REC

2, 4, 6, ) 10 15 60 60 + 45 (n 2) D-C73C D-C80C DH7C 10 15 65 (n 2) 2 15 + 50 ( ) 65 + 50 (n 2) (n = 2, 4, 6, ) (n 2) 2 15 + 50 ( ) D-B5/B64 D-G5NTL 10 15 75 (n = 2, 4, 6, ) 75 + 55 (n 2) (n 2) 2 20 + 50 ( ) D-B59W 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

RSQ

1 w o @0 !7 i !9 !

1

For ordering dust seal band (NBR lining) only MY 16 B N Bore size Stroke MY1 B XC67 Bore size Stroke Auto switch Suffix Dust seal band Hexagon socket head set screw thread treatment Dust seal band NBR lining Series: Bore size 10 16 20 25 32 40 50 63 80 100 B M (W) C (W) H HT Basic type Slide bearing type (With cover) Nil W Black zinc chromated Nickel plated Cam follower guide type (With cover

Air Pilot Operated Series NVSA

PC 0roGl 1 1 8 Typ "N" w/Operator & (4) Screws \2:) Alum. O.C. PC 0101.1 1 1 C Typ "8" Wo OpeEtor w/{4) Screws Alum. D.C.PC 0110,1t 1 1 D Type "A" W/opelator & (4) Scrws Alum. D.C. P C 0 1 1 1 . r l O.Flnq ' Op6ralol Buna N 13 Recessd Non.Locking Operator PB 0103 1 4 Screws .

SZ3000

Weight W (g) (2) SY W = 34n + m + 89 n: Number of SUP/EXH blocks m: Weight of DIN rail SYJ Note 1) In cases such as those where many valves are operated simultaneously, use type B (double side SUP/EXH), applying pressure to the 1(P) ports on both sides and exhausting from the 3(R) ports on both sides.

4-channel Flow Monitor ( compatible)

) 0x1F88 (8072) 1 R Rated range lower limit N S16 2 R Rated range upper limit N S16 3 R Measurable range lower limit N S16 0x1F9A (8090) 0x1F9B (8091) 0x1F9C (8092) 0x1F9D (8093) 4 R Measurable range upper limit N S16 5 R Settable range lower limit N S16 6 R Settable range upper limit N S16 1: "R" means Read and "W" means Write.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 (n 2) 2 100 + 100 Same side 100 + 100 (n 2) n = 4, 6, 8 n = 2, 3, 4 1 pc. 75 90 80 10 Different sides 35 75 90 80 Same side 55 75 90 80 90 + 30 (n 2) 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

Electric Actuator with Integrated Guide

Contact pin (preassembled) N 3 Terminal Pin no.

Thermo-chiller

Nil None A With caster adjuster-foot B With earth leakage breaker K Note) With uid ll port W Water-cooled refrigeration Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Specications Model HRS100-W -20HRS150-W -20Cooling method Water-cooled refrigeration Refrigerant R410A (HFC

Series MXP Precision Air Slide Table

When sum of load rate does not exceed 1, it is possible to use. 1+2+3<1 163 Series MXP Precision Air Slide Table How To Order How to Select Allowable load:W(N) Fig. 1 Over hung:Ln(mm), Corrected value for center position distance of moment:An(mm) Fig. 2 Pitch moment Yawing moment Roll moment W L2 A2 L1 A1 L3 A3 Mp Mr My Static moment Kinetic moment W W W L2 A2 L3 A3 L1 A1 W Mp Mr My W W

Basic Type/Direct Mount Type

HB HT HC N X A W K 2 x plug H 2 x P (Piping port) HA CB 4 x counter bore dia.

energy saving effect

Low Low Low Low High High Motor rotation rate Motor rotation rate Variations Cooling capacities ranging from 10 kW to 25 kW Air-cooled refrigeration Water-cooled refrigeration Model HRSH250-A HRSH300-A Model HRSH100-A HRSH150-A HRSH200-A Model HRSH100-W HRSH150-W HRSH200-W HRSH250-W Cooling capacity 10.5 kW 15.7 kW 20.5 kW Cooling capacity 25 kW 28 kW Cooling capacity 11.5 kW 15.7 kW 20.6

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

T

24 1 3 to 90 L x 5.3 + 200 TCU1208-1-N-X6 TCU0604-2-N-X6 1 3 to 35 N x 12 67 L x 5 + 200 6 4 N x 12 2 3 to 66 37 L x 3.8 + 200 12 8 TCU1208-2-N-X6 TCU0604-3-N-X6 2 3 to 30 67 N x 24 L x 3 + 200 37 N x 18 3 3 to 44 L x 2.5 + 200 : B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Clear), YR (Orange) 15-6-8 1 Polyurethane Flat Tubing Series TFU Compact piping possible Model

HRS100/150

Right Left Rear Front w q Parts List e Part no. Applicable model No.

Prevents Micro-Bubbles

Dimensions LLHAStations 4-Mounting hole for W Y K A D L2 L1 N Non-locking type Locking type L3 G 60 (H1) (H2) C SMC SMC SMC SMC V 1/4 1/4 1/4 E 3/8 U 2-P port Pitch = B n-A port (mm) Dimensions (mm) B C D E G H1 H2 K N U V W Y A Station Model LLH2A LLH3A LLH4A 2 3 4 5 Model 46.5 31 65 67 19 10 85.5 87 18 27 19 34 M4 5.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 47 36.5 94.5 76 27.5 19 125.5 127.5

Vacuum System Peripherals:

r e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 + 45 (n 2) 50 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 + 45 (n 2) 60 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15