Rotary Actuator

[mm] MSZ Size H N U UU 50 39 15 114 134 63 45 17 136 158 80 55 20 165 190 100 60 25 190 220 Size H N U 50 30 15 105 63 33 17 124 80 43 20 153 100 44 25 174 CRQ2X MSQX H MRQ FT F U Double shaft with key: ClRA1FY Double shaft with four chamfers: ClRA1FZ Note) Other dimensions are the same as the basic type.

Table of Contents

Rc G NPT Nil F N Port size 04 1/2 (Female thread) 14-20-51 2 Series ADH4000 Construction Component Parts q o i u !1 No.

Vacuum System Peripherals:

ZZYX3 45 F J Common specifications Ejector mounting position Positive common Negative common Nil N U side D side U D SUP/EXH block assembly specifications Mounting position of connector Standard, Internal pilot specifications External pilot specifications Number of ejectors 1 to 10 stations Nil R S RS U side D side U D Voltage specifications Internal pilot, Built-in silencer External pilot

Mechanical Valves Series NVM, NVFM, NVZNI

(36) 1.20 o,24 (6) (30) NV:2il450-N012 U T 4-63 lbs. (2.1 Ko) P.T 0.1 7 in. (4.4 mm) u 0.08 in. (2.0 mm) 0.25 in. (6.4 mm) '75 PSIG (5 Kgflcm2) A B c U E F G H K M N P R 525 t33 4) 4 3 9 1 1 1 4 ) 1 1 8 t30l ) 4 7 t22\ 0 0 6 a1 5l ) l t (3) 0 8 0 20 4\ 1 5 7 r4nl ) 7 1 tlAl 0 9 6 tr^ 5' 1 2 6 (32) 1.42 (36) 1 2 0 J U 5 (6) Millimelers in Parentheses NVAm5GNo13 F U F 4.63lbs. (2.1 Kq) P.T.

IIIIIII

36) 1.20 o,24 (6) (30) NV:2il450-N012 U T 4-63 lbs. (2.1 Ko) P.T 0.1 7 in. (4.4 mm) u 0.08 in. (2.0 mm) 0.25 in. (6.4 mm) '75 PSIG (5 Kgflcm2) A B c U E F G H K M N P R 525 t33 4) 4 3 9 1 1 1 4 ) 1 1 8 t30l ) 4 7 t22\ 0 0 6 a1 5l ) l t (3) 0 8 0 20 4\ 1 5 7 r4nl ) 7 1 tlAl 0 9 6 tr^ 5' 1 2 6 (32) 1.42 (36) 1 2 0 J U 5 (6) Millimelers in Parentheses NVAm5GNo13 F U F 4.63lbs. (2.1 Kq) P.T.

VQC

Kit type Thread type Port size F T Rc G NPT/NPTF 1 2 S Kit T Kit Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B VQC4000 Port size VQC2000 VQC1000 3.2 One-touch fitting 4 One-touch fitting 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported U-side end plate assembly !2 U-side end plate assembly part no.

SYJ300/500/700

For type R and U, DC voltage is only available. Power saving circuit is only available in the Z type. Bracket AC (50/60 Hz) Nil: Without bracket F: With bracket 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 3 port For type W, DC voltage is only available.

MB

H F ZZ + Stroke Standard model no.

CJ2

Component Parts No. q w e r t y No. u i o !0 !

Title not found

Protective Face Cover a i t More usr-f riendly controls a Raised rubber button fil controls are clearly U" set apart. simple to fr operate, soft to the !a toucn. .

Fluoropolymer Piping Equipment

21.5 LQ1R2E-F3/16" 2.9 LQ1R2F-F 1/8" 1.8 LQ1R3A-F 3/8" 1/4" 3.6 21.5 LQ1R24-F 4 2.6 LQ1R2F-F 3 1.8 LQ1R31-F 10 1/4" 5.8 21.5 LQ1R3B-F 1/4" 3.6 LQ1R3C-F 3/8" 3/8" 25.5 5.8 25 LQ1R3D-F 1/4" 3.6 LQ1R3F-F 3/8" 1/8" 34.5 19.7 5.8 18.5 LQ1R4A-F 1/2" 3/8" 24 7.4 5 20 9 18 17 36.5 21.5 LQ1R32-F 8 5.5 LQ1R33-F 6 3.6 LQ1R34-F 10 3/8" 25.5 24 23 5 9 18 36.5 7.4 20 17 23 25 LQ1R35-F 8 5.5 LQ1R36-F 6

CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

CRB2/CRBU2/CRB1

F = mg Mass m Movement I: Inertial moment Refer to page 100. Static torque calculation Tf = F x L (Nm) Load . g = 9.8m/s2 F: Pressing force (N) : Angular acceleration Load .

Floating Joint

nominal thread size 40-150 M40 x 1.5 45-150 M45 x 1.5 Basic Type: JA JA180 200--X530 Center of sphere M M U U D Width across flats F 60 B E H G P A R Dimensions (mm) DMaximum operating tensile and compressive force (N) Center of sphere R Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B D E F G H Weight (kg) Nominal size Pitch -X 180 JA180-40-150-X530 40

Modular Type Filter Regulator Series AW

u u Drain Drain Drain Parts list Material No.

VS 8-2/VS 8-4

9 D-Side End Plate Assembly @0 U-Side End Plate Assembly MES80 D 03 2 MES80 U 03 2 Size 2 4 Size 18 mm Size 26 mm Option Size 2 4 Size 18 mm Size 26 mm Option Nil Nil None External pilot Built-in silencer External pilot + Built-in silencer -S None Built-in silencer -R -S Thread type -RS Nil Rc G NPTF F T Thread type Nil Rc G NPTF F T Port size Symbol 03 04 Port size 3/8" 1/2" Size 18 mm

Thermo-chiller/Rack Mount Type

2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Secondary Batteries

How to Order 90-ZPTSeries With buffer ZPT A8 U 06 K F 6 B5 90 Vacuum Equipment Mounting thread diameter/ Male thread Series compatible with secondary batteries A8 M8 x 1 90 Material restriction Vacuum entry port Pad diameter (mm) B5 M5 x 0.8 06 6 Buffer stroke Pad type 6 6 mm U Flat Buffer type K Non-rotating Material F Fluororubber *Specifications and dimensions for the 90-series are the

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 B A u !7 !6 y q w t !5 r e i u !2 !3 In-line motor type: LEY D 25 32 63 !2 #0 @9 When rod end male thread selected u u !0 @6 @7 @8 @7 @5 Component Parts No. Description Material Note No.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

force acts on Section F Displacement of Section A when force acts on Section F Guide central axis (1 axis type) F A F F For the double axis type, this is the cylinder's central axis.