Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

or output range 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 3 Reserved 3 4..6 (Ch1 in) Analogue input or output range 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 7 Reserved 0..2 (Ch0 out) Analogue input or output range 0 to 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 3 Reserved 4 4..6 (Ch1 out) Analogue input or output range 0 to 3: 0..10 V, 4

Basic Type/Direct Mount Type

400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 12 13 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 Distance from cylinder shaft center Lo (cm) 1464 Model Selection CY3B/CY3R Series

Profile Design ISO/VDMA Air Cylinder Series CP95

E B1 B2 B3 TG1 T L1 L3 I1 I2 FL H d1 d2 d3 CN XD 32 45 14 34 3.3 32.5 3 11.5 41 5 5.5 22 10 30 10.5 6.6 10 142 40 55 16 40 4.3 38 4 12 48 5 5.5 25 10 35 11 6.6 12 160 50 65 21 45 4.3 46.5 4 14 54 5 6.5 27 10 40 15 9 16 170 63 75 21 51 4.3 56.5 4 14 60 5 6.5 32 12 45 15 9 16 190 80 95 25 65 4.3 72 4 16 75 5 10 36 16 45 18 11 20 210 100 115 25 75 6.3 89 4 16 85 5 10 41 16 55 18 11 20 230 Mounting

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load Weight Allowable Moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) Q1 = M Y L2 max Q2 L2(3 x P) Size C1 = C (mm) D5.5 to 8 10 3 Y 1 Q1 L1 max X Size 10 5.5 to 14 X 1 3 7.5 to 9 15 3, 4 Y 1.5 Y = L2 = C2 = C L1(3 x P) 15 7.5 to 18 X 1.5 3, 4 9.5 to 10 20 3, 4, 5 Y 1.5 X = L1 = 20 9 to 20 X 1.5 3, 4, 5 11 to 13 30 3, 4, 5, 6 Y 2 Q2 = M 30 11 to 22 X 2 3, 4, 5, 6 14 to 15 40 3, 4, 5, 6, 8 Y 4.5 105 Series CRBU2 Axial: Top (Long shaft side) Axial: Bottom

Possible to transfer a workpiece at low-speed.

Description Qty. 4 4 4 4 1 1 1 1 Seal Seal Seal Seal 10 10 10 10 1 1 1 1 Gasket Gasket Gasket Gasket Parts included in seal kit 11 11 11 11 1 1 1 1 Gasket Gasket Gasket Gasket 15 Wear ring 15 Wear ring 15 Wear ring 15 Wear ring 4 4 4 4 16 Piston seal 16 Piston seal 16 Piston seal 16 Piston seal 4 4 4 4 25 Seal washer 25 Seal washer 25 Seal washer 25 Seal washer 2 2 2 2 A set includes all

LEY-OM007

-10 (INC) c 10[mm] 0 10 20 30 40 50 [mm] -27- 4 a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 20.00 3000 3000 80 40 30 100 10.00 20.00 20.00 No.00[mm] 20[mm]20[mm] 1 10 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP 2 k INPON g 30 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP INPOFF () k g BUSYONOFF -28- 5 a b c d e f g h i j k No. 1 2 mm/

MQQ

Bore size (mm) Stroke range (mm) A B L LD LG LH LY LH 10 10 to 40 44.3 31.5 8 4.5 2.8 19 4-LD X X LG Y Y RE A B LT 16 10 to 60 51.2 34 10 6.6 4 24 LS + Stroke LX LZ 20 10 to 60 54.7 37.5 10 6.6 4 26 A + Stroke REC 25 10 to 50, 75, 100 61.2 42 12 6.6 4 30 28 10 to 50, 75, 100 67.7 48.5 12 6.6 4 33 25, 28 CX L B + Stroke Bore size (mm) LS LT LX LY LZ X Y CY 10 19.5 2 38 33.5 48 8 5 M LY 16

MQQ

70.5 87.7 10 6.6 4 24 20 10 to 60 79 96.2 10 6.6 4 26 25 10 to 50, 75, 100 84.5 103.7 12 6.6 4 30 Y Y 4-LD X X LG LT 28 10 to 50, 75, 100 104 123.2 12 6.6 4 33 LS + Stroke LX LZ RE A B A + Stroke B + Stroke L REC 25, 28 Bore size (mm) LS LT LX LY LZ X Y CX 10 49.5 2 38 33.5 48 8 5 M LY 16 58.5 3.2 48 42 62 9.2 5.8 LH CY 20 64 3.2 52 46 66 10.7 5.8 25 68.5 3.2 57 57 71 11.2 5.8 X X LG Y Y

CP95

max) d1 I1 (min) 32 5 5.5 30 10.5 6.6 11 14 34 3.3 3 22 10 17 45 10 32.5 40 5 5.5 35 11 6.6 13 16 40 4.3 4 25 12 20 55 10 38 50 5 6.5 40 15 9 18 21 45 4.3 4 27 16 22 65 10 46.5 63 5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3

CP95

5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35

SQ1000/2000

BS+ BDH BSFG 24V 0V COMM BDL (108.5) Approx. 10 101 68 34 10 4.6 A A B A B A A 2.PUSH 2.PUSH 1.TURN 1.TURN B 28 5.5 35 74.5 ADDRESS No. 13 2-M4 clamp screw EXH outlet Approx. 9 1.5 D side U side Stations 1 2 3 4 5 6 7 8 n Approx. 9 C8: EXH port For top ported C8: SUP port 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 81.5 67 2n-C3, C4, C6, M5 (A, B port) C3:

Rotary Table/

A Displacement MSQ10 MSQB1A MSQB10 (Basic type) 100 Displacement m Displacement m 400 90 80 350 10 20 30 40 MSQA10 (High precision type) 70 60 0 6 5 4 3 2 1 0 5 10 15 20 25 30 Load N Load N MSQ20 MSQB2A 300 100 MSQB20 (Basic type) Displacement m Displacement m 250 80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic

Compact Cylinder with Air Cushion

73 55 30 to 100 M FV 80 11 11 99 116 134 20 53.5 77 83.5 63.5 40 to 100 100 11 11 117 136 154 22 53.5 94 98 76 40 to 100 4-FD FT L FX FZ B + Stroke A + Stroke Rod end male threads Rod end nut L1 Rear flange type/RQG, RDQG Rear flange type mm Bore size (mm) Stroke range (mm) L1 L A FV M 33.5 8 63 72 30 to 100 43.5 10 80 84.5 40 to 100 B + Stroke 4-FD 43.5 12 100 99 40 to 100 L FT FX FZ A +

SV

With External Pilot Specifications (Pitch) 13.5 P = 10.5 18.3 14.1 8.4 60.6 SV 8.6 45.5 10 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 24.6 SZ 23 59.5 5 3 E 3 5 E 3/5 E 3/5 E 43 56.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 SY 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 5/16" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6,

42

installed 100 with AMC610-10 installed 100 with AMC610-10 installed = 100 with AMC610-10 installed 118 (135) (=105 with AMC810-14 installed) ( 105 with AMC810-14 installed) 118 (135) 159 (172.5) (105 with AMC810-14 installed) (= 105 with AMC810-14 installed) 159 (172.5) 158.7 158.7 3/4" 1(P), 5(R1), 3(R2) port 3/4" 1(P), 5(R1), 3(R2) port 2 x G1 (Electrical entry) 12 21 47.5 47.5 36 21

Modular F.R.L. Units

-R1 G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G27-10-R1 G36-4-01 G46-4-01 Round type (with color zone) Standard G36-10-01-L G46-10-01-L 0.02 to 0.2 MPa setting G36-4-01-L G46-4-01-L Square embedded type 2 Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] 0.02 to 0.2 MPa setting GC3-4AS [GC3P-010AS (Pressure gauge cover only)] Option Pressure gauge 1 ISE35-N-25-MLA [ISE35-N-

Floating Joint

Model Order no. d: Thread nominal size d: Thread nominal size H H B C B C JA6-3-050 JA10-4-070 JA15-5-080 JA15-6-100 JA20-8-100 JA20-8-125 JA32-10-100 JA30-10-125 JA25-10-150 JA40-12-125 JA40-12-150 JA40-12-175 JA40-14-150 JA50-16-150 JAH40-16-150 JA63-16-200 JA63-18-150 JAH50-20-150 JA80-20-250 JA80-22-150 JAH63-24-150 JAH63-24-200 JA100-24-300 JA100-26-150 JA100-27-150 JA125-27-200 JA140

CE

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4-4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 1130.2 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 5 sec 64 5 sec 59 5 sec 3) 15 mA when BCD is output.

LG1H

Positioning distance (mm) 1000 500 100 10 1 10 100.5 50.5 10.5 1.5 0.5 100 10.5 5.5 1.5 0.6 0.5 Speed (mm/s) 500 2.7 1.7 0.9 0.6 0.5 1000 1.9 1.4 0.9 0.6 0.5 A B C D Values will vary slightly depending on the operating conditions.