Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

u s d Particulate generation has been reduced at the stroke ends by reducing impact using a sine cushion and by stopping the stroke using an internal stopper. i e Reduction of outgassing due to surface treatment n Impact acceleration [m/s2] o u d t R g g e a c 1 s u s d 5 i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated

End Lock Cylinder Series CBG1

Non-lube type Type Air Fluid 1.5MPa Proof pressure 1.0MPa Maximum operating pressure 0.15MPa Minimum operating pressure Without auto switch: 10C to 70C (with no freezing) Ambient and fluid temperature With auto switch: 10C to 60C (with no freezing) Pulling force Stroke (mm) Bore size (mm) Piston speed 50 to 700mm/s 50 to 1000mm/s Thread size N st + 1.4 0 to 1000 mm Stroke length tolerance

Tamper Proof and Flat Head Screw

How to Order D 01 S AS 2 0 0 2 Body size Flat head screw driver adjustable type 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard JIS symbol With sealant Note) Sealant is not provided for ports with M5 and 10-32UNF threads. These are available with gaskets as standard.

Ambient Dryer Series AMG

20 '10 456 180 s t5 24 1m 1 U 220 1 1 0 18 6.0

Siiiil"Tivrc

1 I.{ 50 114 139 13 100 10 t 15 5 9 5.5 v 74 4.5 AMG25O 3/8 '152 13 1 1 3 6 10 '| 69 n '12 4 84 a 5 2 n Ai/lc350 1/2 144 16 145 s s '10 198 m 2 14 7 80 100 g 2.3 ANtG450 314 205 19 147 106 106 JO s 10 14 88 1 1 0 3.2 AMG55O 239 200 10 257 100 s 10 't6 102 130 m 10 4.5 AIVG&5O 1 112 291 c 253 r60 160 10 364 150 .10 20 1 1 s 136 180 4.5 2 48 a 348 220 ?

76

Ticaret S irketi THAILAND SMC (Thailand) Ltd. ITALY SMC Italia S.p.A. MOROCCO (Distributor) Soraflex PHILIPPINES Shoketsu SMC Corporation GREECE SMC HELLAS E.P.E TUNISIA (Distributor) Byms INDIA SMC Pneumatics(India)Pvt.Ltd. IRELAND SMC Pneumatics (Ireland) Ltd. EGYPT (Distributor) Saadani Trading & Industrial Services ISRAEL (Distributor) Baccara Geva A.C.S. Ltd.

Refrigerated Air Dryer

Breaker capacity Sensitivity current Model Voltage Maximum operating pressure: 1.6 MPa (IDFA100F to 150F: 1.0 MPa) IDFA4E-23, IDFA6E-23 IDFA8E-23, IDFA11E-23 5 A The timer-type solenoid valve actuates once (for 0.5 s) every 30 s. Replacement Parts 230 V type IDFA15E1-23, IDFA22E-23 IDFA37E-23, IDFA55E-23 IDFA75E-23 10 A 30 mA Model Part no.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

Series 12-REA Sine rodless cylinder

12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x 16 M8 x 1.25 x 16 188

Micro-Mist Separator with Prefilter Series AMH

-~-Micro-Mist Separator '-Made to order s ecifications" J Drain guide 1/48 female thread R IN OUT reversal 250 1/4 T Element service indicator 350 3/8 450 1/2 550 3/4 650 850 11/2 Thread B Bracket C N.C. auto drain(AMH150-550) o N.O. auto drain Rc (plj F GlPFl .. Refer to the table below for combination N NPT of accessories and optional specifications.

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

0.4

Response time (ms) Model Power consumption Flow rate Max. operating frequency Saving energy and continuous energization required ON OFF SX1-D 4 W 50 L/min 350 Hz 1.25 0.4 Select the 4 W type.

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

01(R) Note 1) Option Note 2) When two or more symbols are specified, indicate them alphabetically. (2) 01 [Rc 1/8] 02 [Rc 1/4] 02 [Rc 1/4] 03 [Rc 3/8] VQZ200 VQZ200-S(2) VQZ300 VQZ300-S(2) Note) Symbol R indicates an external pilot.

1

Vacuum L = Effective area H = Fixed hysteresis (2% F .S.)

LMU100/200 Series Mist Spray Unit

Model LMU100 LMU200 ALF ALT Inlet air pressure Oil tank set pressure range Oil Dynamic viscosity of oil (40C) 0.1 to 1.0 MPa 0.05 to 0.2 MPa Turbine oil, Non-water soluble cutting oil (JIS, N1 type) 2 to 200 mm2/s Total capacity: 3000 Effective capacity: 2500 5 to 50C 100 VAC 50/60Hz, 200 VAC 50/60Hz, 24 VDC ALD ALB Oil tank capacity (cm3) Ambient and fluid temperature Solenoid valve voltage

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

Symbol Nil R S RS Specifications Internal pilot specification External pilot specification Internal pilot specification/Built-in silencer External pilot specification/Built-in silencer Mounting position Symbol Applicable stations B 2 to 16 stations 2 to 10 stations 2 to 10 stations D U D side U side Both sides M Special specifications Indicate special specifications separately on a manifold

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Supply/Exhaust block assembly mounting position Specifications Internal pilot specification External pilot specification Internal pilot specification/Built-in silencer External pilot specification/Built-in silencer Symbol Nil R S RS Specified layout: Indicate the wiring specifications on a manifold specification sheet.

Adsorption Plate

Adsorption force (Theoretical fixing force) W = P x S x K (0.15) x 0.1 W : Adsorption force (N) S : Adsorption surface area (cm2) P : Vacuum pressure (kPa) K : Aperture ratio 0.15 (15%) Do not apply a pressure or load of 0.1 MPa or more to the adsorption surface. Doing so may cause a reduction in flatness, damage, or impact marks.