DOC1003626

Field name Example RTU mode ASCII mode (HEX) character data binary data Header : None Device address 0x01 0,1 0x01 Function 0x04 0,4 0x04 Quantity of bytes to read 0x02 0,2 0x02 Information of 0009h(Data display 1) 0x00FA 0,0,F,A 0x00,0xFA Checksum ASCII:LRC RTU:CRC F,F 0x39,0x73 Trailer CR/LF None Total quantity of byte 15 7 * Response message at an ambient temperature of 25.0C 3.13 Register

Compact Cylinder with Air Cushion

16 11.5 15 9 13 13 13 14 14 9.5 9.5 9.5 17 11.5 D-A79W D-A9, A9V D-F7, F7V D-J79, J79C, J79W D-F7W, F7WV D-F79F, F7BAL D-F7BAVL 5.5 5 6 6 6 6.5 6.5 7 7 7 8 7 8 8.5 8 9 D-F7LF D-F9, F9V D-F9W, F9WV D-F9BAL 5.5 5.5 5.5 6.5 5.5 6.5 Hysteresis specifications are given as a guide, it is not a guaranteed range.

MGC

View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

SYJA3 20-M3-F The mounting bracket for the 2 position double solenoid and 3 position is supplied unattached.

ZQ

above dimensions are for ZQ11U-J2 L-F.

VQ5000

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

RQ

Bore size (mm) C1 H1 L1 X 32 40 50 20.5 23.5 M14 x 1.5 28.5 20.5 23.5 M14 x 1.5 28.5 26 28.5 M18 x 1.5 33.5 Basic Style A B C D E F H I J K L M N Bore size (mm) 32 40 50 Stroke range (mm) 20 to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 OB P Q RB S U Z Bore size (

CLQ

CLQ Without Auto Switch B 40 30 D F A73 S CDLQ With Auto Switch Number of auto switches With auto switch (built-in magnet) Nil S n 2 pcs. 1 pc.

Environment

Note 13) With lock only Note 14) For an actuator with lock, add the power consumption for the lock.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

5 Port Air Operated Valve

Description Material Note Body 1 Aluminum die-casted White Pilot plate 2 Aluminum die-casted Gray : Aluminum die-casted Resin VFA3130-F VFA1120-F End plate 3 White Piston 4 Resin Spool valve 5 Aluminum, HNBR Spring 6 Stainless steel Bracket Assembly Part No. Description Part no.

HRX-OM-R016

Model number: HRS030-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

CXS

B Model A B C D E F G CXS6 9 2.1 3.25 6.5 7 1.2 x 12 10 CXS10 9 2.1 5 10 7 2.5 x 14 10 G CXS15 12 2.1 6 12 7 3 x 16 13 CXS20 15 3.1 7 14 10 4 x 20 16 CXS25 20 3.1 7 14 10 5 x 22 21 CXS32 26 4.1 9 18 12 6 x 32 27 Dimensions other than those listed above are the same as for the standard type. 6 -XC18 NPT finish piping port Specifications CXS XC18 Bore size Stroke Auto switch Slide bearing

CLQ

Bore size (mm) T1 T2 M F E D B Part no.

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

4-channel Flow Monitor ( compatible)

Error output -11No.PF-OMA1011-A Term Definition F A mode in which setting of functions is performed. If any function settings need to be changed from the factory default, each setting can be selected with "F".

Compact and Lightweight

L1 L21 L3 M1 d2 M3 Q1 D22 2 x F VAC.

VCC

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.

Modular F.R.L. Unit

E F F E E B C Cross interface E: 4-Rc F: Without thread A D E Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable model AC10 Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 D 25 B 16 A 23 AC20 22 40 40 40 AC25, AC30 28 48 43 49 AC40 Cautions in Mounting 36 54 48 60 62 When mounting a cross interface directly on the IN side of the lubricator, be sure to use a

Thermo-chiller

G3/4, Symbol N: NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic uid ll system (Standard) Pump capacity Supply side pressure range 29 to 73 psi (0.2 to 0.5 MPa) Supply side uid temperature 41 to 95 F (5 to 35C) Automatic uid ll port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper