Rotary Table/

3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

Thermo-chiller/Rack Mount Type

Operation Display Panel The basic operation of this unit is controlled through the operation panel on the front of the product. q e o t r !0 !1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

MXQ

8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

IR1000/2000/3000

IRV1000 IRV2000 IRV3000 P538010-6 P538020-3 P538030-5 q w e r t y u i o !0 !1 !2 !3 !4 !5 HNBR, etc.

RSQ

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

80

110 VAC 1.6 D 200 VAC K L M N P Q R S T U V W 1.6 E 230 VAC 2.3 M5 Z Other voltages 3.2 Brass 1.6 2.3 1/8 For other special options, refer to page 462.

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: 6 (600mm)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: 10 (1000mm)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: KO (Plug Connector, w/o Connector)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: KOZ (Plug Connector, w/o Connector)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: KZ (Plug Connector, 300mm)

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 600mm, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 1000mm, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

Basic Type/Direct Mount Type

0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

39

L M N O P Q R K L M N O P Q Part no.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 q e w t !2 !4 !3 e !0 q o Spring acting/Spring return/With auto switch (Built-in magnet) Single acting/Spring extend/With auto switch (Built-in magnet) 12, 16 !2 t w !4 y i !1 !3 e !0 q o t w !0 r q o i !1 !3 e 20, 25 w t !2 !4 !1 !3 e !0 q o w t !0 r o q !1 !3 e Component Parts Rod end nut No.

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust