MQQ

RR CL + Stroke RR 15 6.5 12 8 6 10 A + Stroke 18 8 16 10 9 16 20 10 20 10 10 20 20 18 36 12 10 25 22 18 36 12 10 28 8 Series MQQ Accessory Dimensions Rod end thread adapter Rod end nut d NN MM Rod D C C B H E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

100 V, 200 V 12 V 2-wire 24 V CJ1 No 200 V or less Relay, PLC Yes Connector 24 V or less 5 V, 12 V No IC circuit CJP Grommet Diagnostic indication (2-color indication) Yes 3-wire (NPN) 3-wire (PNP) IC circuit CJ2 5 V, 12 V Grommet 12 V 2-wire CM2 Connector 3-wire (NPN) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 3-wire (PNP) 24 V CG1 Courtesy of Steven

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(12, 14 port) 10.5 (2, 4 port) VS4 85.5 72.5 VQ7 10.5 PE port 29 14 SMC EVS M5-2 port 12, 14 port 1/8, 1/4-2 port 2, 4 port 1/8, 1/4-2 port 3, 5 port 21 21 VFN 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4 2 12 12 26 35 45 26 35

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

at A when load is applied at F .

Free Mount Cylinder

(mm) DQ HQ HP 4 6 8 10 13 16 20 25 32 40 50 10 16 25 40 6 8 10 13 16 20 25 32 40 50 2.6 4.8 31 12 7 26 10 7 31 12 9 26 10 9 10 10 26 26 2.6 4.8 32 13 7 32 13 9 DQ HQ HP ZP ZC(D)UKD16 ZC(D)UKR16 12 12 31 31 15 12 33 18 16 37 28 20 44 DQ HQ HP 12 18 12 15 36 15 18 20 41 12 16 37 ZC(D)UKD20 ZC(D)UKR20 ZP 12 33 12.5 18.5 33.5 23 14 38 39.5 28 14 38 34 29 53 35 22 27 24 48 DQ HQ HP ZC(D)UKD25

Rotary Actuator

[mm] Size F H MM U FD N H H 50 4 39 M6 x 1.0 depth 12 114 9 63 5 45 M6 x 1.0 depth 12 136 11.5 UU U UU U 80 5 55 M8 x 1.25 depth 16 165 13.5 100 5 60 M10 x 1.5 depth 20 190 13.5 N Size FT FX FY ZX ZY 50 13 90 50 110 81 Note) Other dimensions are the same as the single shaft type. [mm] Note) Other dimensions are the same as the single shaft type.

IDG

Note 2) They are not applicable in case the thread type is N or F.

Wedge Cam Operation Gripper Series MHK2

4 12 Parallel opening/closing type MHK2-16 6 16 Standard model MHK2 series MHK2-20 10 20 MHK2-25 14 25 MHKL2-12 11 12 MHKL2-16 14 16 Long stroke model MHKL2 series MHKL2-20 18 20 MHKL2-25 22 25 5 Series MHK2 Wedge Cam Operation Gripper How To Order 12, 16, 20, 25 How To Order MHK 2 20 Standard model F9NL S D 1 F Long stroke model MHKL 2 20 S 1 F F9NL D Number of auto switch Number of fingers

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Applicable solenoid valve Refer to page 12. Type 21P How to Order A, B port M3 x 0.5 SS5YJ321P 07 Applicable connector assembly Refer to page 12. P, R port thread type Stations 04 4 stations Applicable blanking plate assembly SYJ3000-21-3A (With dust cap) Nil Rc : : 00F G 12 12 stations P port 1/8 1/8 00N NPT R port 00T NPTF Applicable solenoid valve Refer to page 12.

MRHQ

Example: Allowable load F (N) = M (Maximum allowable moment) (Nm) L x 10-3 0.68 30 x 10-3 Allowable load F = Unit conversion factor = 22.7 (N) > 10 Since load F > f, it is operable. 12-11-11 12 Series MRHQ Moment of Inertia and Allowable Kinetic Energy Moment of Inertia Calculation and Allowable Kinetic Energy Graph (Moment of inertia and rotation time) 200 Calculate the moment of inertia

Integrated Controller

Wiring Examples Operation Data Setting Options Specific Product Precautions EQFS25RH Motor option: With lock (132.5) (16) (2) 3 H9 (+0.025 0 ) depth 15 (Depth of counterbore 12) (172.5) (2) (16) Body mounting reference plane (B dimension range)1 4 x M5 x 0.8 thread depth 20.5 (Depth of counterbore 12) 128 38 3.5 50 22.5 (Depth of counterbore 12) 3 H9 (+0.025 0 ) depth 15 45 64 (102) L +

Thermo-chiller/Rack Mount Type

For pipe thread type F , a G thread conversion fitting set is included.

Square Tube Type Air Cylinder Series MB1

Seal kits consist of items 12, 13, 14 and 16 contained in one kit, and can be ordered using the order number for each respective tube bore size. 13 Series MB1W Standard Type MM MM G VW 2-Rc(PT)P G Cushion valve Port Basic type/(B) E D D E e MB Effective thread Effective thread 13 f 16 h 9 2 x 4-J N F l H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot MM 2-Rc(PT)P G G

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Rubber back of the belt is softened and sticky f.

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

Series IDG

flats 17 Purge air discharge tubing port for dehumidification Applicable tube O.D.: 12 (NPT threads: 1/2 inch) Applicable tube O.D.: 10 (NPT threads: 3/8 inch) 26 Series IDG Membrane Air Dryer Dimensions (mm) (M Type) 1in = 25.4mm , , IDG60HM, 75HM, 100HM IDG60M, 75M, 100M (A) (B) Port size D (C) L Purge air for dew point indicator M J K N H G 37 22 18 OUT IN (F) (E) (352) Purge air for

Wedge Cam Operation Provides

F = one finger thrust.

3 Port Air Operated Valve

1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 11.2 30 18.5 1/8, 1/4 3(R) port 1/8 12(PA) port 2A NO 35 43 NC 12 12 3R 1P NC (1/8) 12(PA) port 12 6.7 58.2 18.5 65.2 60 59 24 X 12 M5 x 0.8 (Breathing hole) 19.5 39 1/8, 1/4 1(P) port For vacuum/VPA344V-101 02 A B 1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 1/8, 1/4 3(R) port 18.5 11.2 30 2A NO 35 43 NC 12 3R 1P NC 1/8 12(