CA2

boot 2-P (Rc, NPT, G) 4-LD G G 4-J 2-cushion valve MM B1 Width across flats KA FV FY E D B e H1 AL B C f h + l l H A F N K N 9 FT S + Stroke FZ FX ZZ + l + Stroke ZZ + Stroke Stroke range (mm) A Bore size (mm) B B FV FD FX FY C AL B1 D E F FT FZ G H1 J Without rod boot With rod boot Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

VQ5000

106 46.8 59.2 9 9 U side 83.5 55.5 M5 ground screw 19 34.5 n 12 X 2n-Rc 3/8, 1/2 4(A), 2(B) port B 2 A 4 6 Indicator light B 2 A 4 A B 5 SMC SMC SMC SMC SMC A B B B B B B 2 A 4 Manual override A B 4 A L2 L1 58.5 P = 41 B 2 A 4 A B 3 A B 2 A 4 A B 2 A 34.5 48 68.5 P = 41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 17 22 51 69 117 D side 107.8 179 (Single, Double, 3 position, Rubber type) 184.5

New

, T1 = 297 p5 K, 0.07 bar b $P b 0.14 bar.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 3) Value for quick response type Symbol 2 position single 3 position closed center 3 position exhaust center 3 position pressure center 2 position double (Double solenoid) 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) Manifold Specifications Piping specifications Note 4) 1 station weight (g)

CRB2/CRBU2/CRB1

20 CDRB1BW 504 0.030 4 0.030 0 0 W 25 CDRB1BW 635 0.030 5 0.030 P 0 0 PORT 36 CDRB1BW 805 0.030 5 0.030 0 0 40 CDRB1BW1007 0.036 7 0.036 0 0 4-T S F CDRB1BW-SE, CDRB1BW-DE L E K Key length B port B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

2/3 Port Valve

and B port Supply pilot air higher than 0.25MPa to P1 port VNH VNH P1 P1 nozzle 1(P) 2(A) nozzle 1(P) 2(A) 3(B) 2 port valve Tank Coolant pump Tank Coolant pump For reducing load to pump, coolant liquid is returned form B port to tank in each time.

REA/REB

LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G With switch rail Q + Stroke Z + Stroke Piping port P (plug) Operating direction B HS CR HR Plug 22 8 Piping port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15

Prevents Micro-Bubbles

PA A B Suck back (single type) Suck back (unit type) P P P A A B B With indicator Description Material Parts list No.

Plug-in Unit

2 (A) 4 (B) 2 1 4 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) Coil voltage B: Locking type (Slotted) 12 VDC 5 6 24 VDC Note) 3 position pressure center 2 position double (metal) (A) 4 (B) 2 (A) 4 (B) 2 5 Note) S kit is only available for 24 VDC. 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 2 Function 2 position double (rubber) 3 position perfect (A) 4 (B) 2 (A) 4 (B) 2 Nil R Y Standard type (1 W)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.

Table of Contents

DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.

ZP

K Hexagon width across flats 12 Hexagon width across flats 12 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Bellows Bellows A A D E F N P E F N P B B Y Y C C D Misc.

CL

D C B H d Tube I.D.

REA/REB

B With switch rail Q + Stroke Z + Stroke HR Plug RS H A RZQ 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction A MI W S 12.5 19.5 16 CEP1 CE1 Plug CE2 REBR15 REBR15 ML2B (mm) C J G5-S A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15 12 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 CV REBR25 12.5 9.5 5.2 3 1

REA/REB

HP L 4-J Effective thread length E TC MQQ M X F WP WP RHC GW GP QW PW D 4-LD Piping port P Operating direction A MK(2) 7 W K G RS Q G HS CR Piping port P Operating direction B Piping port P (Plug) Operating direction B With switch rail Q + Stroke Z + Stroke HR Plug RS H A RZQ 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction

Modular F.R.L. Unit

Metal bowl Metal bowl with level gauge Metal bowl Optional specifications B B B B B B N.C.: Gray N.O.: Black B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Standard specification Bracket mounting size Accessory specification With pressure gauge With auto drain Port size Model B C D A Q T N P L M K K J H G F E B AC10B AC20B AC25B AC30B

Aluminum High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

VS 8-2/VS 8-4

How to Order Applicable solenoid valve model Interface regulator model Regulating port VVS8040-ARB-A-1 VVS8040-ARB-B-1 VVS8040-ARB-P-1 VVS8040-ARB-AB-1 A VSS R8-4 (Size 26 mm) B P A, B Unit: mm 50 54.5 148 SMC SMC 2 3/5 14 4 1 109.5 90 90 27 VVS8040-ARB-AB-1 VVS8040-ARB-1 A B P Regulating port: A Regulating port: A, B Regulating port: B Regulating port: P 25 Series VS 8-2/VS 8-4 S R S R Conforms

XL

(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.