VQ

VQZ Plug Lead Unit U Type (Large Flow Capacity) Mounted Manifold (VV3Q12U) VZ L1 L2 7 4-PT1/8 VS P, E port 7 16 P E P E 29 14 7 32 40.1 49.8 300 Round head screw M1.7 X 14 2-3.5 Mounting hole Manual override 15.5 P=10 300 n 5 4 3 2 1 U side D side 46.5 35.2 19.4 15.5 A A 9.5 16.7 P=10 n-M5 A port Dimensions Equation: L1=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17

S Couplers

Width across flats Min. bore size Model T Connection port size Weight g Effective area mm2 L2 L1 KKA3P-01F-1 Rc 1/8 23.2 9.6 14 -02F-1 1/8 T Rc 1/4 6.0 22.6 16.0 30.3 20.2 17 -03F-1 Rc 3/8 32.0 26.2 19 KKA4P-02F-1 Rc 1/4 29.7 20.0 17 -03F-1 1/4 Rc 3/8 8.0 40.2 18.9 34.0 25.8 19 -04F-1 Rc 1/2 39.4 46.1 24 L2 H KKA6P-03F-1 Rc 3/8 30.9 34.3 22 L1 -04F-1 1/2 Rc 1/2 11.0 76.0 20.4 39.6 50.0 24

3 Port Solenoid Valve Rubber Seal Series SY100 1

Type 31 How to Order Applicable solenoid valve Note) SY113--M3 SY113A--M3 SY123--M3 SY123A--M3 Applicable blanking plate assembly SY100-77-1A SS3Y1 31 05 Stations 02 2 stations P R 20 20 stations R port M5 x 0.8 P port M5 x 0.8 Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.

VT307

= 26 x n + 12 2 76 64 3 102 90 4 128 116 5 154 142 6 180 168 7 206 194 8 232 220 9 258 246 10 284 272 L L1 L2 [ ]: With light/surge voltage suppressor 4-7-8

NARM Series

NARM 2500 05 A 02 G1 Optimal for central pressure control. Accessory Regulator for manifold Pressure easily set using the new handle. One-touch lock system.

Series SY100 3 Port Solenoid Valve Rubber Seal

List part numbers of the installed valve and option in required station location separately under manifold part number. 2.1-10 Series SY100 Common SUP/Common EXH 30 Type How to Order Applicable solenoid valve (1) SS3Y1 30 05 F SY113-l-M3 SY113A-l-M3 Stations 02 Applicable blank plate assembly 2 stations ... ...

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

(max. 20 stations) Valve stations Supply/Exhaust block assembly fitting specifications Note Symbol 02 Stations 2 stations Double wiring specification Straight Nil L B Supply/Exhaust block assembly mounting position 08 02 Elbow fitting (upward) 8 stations Elbow fitting (downward) 2 stations Specified wiring (up to 16 solenoids are possible) U D B M U Side (2 to 10 stations) D Side (2 to

ZX

R Right side (PV port on the right side) L Left side (PV port on the left side) 02 2 B Both sides (PV port on both sides) Nil All stations 1 Station 1 only 08 8 1 Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 2 EXH ports are released to atmospheric pressure in both sides.

Pressure Gauge Guide

VE 3 Bleed port Model (Made to Order) Pressure range Note) Indication unit Connection thread VY1 Note Model MPa G43-2-01 to 02-X2 G43-4-01 to 02-X2 G43-6-01-X2 G43-7-01 to 02-X2 G43-10-01 to 02-X2 G43-2-01 to 02-X3 G43-4-01 to 02-X3 G43-6-01-X3 G43-7-01 to 02-X3 G43-10-01 to 02-X3 G43-2-01 to 02-X4 G43-4-01 to 02-X4 G43-6-01-X4 G43-7-01 to 02-X4 G43-10-01 to 02-X4 0 to 0.2 0 to 0.4 0 to 0.6

Pressure Range: ISE77G (0 to 10 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: None, Operation Manual/Calibration Certificate: K (Operation Manual + Calibration Certificate)

Pressure Range: ISE77G (0 to 10 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: None, Operation Manual/Calibration Certificate: K (Operation Manual + Calibration Certificate)

Pressure Range: ISE77G (0 to 10 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: A (Bracket A, Interchangeable with ISE75[H])

Pressure Range: ISE77G (0 to 10 MPa), Piping: F02 (G 1/4, ISO 1179-1 Compliant), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: A (Bracket A, Interchangeable with ISE75[H])

Pressure Range: ISE77G (0 to 10 MPa), Piping: F02 (G 1/4, ISO 1179-1 Compliant), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: A (Bracket A, Interchangeable with ISE75[H])

Pressure Range: ISE77G (0 to 10 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m), Bracket: A (Bracket A, Interchangeable with ISE75[H])

Pressure Range: ISE77G (0 to 10 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m)

Pressure Range: ISE77G (0 to 10 MPa), Piping: N02 (NPT 1/4), Orifice: T (Orifice shipped with the Product), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: A (Bracket A, Interchangeable with ISE75[H])

Pressure Range: ISE77G (0 to 10 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: M (SI Unit Only), Lead Wire: None, Bracket: None, Operation Manual/Calibration Certificate: Y (None)

Pressure Range: ISE77G (0 to 10 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: M (SI Unit Only), Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m)

Pressure Range: ISE77G (0 to 10 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: B (Bracket B)