: 80.2) [82.2] VQD 1 15.5 1.5 36.5 13.5 79.4 [82] 1 R 57.4(GZ,GS:58.1) [59.1] 56.4 (GZ, GS: 57.1) [58.1] A A A A A R VZS 35.5 B B B B B P 53.7 [55] P 63.3 VFS 92.3 [94.9] 98.6 111.6 2-4.5 VS (Pitch) P=10.5 11.5 (Mounting holes) L2 4 VS7 C4 (Built in One-touch fitting

Possible to transfer a workpiece at low-speed.

MSU CRJ L1 + (3 x P) L1 + (3 x P) Q1 = M Q1 = M CRA1 L2 + (3 x P) L2 + (3 x P) L1 = L1 = CRQ2 L2 = L2 = Q2 = M Q2 = M MSQ Size 10, 15 Size 20, 30, 40 Size 10, 15 Size 20, 30, 40 MSZ (mm) (mm) Q1 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Q2 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Size 10 15 20 30 40 Size 10 15 20 30 40 CRQ2X MSQX CRQ2X MSQX MRQ Symbol: A4 Symbol: A5 Symbol: A3 The long shaft can

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

L3 L1 L2 L3 L1 L2 L3 Port size M5 Rc (PT)1/8 One-touch fitting 2.2-32 3 Port Pilot Solenoid Valve Rubber Seal Series SYJ700 Model Weight (g) (1) SY Valve model Actuation Port size Effective area (mm2)(Cv) Grommet L plug connector, M plug connector.

Table of Contents

) L1 = 50 [mm] L2 = 40 [mm] m L2 L1 Item Load factor an Note 1.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W MSQ MSZ (mm) CRQ2X MSQX Q2 L2 max Y Size (mm) L1 = X = Q2 = M Q1 = M 10 Y 3 M 4 X L1 max Q1 Size 7 to 8 L2 = Y = MRQ 10 15 Y 3.5 M 5 M4 7 to 14 X 3 8.5 to 9 15 20 Y 4 M 6 M5 8.5 to 18 X 3.5 10 20 30 Y 5 M 8 M6 10 to 20 X 4 13 30 40 Y 6 M10 M8 13 to 22 X 5 15 Symbol: A5 The long shaft can be further shortened by machining it into a stepped round shaft.

LG1H

of gravity (mm) a = 3000 2000 m L1 0 10 20 30 Transfer load m (kg) L2 600 L2 (mm) 400 Mer Rolling Yawing m 200 L2 Mer 0 10 20 30 Transfer load m (kg) m 4000 a = 1000 L3 (mm) L3 a = 3000 a = 2000 2000 m Mey a 0 10 20 30 Transfer load m (kg) Refer to page 183 for deflection data. 148 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

R (NPT) Port size A N L2 L2 LQ2L21-M LQ2L22-M LQ2L23-M LQ2L24-M LQ2L31-M LQ2L32-M LQ2L33-M LQ2L34-M LQ2L35-M LQ2L36-M LQ2L41-M LQ2L42-M LQ2L43-M LQ2L44-M LQ2L51-M LQ2L52-M LQ2L53-M LQ2L54-M 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 (A) 1/4 1/8" 20.5 (M) (M) 38 19.9 19 24 18 VC 1/4" 18 H (E) VDW L1 43 Class 2, 3 1/4" 22 42.5 VQ 26.2 22 28 24 43 3/8" 21.5 VX2 42.5 52 51 52 51 59 58 59

Series VQ Base Mounted Metal Seal/Rubber Seal

(L3) (L4) Vacuum ejector unit style: Equation L1=10.5n+28.7+(number of ejector units X 26.7) L2=10.5n+41.3+(number of ejector units X 26.7) L4 is L2 plus about 30.

SQ1000/2000

Nil M MB Note 1) For the double solenoid specification, the symbol for Function is "D". Note 2) Only rubber seal types are applicable.

VFS

Cable length 1.5 m 3 m VVFS2000-30A-3 5 m VVFS2000-30A-4 7 m Component parts Assembly part no. Cable length 1.5 m 3 m VVZS3000-21A-3 5 m VVZS3000-21A-4 8 m Component parts VVFS2000-30A-1 VVFS2000-30A-2 VVZS3000-21A-1 VVZS3000-21A-2 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.