5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

11 11 23 11 23 SOL.A SOL.B SOL.B Light/Surge voltage suppressor Station 10 Station 10 SOL.A SOL.A 10 10 Light/Surge voltage suppressor Light/Surge voltage suppressor 15 15 15 SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 2 2 SOL.A SOL.A SOL.A Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor 2 SOL.B SOL.B SOL.B 14 Station 1 Station 1 14 14 Station

CJ5-S

x 1.5 55 1/4 109 176 63 Up to 600 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 176 80 RS Q G Up to 750 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 130 210 100 Up to 750 110 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 10 26 8 M26 x 1.5 100 1/2 131 212 Flange bracket and plug bolt are installed when shipped from factory

CJ5-S

40 Up to 500 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 149 50 MK(2) Up to 600 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 176 63 Up to 600 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 176 80 RS Q G Up to 750 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8

Magnetically Coupled Rodless Cylinder

5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25

EXxx-OMN0037CN

F 8000 -32767 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -23No.EX-OMN0037CN-A -24No.EX-OMN0037CN-A EX600-AY A M12 (5 )2 2 M12 (4 ) No. 1 LED 2 () 3 4 5 () -25No.EX-OMN0037CN-A 1 24 V() 2 3 0 V() 4 0 V() 5 FE M12 (4 ) 1 24 V 2 D/A DC24 V 34 0 V 5 FE FE 1 k 600 IP67

IDX-OM-W014

-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 2 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W014 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W014 i i-2 5 i

S070

Material Number Gasket 10 SS070M-80A-1 FKM Clip 10 SS070M-80A-2 Stainless steel 4-11-16 17 Series S070 Specific Product Precautions 1 Be sure to read before handling. Valve Mounting/Removal Screwing in M5/M3 Thread Caution Caution 1.

Table of Contents

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

However, in case of size 1, the tubing cannot be changed by reducing. 17-5-97 2 Series LQ1 How to Order Tubing connection E 11 LQ1 Class Combination of different diameter (on B side) No. 1 1 2 2 3 3 3 4 4 5 5 6 6 Class 1/8" x 0.086" 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" No. 1 2 2 2 3 3 4 4 5

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25

HRX-OM-Q026

Blue (DC COM) 11 Terminal No. Black (Output 1) 3 Terminal No. Black (Output 1) Fig. 3-12 Wiring of the external switch (NPN open collector output) (example) Flow switch Blue (DC COM) Brown (24 VDC) Brown (24 VDC) Terminal No. 14 Terminal No. Flow switch 6 Blue (DC COM) Terminal No. 13 Terminal No. 3 Black (Output 1) Black (Output 1) 11 Terminal No.

VHK

L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 L2 Q 18 61.6 58.2 2.0 2.0 29 29.1 44.5 14.5 1 27 22 16.5 26 41 29.1 16.5 3.5 11 1.2 26 23 11 30 54 51 11 M5 M5 M5 VHK-B1A VHKm-01S-M5 VHKm-M5-M5 1 8 18 41 32.6 16.5 3.5 11 44.5 14.5 1 27 22 16.5 26 8.6 1.2 13 57 13 VHK-B1A VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5

VHK

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

Modular F.R.L. Unit

AC20, AC20A AC25, AC25A AC30, AC30A AC40, AC40A Note) 40 40 28 11 11 1/8, 1/4 AKM2000 1/8, 1/4 53 48 34 14 13 AKM3000 AKM4000 70 54 42 18 15 1/4, 3/8 How to Order Note) Not applicable to AC40-06.

VQ5000

How to Calculate the Flow Rate SOL.A VQZ100-47-A For obtaining the flow rate, refer to pages 2-1-8 to 2-1-11.

SZ3000

11 SOL.B Station 11 22 22 22 SOL.A SOL.A SOL.A 21 21 21 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 4 4 4 SOL.A SOL.A SOL.A 3 3 3 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 1 Station 1 Station 1 2 2 2 SOL.A SOL.A Triangle

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

C76

1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !

C76

1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !