REA/REB

9 y q i !6 RE A B REC CX CY MQQ M RHC #2 !1 w t #6 #0 @2 u o r !3 !2 #5 !7 #1 #3 #4 e !8 @3 MK(2) @7 @8 @5 @6 RS Q G RS H A RZQ MI W S CEP1 N@4 @9 CE1 Component Parts CE2 No. Description Body No. Description Note Hard anodized Material Aluminum alloy Material Note Hard anodized Aluminum alloy Plate A q !

ZP

6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 119 137.5 141 6 13.5 25 28 50 53 ZPT32F10-0-A14 16 36.5 49 115.5 134 135.5 13 32 35 Additional Dimensions by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q

AC

Description Material VER2000 VER4000/4001 VS7-1-A DXT172-8-6 AXT500-13 Metallic painted Body q w e !1 Aluminum alloy VS7-2-A Aluminum alloy Sub-plate r t y u i o !0 !2 !3 !4 !5 !6 Block packing !

One-touch Fittings Series KQ2

Q K 7 1 7 . 1 2 7 1 8 2 8 5 3 6 2 2 9 2 7 2 / 1 8 / 3 S 3 0 3 1 L 2 Q K 0 6 5 . 4 6 6 . 9 8 7 2 / 1 S 4 0 3 1 L 2 Q K 2 2 5 . 6 6 9 6 9 4 1 Branch tee: KQ2T Inch Applicable tube O.D.

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Electric Actuator/Slider Type

9 q r !5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

Stability of suction position,

Pad diameter 32 to 50 Dimensions/With Set Screw: Vacuum Inlet Vertical Pad form Flat type with groove ZP3E-T32UMl-A10 ZP3E-T40UMl-A10 ZP3E-T50UMl-A10 6 M10 x 1 40 Seal washer Seal washer M10 x 1 31 31 6 Seal washer 6 M10 x 1 Width across flats 6 Width across flats 6 21.5 4.9 21 4.9 21 4.9 Width across flats 6 14.5 14.5 15 3 2 2.5 35 32 43 40 53 50 Weights [g] Weights [g] Weights [g] Pad material

Table of Contents

6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

6 !7 No. q w e r t y u i o !

Air Slide Table

MXQ 6-mm2 With end lock (6) 5 J Q 5.5 3 11.5 7 7.5 0.5 Pilot port 2 x M5 x 0.8 5 8.5 24.2 Dimensions [mm] Symmetric type MXQ6-10Z2 Model J Q MXQ6-10Zm2 60 25 MXQ6-20Zm2 MXQ6-30Zm2 81 33 MXQ6-40Zm2 93 MXQ6-50Zm2 103 * Dimensions other than those listed above are the same as those for the standard type. MXQ 6-mm2 With end lock, extension stroke end adjuster (6) Type Adjuster part no.

Hydraulic

Q: Required fluid volume for extension (l/min) Q: Required fluid volume for retraction (l/min) D: Bore size (cm) d: Piston rod diameter (cm) : Piston speed (mm/s) Q = D __ 4 6 _ 1000 Formula (1) Q = (D d) __ 4 6 _ 1000 ..

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Q Diode LED Coil Timer circuit How to Order Q SYJ 3 T Z 1 2 Black (--) Q 1: Starting current 2: Holding currect Q Applied voltage Q Rated voltage 24V 5 6 24VDC 12VDC 0V Q Standard Specify the same as standard 0.55W Q Power saving type 0.22W 0W Q 62ms Q Q Q Q Q Q Q Q Q Q Q Q Q 20 Q Q Q Q Drawings Series

Rotary Actuator/Vane Type

6 q w !4 !2 w !4 o !0 !7 !1 q !5 !1 Double shaft type Single shaft type Single shaft type Component Parts Double shaft type DNo. Description Material Note No.

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Table of Contents

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

mA), Holding 1.26 VA (6 mA) 200 VAC Inrush 1.38 VA (6 mA), Holding 1.38 VA (6 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

mA), Holding 1.26 VA (6 mA) 200 VAC Inrush 1.38 VA (6 mA), Holding 1.38 VA (6 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

7-6-20.

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.