ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

LECA6_C

LED() /P.18 5.CN1: PLC /P.24 6.3 CN1 CN5 DC24V /P.16 4. /P.27 6.4 I/O /P.48 12. ONOFF /P.11 3. /P.48 12. CN1 CN5 DC24V /P.16 4. /P.27 6.4 I/O /P.14 3.4 63 - /P.28 7. (CN1:EMG ) /P.11 3. SV1.00 INP ON INP OFF (INP PLC ) /P.24 6.3 /P.11 3.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod end nut Rod end male thread 7-6-53 54 (In the case of without auto switches, A, B, F and P dimensions will be only changed. Refer to the dimension chart.)

Tie-rod Type Hydraulic Cylinder

Hs Auto switch 12 D-B5/B6 15 22.5 A B 33 410 Auto Switch Mounting CHA Series Auto Switch Proper Mounting Positions (mm) D-G5/K59 D-G5W/K59W D-G59F/G5BA D-G5NT D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT D-G39/K39D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 Bore size (mm) CHQ A B A B A B A B A B A B A B A B A B A B A B CHK 40 20.5 21.5 17 18 22 23 12.5 13.5 10.5

Wireless System

Cap p. 17 Digital Input/Output Unit p. 7 tMarker p. 18 Analog Input Unit p. 8 y Communication Cable with Connector/ Communication Connector p. 18 Analog Output Unit p. 8 Analog Input/Output Unit p. 8 uPower Supply Cable with M12 Connector (A-coded) p. 19 End Plate (D side) p. 8 uPower Supply Cable with M12 Connector (B-coded) p. 20 End Plate (U side) p. 8 iPower Supply

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

CYPSeries

E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counter bore dia B Counter bore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB

CYPSeries

E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counter bore dia B Counter bore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB

MXS

7 2 12 6.6 11 12 A B 34 16 34 16 H Cross section AA Cross section BB (NN-1) X H G (mm) Refer to "Dimensions" of MXS25 on p.3.11-23 for one with shock absorber as symmetric.

39

300.025 250.03 12.5 11 through P P Q M8 x 1.25 150.03 180.03 R28 Q M8 x 1.25 8.5 R50 4 33 12.5 8.5 20 550.05 3 22 22 12.5 R7 R27 20 22 22 R7 NAAMS code ACA007M ACA008M ACA009M ACA010M ACA011M ACA012M NAAMS code ACA019M ACA020M ACA021M ACA022M ACA023M ACA024M A B C D E F G H I A B C D E F G H I Part no.

High Power Cylinder Series RHC

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10

KJ

P. 22 KQ2X P. 20 KQ2Y KQ2L P. 18 Branch Y Plug-in reducer Male branch tee KQ2U KQ2R KQ2T P. 21 P. 22 Use to branch line in the same direction from female thread. Use to branch line from female thread in both 90 directions. Use to change size of One-touch fittings.

Series KDM Rectangular Multi-connector

Model . o N t r a P h c n I . o N t r a P c i r t e M e b u T . D . O f o r o l o C e s a e l e r n o t t u b f o r o l o C e s a e l e r n o t t u b g u l P t e k c o S g u l P t e k c o S e b u T . D .

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

A B !

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CRBU2W10-S CRBU2W10-SE A port B port For unit mounting A port B port For unit mounting (mm) (Depth) Q2 Model A B C D E(g6) F(h9) G H J K L M N P Q1 R S1 S2 T U V W X CRBU2W10-S CRBU2W10-SE CRBU2W15-S CRBU2W15-SE CRBU2W20-S CRBU2W20-SE CRBU2W30-S CRBU2W30-SE M3 (4) 10.5 10.5 M5 x 0.8 M3 x 0.5 M5 x 0.8 M3 x 0.5 -0.004 -0.012 0 -0.036

•

A 30 Hs Auto SWitch uto ASWltch P roper Mountm Position (mm) ' D-ASO D-A60 D-A30 D-A44 D-G39 D-K39 D-M90 D-M9OV D-M9OW D-M9OWV D-M90AL D-M90 AVL D-FSOW D-J59W D-FSBAL o.F50 D-J50 o.F59F 0.=80 o.Y5DN60 o.Y7PIY7PV o.Y70W o.Y70WV o.Y7BAL ~ switcl:l . rnod8l o.A90 o.A9OV o.A59W D-F5NTL A B A B A B A B A I B A B A B Bore size 125 9 8 13 12 6.5 5.5 3 2 7 I 6 9.5 8.5 14.5 13.5 140 9 8 13 12 6.5

Possible to transfer a workpiece at low-speed.

L r b a = K + mL2 K: The moment of inertia around the center of gravity of the load K = m r2 12 a2 + b2 = m In case of 4. Round plate 2 4. Round plate (Including column) Position of rotational axis: Passing through the center axis 9. Gear transmission (A) (B) No. of teeth = a 1. Find the moment of inertia B for the rotation of shaft (B). 2.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to