Sine Cylinder Series REC

B2 G F K A REB F AL NA 2 x NN Plugged (M5 x 0.8) Width across flats B1 H2 H1 I REC CY D C B 4 x LD LH CX MM N N 2 x 4 Width across flats KA 3.2 MQ S + Stroke Y X LZ LX Y X Z ZZ + Stroke LS + Stroke RHC (mm) RZQ A AL B B2 F G H H1 H2 I K KA D B1 C LD LH MM LS LX LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

rail 2 12 2-M2 x 0.4 depth 2.2 For rail mounting (mm) F Model AA Z S M J H MXP6-5 2 45 5 37 33.5 38 25 MXP6-10 9.5 60 10 47 48.5 53 35 8-8-15 15 Series MXP Dimensions: MXP10 2-M3 x 0.5, depth 3 Z 3 Metal stopper 2-M3 x 0.5, depth 5 V K 5 4 G Max. 5.5 Max. 3.5 N 20 M Stroke: S MXP10-10 A Piping port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

HRL

Users equipment 2 1 2 Circulating fluid outlet Oscillator CH1 2 2 Circulating fluid return port 3 5 4 5 Circulating fluid outlet Optical system CH2 5 5 Circulating fluid return port No. Description Size Recommended part no.

REC

15.5 34 13 26 8 13 4 60 75 10 41 20 2025 Up to 700 22 19.5 40 17 32 10 13 4 60 75 10 45 26 20, 25, 32 32 Up to 1000 22 19.5 40 17 32 12 13 4 60 75 11 45 26 Data 40 Up to 1000 24 21 52 22 41 14 16 5 66 36 82 12.5 50 32 NN P S Z ZZ H1 H2 I K MM N NA M20 x 1.5 Bore (mm) Stroke range 20 Up to 700 1/8 146 191 200 M8 x 1.25 5 8 33.5 5 20 30 25 M26 x 1.5 Up to 700 1/8 146 195 204 M10 x 1.25

IDX-OM-Z004

-) 0 4.2 IDF100150F-W 4 9 IDX-OM-Z004 5 5 5.1 3 ON OFF (R) OFFON 3 2 R T 5.2 1 5.2 5.2 5.2 10% 5.2 IDF100150F-W 5.1 5 1 IDX-OM-Z004 5 1 10% 3 () 1 2 IN OUT INOUT () 424 IDF100150F-W 5.1 5 2 IDX-OM-Z004 5 5.2 1-3 51 3.6 OFF () ON OFF ON IDF100150F-W 5.2 5 3 IDX-OM-Z004 5 5.3 R () OFF OFF OFF ON ON IDF100150F-W 5.3 R 5 4 IDX-OM-Z004 6 6.1 IDF100F-30-W IDF125F

42

(R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ (A) 4 (B) 2 (A) 4 (B) 2 VQ4250 VQ4251 SQ VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR VQ7 (A) 4 (B) 2 (A) 4 (B) 2 VQ4351 VQ4350 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4451 VQ4450 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4551 VQ4550 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1

V100

mA), Holding 0.5 VA (5 mA) 100 VAC Inrush 0.55 VA (5 mA), Holding 0.55 VA (5 mA) 110 VAC Inrush 1.0 VA (5 mA), Holding 1.0 VA (5 mA) 200 VAC Inrush 1.1 VA (5 mA), Holding 1.1 VA (5 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.

RHC

9, @0, @2, @3, @4, @5 NBR 32 RHC32-PS @4 O-ring NBR 40 RHC40-PS @5 O-ring Stainless steel for 20, 25 Carbon steel for 32, 40 10-6-10 10 High Power Cylinder Series RHC Construction: 50 to 100 u q !2 i e !0 o w !6 !5 !4 !3 y r t !

SMC Basic Pneumatics

The xponent K (kappa) for air is 1.4.

Series SV

Cable core wire colors 7 1 8 3 2 8 7 1 8 1 7 3 2 8 2 3 2 3 1 7 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 4 5 6 6 5 4 4 5 6 6 5 4 Connections Connections Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement

%silltr

The xponent K (kappa) for air is 1.4.

Direct Solenoid

(5), Bottom Ports (5) 05 = Mounted oo Individual Subplate 1'NPTFSidsPorts(5) 06 = Mounted on lndividual Subplate 3/4" NPTF Side Ports (5) DIRECTIO}IAL AIR VALVES DIMENSIONS/PARTS LIST NVS424, NVS *u, orro, 41.*,41M t!.

IDX-OM-M051

NIL IDF 100 F 30 4 W C 5 G Size K Size Air compressor size Note) 100kW 125kW 150kW 100 125 150 P R Note) The value is referential. Confirm the capability of the compressor used.

Magnetically Coupled Rodless Cylinder

5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 No. 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Tubing O.D.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25

T

9 Tubing Series T Variations K Tubing O.D. Tubing O.D.

Body class: 2, Valve Type: N.C., Fitting Type: LQ2, Compatible sizes: Tube: 1/4 in × 5/32", B port (out) different diameter size: Same size as A, Pilot port type: LQ1 integrated fitting, connection tube size 1/8 in × 0.086 in (3 × 2), Pilot port direction: 1, Option (1): None, Option (2): None, Orifice diameter(ø): 4

Body class: 2, Valve Type: N.C., Fitting Type: LQ2, Compatible sizes: Tube: 1/4 in × 5/32", B port (out) different diameter size: Same size as A/B port, Pilot port type: Screw-in, NPT 1/8, Pilot port direction: 1, Option (1): None, Option (2): None, Orifice diameter(ø): 4

Body Class: 2 (ø4 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 03 (1/8" or ø3), Output Tube Size: 07 (1/4)