IDU/IDF

40C 13 to 15 R22 37 6100 5200 IDF37C/37C1 R 11/2 55 9000 7650 IDF55C R 2 75 12400 10500 IDF75C 2 1/2B flange 23000 IDF120D 20 120 30 IDF150D 25000 150 40C R407C 3B flange 16 to 18 38000 IDF190D 32000 190 4B flange 50 IDF240D 43000 240 Medium Large 13 to 15 75 IDF75C 10500 12400 R22 R 2 40C Water cooled 20 2 1/2B flange IDF120D 23000 120 25000 IDF150D 30 150 3B flange R407C 40C 16 to 18 32000

XM, XY

Part numbers indicating changed seal material and leakage Changed part Note 2) Leakage (Pam3/s or less) Note 1) Symbol Nil N1 Symbol 1349-80 2101-80 Internal External FKM EPDM Barrel Perfluoro w, e, r, t w, r, t e 1.3 x 10-10 (FKM) 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

15

Contents 6 CYS06-37 -AJ024-R CYS06-37AAJ024-R 10 CYS10-37 -AJ025-R CYS10-37AAJ025-R 15 Set of the nos. 25, 26, 33 Set of the nos. 34, 41 Set of the nos. 37 BMY3-016 20 CYS20-37 -AJ027-R CYS20-37AAJ027-R 25 DCYS25-37 -AJ028-R 32 CYS32-37 -AJ029-R CYS32-37AAJ029-R 40 -X Note 3) A switch spacer, as specified in the table above will be required if an auto switch is mounted afterward.

Digital Flow Switches Series PF2A

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

CLA

lH 61 I Type Single Knuckle Joint Y Type Double Knuckle Joint r\'Id 1'-< t~ m L ~ ~1 -r0 ~ '-' P. _(mm) e ,.

Compact

C OU n + o Example Insedton ol reststor +24V G;,,* | "'/ + r OrfDrill R Input terminal(CP) ]l 7 l ( l n p u l i m p e d a n c e ) Lir Approx. 4.7 hA \ I 0v OV ?aSlft'ss lcturtol,s ftm $wilc[ Pmnrulions I Bo sffB m md [sfom lildlilU AWarning 1. Confirm specifications.

VZS

Applicable manifold base Plug-in type With attachment plug lead wire: Type 51G Description Component parts Manifold block u, Junction box i, Lead wire assembly o Tie-rod y, O-ring e, r, Seal A q VVZS2000-1A-1-Port size (1) Manifold block assembly Manifold block u, Tie-rod y, O ring e, r, Seal A q Non plug-in type: Type 51 VVZS2000-1A-2-Port size (1) Plug-in type With D-sub connector: Type

CP95

9 @0 @1 @2 @3 @4 Material Description Spring washer Set screw Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Magnet No. q w e r t y u i o !0 !1 !2 !

CP95

A B C D E F G H P U Load (kN) Weight (g) Angle Bore size (mm) JA30-10-125 32 70 2.5 0.5 9 8 5 8 24 19.5 49.5 M10 x 1.25 17 JA40-12-125 40 160 4.4 0.75 13 11 6 11 31 20 60 M12 x 1.25 22 5 27 JA50-16-150 50, 63 300 11 1.0 15 13.5 7.5 14 41 22 71.5 M16 x 1.5 JAH50-20-150 80, 100 1080 18 2.0 18 16 32 24 59.5 11.5 28 31 101 M20 x 1.5 CJ1 CJP CJ2 CM2 CG1 Courtesy of Steven Engineering, Inc.

Possible to transfer a workpiece at low-speed.

2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

76

temperature: 113F (45C) RoHS How to Order IDF 30 100 FS Nil C K P R V Nil 1 2 3 Size Size Air compressor size Note) 100 100 kW 125 125 kW 150 150 kW Note) Note that the above values are for reference only.

2/3 Port Valve

e, r are for selection of valve composition.

1.63

8.6 9.5 9.5 11 11 14 14 30.5 36.5 40.5 46.5 54.5 68.5 NPT1/8 NPT1/8 NPT1/8 NPT1/8 NPT1/4 NPT1/4 G1/8 G1/8 G1/8 G1/8 G1/4 G1/4 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 14 16 20 20 26 30 MGPWL, MGPWA 20, 25/A, E Dimensions (mm) MGPWL, MGPWA 32 to 63/A, E Dimensions (mm) Bore size (mm) A E Bore size (mm) A E 25 st or less Over 25 st 100 st or less Over 100 st 25 st or less 50 st

LX Series Compact Electric Actuators

Without brake 5.8 t-_1 r l o l : r = tl-Model D F J K L N L X S H _ B _ 5 0 4 6 270 1 7 7 177 6 52 55 L X S H _ B _ . 7 5 4 6 295 202 202 6 47 65 LXSH B -1OO 8 320 227 227 6 47 75 LXSH B -125 4 8 70 345 252 252 6 4 7 85 T-slot A dimensions T-slot B dimensions LXSH _ B .150 6 I 370 277 277 8 47 65 $efie$ [)( tleclnh Arlualors 0inol|$im$ Slido $ffi||l Iy0[ LxsHnsE E;IEI9' With brake Brake

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

N.O. 1 (P) 3 (R) 1 (P) 3 (R) q e t r q e t r SY SYJ VK A A VZ u u VT VT P R P R VP w w VG y y VP Component Parts Replacement Parts VQ Description Body Piston plate End cover Piston Spool valve ass'y Description Sub-plate Pilot valve Note White White White Note Zinc die cast Parts No.

10

R R: Gripping point distance [mm] 6 MHL2 Series Construction 10 16 to 25 e r t u w y @4 @0 @1 @2 !7 !5 !8 @3 !3 e o i q @6 @7 @3 @5 !9 !0 !2 !1 !6 !4 Component Parts No. Description Material Note 1 Body Aluminum alloy Hard anodized No.

10

0 r !1 u w e t y i o !2 No.

Rotary Table/

Standard type For 90 For 180 Positioning pin hole Positioning pin hole Counter-clockwise 3 3 A port A port A port 3 22.5 3 22.5 84 e 96 ng e 3 ra ng on ra ti B port n ta 3 90 tio 4 ro 7 ta m 1 Clockwise ro e e u s i g m w 3 m 6 k C n c l o ni a u 8 r Mi im 3 n 1 o ti e ax ta ng ro m M u ra m ni Mi 180 n tio e C s ta l i o w c k ro m mu xi Ma Positioning pin hole Positioning pin hole Position