53

Select the thermo-chiller considering the descriptions. q Upper limit of ambient temperature: Use the product in ambient temperature of the described value or lower at each altitude. w Cooling capacity coefficient: The product's cooling capacity will lower to one that multiplied by the described value at each altitude. HRS HRS 090 HRS 100/150 HRSH 090 HRSH 090 HRSH 2.

17

Maximum Allowable Moment MY1B/M1 MY1B/M2 MY1B/M3 200 300 400 500 40 50 100 30 200 20 50 40 30 100 10 20 40 50 3 4 5 30 10 20 Moment Nm Moment Nm Moment Nm 2 5 4 3 10 1 MY1B40 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B40 MY1B40 0.3 0.4 0.5 MY1B32 1 2 MY1B32 MY1B32 MY1B25 0.2 1 0.5 0.4 0.3 MY1B25 MY1B25 0.1 0.4 0.5 0.2 0.3 0.05 0.04 0.03 0.2 0.1 0.02 0.06 0.1 100 200 300 400 500 1000 1500 100 200 300

HRL

W: 13 [kW] w Derive the heat generation amount from the power supply output.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

9 @2 @0 @1 e w !5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

Table of Contents

, 110, 200, 220 VAC (50/60 Hz) Allowable voltage fluctuation 10% of rated voltage Metal seal Coil insulation type Class B or equivalent 1 W DC (42 mA), 1.5 W DC (63 mA) (3), 0.5 W DC (21 mA) (4) 24 VDC 1 W DC (83 mA), 1.5 W DC (125 mA) (3), 0.5 W DC (42 mA) (4) 12 VDC 100 VAC Inrush 0.75 VA (7.5 mA), Holding 0.75 VA (7.5 mA) Power consumption (Current) Rubber seal 110 VAC Inrush 0.83 VA (

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

16 16 0.2 0.05 0.1 0.2 0.1 0.05 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Title not found

to 50mm/s) i2 to 100 Heal resislant aulo swilch 16 to 63 Hea\./ duty sctaper 20 to 100 Stalnless steelpiston rod and rod nut 12 10 100 AdjuslaLle stroke exlend 12 to 100 Adjustable slroke retract 1 2 l o 1 0 0 DualsLroke, dual rod 1 2 b 1 m DLralstroke s ngle rod 12 to 100 NPI Porr (1) 32 10 160 32 lo 100 Wilh lrcnr gulde boss (1) 12 to lO0 20 to 10O lnch-sizewrcnch flab 12 to 100 (1) Not

•

K I KA l w LH LS 43 15 M14 x 1.5 15 17 15 27 I 19 85 188 15 I' 27 I Hi 100 188 17 I 34 I 19 106 206 43 15 M14 x 1.S ., 15' 1?

CQS

Thus, it can be used in a Class 100 clean room.

VQ7-6/7-8

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

SMC Electronic Switch Series Variations

F.S. = 100[kPa] 0[kPa] = 100[kPa] 3[%F.S.] = 100[kPa] X 0.03 = 3[kPa] Example: Time Failure predict output 1 ON OFF Time The display error induced by the temperature change can be as much as 3[kPa].

Fluoropolymer Piping Equipment

B L1 W M2 B side Inch Size 6 4 Model A side B side B C1 C2 E1 E2 H1 H2 L1 L2 M1 M2 Min. port size W Applicable tubing O.D.

Cylinder with Lock Series MNB

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

CJ2

Component Parts No. q w e r t y u i No. o !0 !1 !2 !3 !4 !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, 110, 200, 220 VAC (50/60 Hz) 3-position closed center 10% of rated voltage Allowable voltage fluctuation Coil insulation type Equivalent to Class B 0.4 W DC (17 mA), 0.95 W DC (40 mA) Note 3) 24 VDC 3-position exhaust center 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) 12 VDC Inrush 0.96 VA (10 mA), Holding 0.96 VA (10 mA) 100 VAC Power consumption (Current) Inrush 1.0 VA (9 mA), Holding

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, 110, 200, 220 VAC (50/60 Hz) 3-position closed center 10% of rated voltage Allowable voltage fluctuation Coil insulation type Equivalent to Class B 0.4 W DC (17 mA), 0.95 W DC (40 mA) Note 3) 24 VDC 3-position exhaust center 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) 12 VDC Inrush 0.96 VA (10 mA), Holding 0.96 VA (10 mA) 100 VAC Power consumption (Current) Inrush 1.0 VA (9 mA), Holding

Lightweight and Compact

No anchor bolt is included. 76 A Thermo-chiller Water-cooled 200 V/400 V Type Standard Type (Only 400 VAC type) RoHS HRS090 Series HRS How to Order HRS 090 HRS 090 W 090 HRS 20 HRS 100/150 Cooling capacity Option HRSH 090 090 9 kW Nil None B Note) With earth leakage breaker J With automatic fluid fill function M Applicable to deionized water piping Cooling method W Water-cooled refrigeration

JIS Standard Hydraulic Cylinder

Rod size series B C B series rod size C series rod size Type: Double acting/Double Rod CH2 F W B LA 50 100 CHD2 F B LA 50 100 M9BW W With Auto Switch With auto switch (built-in magnet) Bore size Made to Order specifications For details, refer to page 385. 32 40 50 63 80 100 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Series type Mounting type Symbol E F Tube material Nominal pressure 3.5 MPa 7 MPa

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

Guide Cylinder Series MGG

1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.