Parallel I/O Type: 6 (PNP), Mounting: 8 (DIN Rail Mounting), Cable Connector: 5 (5), Actuator: LEFB (Belt Drive), Type: Basic Type, Body Size: 32, Motor Mounting: In-line, Lead: T (48mm), Stroke: 1200mm

Parallel I/O Type: 6 (PNP), Mounting: 7 (Screw Mounting), Cable Connector: None, Actuator: LEFB (Belt Drive), Type: Basic Type, Body Size: 32, Motor Mounting: In-line, Lead: T (48mm), Stroke: 1200mm

Parallel I/O Type: P (PNP), I/O Cable Length, m: 1 (1.5), Option: Screw Mounting, Actuator: LEFB (Belt Drive), Accuracy: Basic, Size Motor Mounting and Lead: 32T (Size 32, 48mm Lead), Stroke: 1200mm

Parallel I/O Type: P (PNP), I/O Cable Length, m: 5, Option: Screw Mounting, Actuator: LEFB (Belt Drive), Accuracy: Basic, Size Motor Mounting and Lead: 32T (Size 32, 48mm Lead), Stroke: 1200mm

Parallel I/O Type: P (PNP), I/O Cable Length, m: 3, Option: Screw Mounting, Actuator: LEFB (Belt Drive), Accuracy: Basic, Size Motor Mounting and Lead: 32T (Size 32, 48mm Lead), Stroke: 1200mm

Parallel I/O Type: N (NPN), I/O Cable Length, m: 1 (1.5), Option: Screw Mounting, Actuator: LEFB (Belt Drive), Accuracy: Basic, Size Motor Mounting and Lead: 32T (Size 32, 48mm Lead), Stroke: 1200mm

Parallel I/O Type: N (NPN), I/O Cable Length, m: 3, Option: Screw Mounting, Actuator: LEFB (Belt Drive), Accuracy: Basic, Size Motor Mounting and Lead: 32T (Size 32, 48mm Lead), Stroke: 1200mm

Parallel I/O Type: N (NPN), I/O Cable Length, m: 5, Option: Screw Mounting, Actuator: LEFB (Belt Drive), Accuracy: Basic, Size Motor Mounting and Lead: 32T (Size 32, 48mm Lead), Stroke: 1200mm

Parallel I/O Type: N (NPN), I/O Cable Length, m: No Cable, Option: Screw Mounting, Actuator: LEFB (Belt Drive), Accuracy: Basic, Size Motor Mounting and Lead: 32T (Size 32, 48mm Lead), Stroke: 1200mm

Parallel I/O Type: P (PNP), I/O Cable Length, m: No Cable, Option: Screw Mounting, Actuator: LEFB (Belt Drive), Accuracy: Basic, Size Motor Mounting and Lead: 32T (Size 32, 48mm Lead), Stroke: 1200mm

XM, XY

XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3 S1

Digital Gap Checker

This reduces noise considerably compared with A much lower air consumption is required than the current model. the current model. 1: Conditions: Unseated for 5 seconds and seated for 20 seconds (For G type) Comparison of detection circuit ISA3 New New Current model (ISA2) A B EXH port EXH port P1 Sensor Sensor SUP port S1 S3 SUP port S2 Sensor S1 S4 S2 Detection port P2 Detection port C D

Dedicated Controller

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Electric Actuator with Integrated Guide

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Lubrication Equipment

AL How to Order ALD600 ALD 20 B 9 00 S1 Float switch Style None ALD ALDU D.P. Lube (Single unit) D.P.

Proposals for Energy Saving

Large diameter piping Small diameter nozzle S1 Pressure loss: Small With nozzle S2 Effective area ratio 2:1 6 Pump capacity Previous rate Pressure Pump head (electric power) Pressure loss: Small P Pump outlet Nozzle outlet Discharge rate Main Points Improve pressure loss. Improve the effective area ratio with the upstream side by using a small diameter nozzle.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1

ITVH

(Error number 5) Vs : Power supply 24 VDC A : Input signal 4 to 20 mA DC 0 to 20 mA DC Vs : Power supply 24 VDC Vin : Input signal 0 to 5 VDC 0 to 10 VDC 4 points preset input type Brown Blue S1 White Vs Black S2 Vs: Power supply 24 VDC (Negative common) One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2.

Dedicated Controller Series LC1 Uniaxial Type

LC1-1-S1 (PC-98 (MS-DOS) edition LC1-1-W1 (Windows 95 edition) and LC1-1-R (dedicated communication cable) Power supply 1 2 Note 2) 100/110VAC 50/60Hz 200/220VAC 50/60Hz or LC1-1-T1(Teaching box) are required. For ordering information, refer to the option part numbers on page 62.

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable Without cable Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2