SY

(g) n: Number of stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For 10 stations or more (5 stations or more in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA and EB ports on both sides.

Thermo-chiller

Thermo-chiller Standard Type Dimensions inch [mm] HRS100/150-W-20 (Water-cooled 200 V type) HRS100/150-W-40 (Water-cooled 400 V type) Anchor bolt xing position B HRS100/150-A-20 (Air-cooled 200 V type) HRS100/150-A-40 (Air-cooled 400 V type) Anchor bolt xing position A (27.0 [687]) (Thermo-chiller dimension) (37.5 [954]) (Thermo-chiller dimension) 0.16 x 0.47 [4 x 12] 5.43 [138] 0.16 x 0.47

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

CN7 150 CN1 Motor capacity Hole position Mounting dimensions Mounting hole A B C D V5 (100 W) qw 5 5 5 5 V7 (200 W) qw 5 5 5 V8 (400 W) we 5 5 5 5 CN8 CN2 * The mounting hole position varies depending on the motor capacity. w 40 4 766 AC Servo Motor Driver LECY M U Series Specifications -@ Type Model LECYM2-V5 LECYM2-V7 LECYM2-V8 Compatible motor capacity [W] 100 200 400 Compatible encoder

15

Series Variations Series Size Page 25 32 40 63 Slider Type Ball Screw Drive LEFS Series 784 100 W 200 W 400 W Slider Type Belt Drive LEFB Series 805 100 W 200 W 400 W High Rigidity Slider Type Ball Screw Drive LEJS Series 824 100 W 200 W Rod Type LEY Series 848 100 W 200 W 400 W Guide Rod Type LEYG Series 864 100 W 200 W The values in shows the equivalent motor capacity. 780 LE Series Compatible

Integrated Controller

3000 mm/s2 6 Work load: W [kg] Work load: W [kg] 5 3000 mm/s2 5000 mm/s2 4 3 10 mm/s2 2 1 0 50 100 150 200 250 300 350 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQY16HC Horizontal/Lead 2.5 Vertical/Lead 2.5 45 40 35 30 25 20 15 10 5 0 50 25 75 100 125 150 175 200 11 10 9 8 7 6 5 4 3 2 1 0 Work load: W [kg] Work load: W [kg] 3000 mm/s2 3000 mm/s2 10 mm/s2 5000 mm/s2 0 0 Speed: V [mm/s] 50 100

MB

Bore size (mm) Contents 32 40 50 63 80 100 32 40 50 63 80 100 MBB32-PS MBB40-PS MBB50-PS MBB63-PS MBB80-PS MBB100-PS MBB32-PS-W MBB40-PS-W MBB50-PS-W MBB63-PS-W MBB80-PS-W MBB100-PS-W Set of the No. @9, #0, #1, #2 and #3. Set of the No. @9, #0, #1, #2 and #3.

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

TABLE OF CONTENTS

MODEL EW53 3-Way Normally Closed ATMOSPHERE EXHAUST EW53GG8DCCP EW53HH8DCCP EW53HJ8DCCP EW53JJ8DCCP EW53KK8DCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055 .075 .150 .020 .048 .075 .075 .150 DE-ENERGIZED ENERGIZED MODEL EW53 3-Way Normally Closed WITH PIPED EXHAUST ** EW53GG8XCCP EW53HH8XCCP EW53HJ8XCCP EW53JJ8XCCP EW53KK8XCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055

Table of Contents

9@0 w!0!1 e !

HRX-OM-Q026

HRSH Series 8.1 Specifications 8-3 HRX-OM-Q026 Chapter 8 Documents 8.1.4 HRSH100/150/200/250-W-40Table 8-4 Specifications of HRSH100/150/200/250-W-40Model HRSH100-W-40HRSH150-W-40HRSH200-W-40HRSH250-W-40Cooling method Water-cooled refrigeration Refrigerant R410A (HFC) Quantity of refrigerant kg 1.45 1.95 1.95 1.95 Control method PID control Ambient temperature1 oC 2 to 45 Circulating fluid2

Smooth Cylinder/Low Speed Cylinder

0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 REA Foot: L Rod flange: Head flange: 0.3 301 267 330 F G L, F 0.5 231 207 253 REB W W W 0.7 193 172 212 REC 0.3 144 126 156 CY CY G 0.5 109 94 118 0.7 90 78 97 CX Foot: L Rod flange: Head flange: 0.3 433 386 476 F G MQ L, F 0.5 334 297 367 W W W RHC 0.7 281 250 309 0.3 210 185 229 RZQ G 0.5 160 141 175 0.7 134 117 129 D-X 1231 Series CS2Y Construction

Cylinder with Lock

size E2 FB MF R TF UF W ZF 32 50 7 10 32 64 79 16 188 40 55 9 10 36 72 90 20 211 50 70 9 12 45 90 110 25 230 63 80 9 12 50 100 120 25 249.5 80 100 12 16 63 126 153 30 300 100 120 14 16 75 150 178 35 328.5 Center trunnion: C96NT-W XV + 1/2 + stroke Z + 1/2 + stroke UW TD TL TM TL L1 [mm] Bore size L TDe8 TL TM UW XV Z 32 17 12 12 50 49 131 153 40 22 16 16 63 58 150 174 50 22 16 16 75 71 166

10

Contents 32 MBB32-PS-W 40 MBB40-PS 50 MBB50-PS 63 MBB63-PS 80 MBB80-PS 100 MBB100-PS 40 MBB40-PS-W 50 MBB50-PS-W 63 MBB63-PS-W 80 MBB80-PS-W 100 MBB100-PS-W Set of the nos. @9, #0, #1, #2, #3 Set of the nos. @9, #0, #1, #2, #3 * Seal kits consist of items @9 to #3, and can be ordered by using the seal kit number corresponding to each bore size. * Trunnion type should not be disassembled.

1

) 53 (63) 150 (150) 63 (63) Note 1) ( ): Denotes the dimensions with auto switch.

Air Cylinder

, 50, 75, 100, 125, 150, 200 MB 40, 50, 63 25, 50, 75, 100, 125, 150, 200, 250, 300 Please consult with SMC for strokes which exceed the standard stroke length.

Table of Contents

150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 HA AT ID AMG AFF AM Misc. 14-15-3 1 Water Cooled Aftercooler Series HAW Model/Standard Specifications Series HAW can cool high temperature compressed air from compressors down to 40C or less and efficiently remove moisture from the air.

5

96 83 106 0.5 71 61 76 W W 0.7 59 50 62 0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 Foot: L Rod flange: F Head flange: G L, F 0.3 301 267 330 0.5 231 207 253 W W W 0.7 193 172 212 0.3 144 126 156 G 0.5 109 94 118 0.7 90 78 97 Foot: L Rod flange: F Head flange: G L, F 0.3 433 386 476 0.5 334 297 367 W W W 0.7 281 250 309 0.3 210 185 229 G 0.5 160 141 175 0.7 134 117 129 D-X 215 CS2Y Series

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

HRX-OM-S004

-A-20. 8-1 8.1.2 HRS100/150-A-40. 8-2 8.1.3 HRS100/150-A-46. 8-3 8.1.4 HRS100/150-W-20. 8-4 8.1.5 HRS100/150-W-40. 8-5 8.1.6 HRS100/150-W-46. 8-6 8.1.7 Refrigerant with GWP reference . 8-7 8.1.8 Communication specification . 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/46. 8-9 8.3 Flow diagram . 8-10 8.3.1 HRS100/150-A-20/40/46. 8-10 8.3.2 HRS100