MK

RS Q G Theoretical Output Rotary Angle (N) RS H A Operating pressure (MPa) Piston area (cm2) Bore size (mm) Rod size (mm) Operating direction 1.0 0.7 0.5 0.3 RZQ Release (Extended stroke end) 80 to 100 (90 10) Counterclockwise (L) Release (Extended stroke end) 80 to 100 (90 10) Clockwise (R) 80 56 40 24 0.8 R 12 6 110 77 55 33 1.1 H MI W S 150 105 75 45 1.5 R 16 8 200 140 100 60 2 H CEP1

ISO Standard Hydraulic Cylinder

1 w !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Magnetically Coupled Rodless Cylinder

500 300 200 Allowable driving force Fn (N) 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance from cylinder shaft center Lo (cm) 4 Series CY3B/CY3R Model Selection Method Precautions on Design w Max.

0.4

Flow rate Power consumption Operating frequency 100 Hz 500 Hz 1000 Hz 80 W 1200 Hz Low flow type 50 L/min 40 W 1000 Hz 10 W 550 Hz 4 W 350 Hz 80 W 650 Hz Medium flow type 100 L/min 40 W 550 Hz 10 W 300 Hz 4 W 200 Hz 80 W 600 Hz High flow type 150 L/min 40 W 500 Hz 10 W 250 Hz 4 W 150 Hz VCH VDW SX10 SX10 Select a model according to applications and purposes.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

500 300 200 Allowable driving force Fn (N) 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance from cylinder shaft center Lo (cm) 4 Series CY3B/CY3R Model Selection Method Precautions on Design w Max.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

] 100 L/min type 100 L/min type Error display function When an error or abnormality arises, the location and contents are displayed.

Compact Cylinder with Lock Series CLQ

Through holes Double end taps Extension locking Easy manual unlocking B Locked A 40 to 100 20 to 32 W Retraction locking Unlocked 40 to 100 20 to 32 W A B Wide variations from 20 to 100 Standard stroke (mm) Locking direction Bore size (mm) Mounting Series 5 10 15 20 25 30 35 40 45 50 75 100 20 Through holes, double end taps common 25 Extension locking 32 40 CLQ Through holes 50 Retraction

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

CXS

Stroke (mm) up to 10 up to 30 up to 75 up to 100 up to 50 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 Max. speed (mm/s) 7 8 9 6 10 15 Selection graph 10 11 12 13 14 15 17 16 20 25 32 The maximum speeds for 10 to 32

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Mitsubishi Electric Corporation Yaskawa Electric Corporation None F R L T B Nil W Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

ITV

Return 0.4 0.3 0.5 0.5 AV 0.2 0.1 0 2 6 4 8 1.0 0 25 50 75 1.0 AU 0.0 10 0 25 50 75 100 100 Input signal (%F.S.) Repetition Input signal (%F.S.)

MG

0 w !3 -X !1 !9 @3 !0 !2 @2 r o e y !5 2032 to 63 Over 50 to 100 stroke 80, 100 Over 50 stroke to 200 stroke Data Over 50 stroke @0 t 50 stroke or less 32 to 63 Over 100 stroke 80, 100 Over 200 stroke 50 stroke or less 50 or more Component Parts Description Material Note No. q w Description Material Note No. !2 !3 !

VQ4000

, 110, 200, 220 VAC (50/60 Hz) (A) 4 (B) 2 (A) 4 (B) 2 Allowable voltage fluctuation 10% of rated voltage Coil insulation type Class B or equivalent 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 24 VDC 1 W DC (42 mA), 0.5 W DC (21 mA) 3 position exhaust center 12 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) 2 position double (Metal) (A) 4 (B) 2 (A) 4 (B) 2 100 VAC Inrush 1.2 VA (12 mA), Holding 1.2 VA

ML2B

If there is vibration, impact, etc. at long stroke, we recommend adoption of side support even if it is within the allowable value shown in the graph. 400 W l Load W ML2B32 W (1200) (1200) 300 ML2B25 l l 200 100 0 1000 2000 (mm) Support spacing l 10-13-16 14 Stroke Reading Rodless Cylinder with Brake Series ML2B Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range

ML2B

If there is vibration, impact, etc. at long stroke, we recommend adoption of side support even if it is within the allowable value shown in the graph. 400 W l Load W ML2B32 W (1200) (1200) 300 ML2B25 l l 200 100 0 1000 2000 (mm) Support spacing l 10-13-16 14 Stroke Reading Rodless Cylinder with Brake Series ML2B Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Function Coil voltage Symbol Specifications DC (1.0 W) AC 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other (3) Nil Standard type High pressure type (Metal seal only) (1.0 W) (1) K (0.5 W) Low wattage type Y External pilot type (2) R Note) Note 1) Option Note 2) For details about external pilot specifications, refer to page

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

40 Work load: W [kg] Work load: W [kg] 20 Lead 16: LEKFS32EA 30 Lead 16: LEKFS32EA 20 Lead 24: LEKFS32EH 10 Lead 24: LEKFS32EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40EB Lead 10: LEKFS40EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEKFS40EA 30 Lead 30: LEKFS40EH

Best Pneumatics Vol. 14

1 Drain q r e w t i u y o !0 !