AC

2.3 2.3 2.3 2.3 2.3 3.2 3.2 20.5 33.5 33.5 42.5 52.5 52.5 52.5 19 25 25 32.5 36 38 44 AR1000 AR2060 AR2560 AR3060 AR4060 AR4060-06 AR5060 AR6060 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4,1 1 SAC1000, #2 SAC2000, #2 SAC2503, #2 SAC2503, #2 SAC4000, #2 SAC4006, #2 SAC5000, #2 SAC6000, #2 AR1000 AR2060 AR2560 AR3060 AR4060 AR4060-06 AR5060 AR6060 1.5-35 Lubricator/Modular style AL1000

VQ5000

U side (FU) 83.5 55.5 M5 ground screw U side 19 34.5 n 12 X 2n-Rc3/8, 1/2 (ports A, B) B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

U side (FU) 83.5 55.5 M5 ground screw U side 19 34.5 n 12 X 2n-Rc3/8, 1/2 (ports A, B) A 4 B 2 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22

LJ1H

(B contact) 2 pcs.

HRX-OM-R016

-2 Key operation (2/2) show the operation of keys of the thermochiller.

VZS

+ 19 17n + 28 L1 L2 With attachment plug lead wire: VV5ZS2-51GStation 1Port size 4-4.5 mounting hole Manual override Indicator light U side (n) (2) (1) Stations D side 2-C4, C6 1 A B 9.5 27.3 (Port size: One-touch fitting type) Electrical entry n: Stations L Stations Formula 17n + 19 17n + 28 2 53 62 3 70 79 4 87 96 5 104 113 6 121 130 7 138 147 8 155 164 9 172 181 10 189 198 11 206 215

ZR

Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B Note) 1 Dimensions for mounting bracket B 2 2 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

How To Order: Valve Port size : Without sub-plate Body ported SYJ3 2 5 LZ 1 M3 3 Base mounted (4 Port) SYJ3 3 5 LZ 3 2 Base mounted (5 Port) (With gasket and screws) 2 SYJ3 4 LZ 3 5 M5 : With sub-plate Manual override Type of actuation : Non-locking push type 1 2 3 4 5 2 Position single solenoid 2 Position double solenoid 3 Position closed center 3 Position exhaust center 3 Position pressure

15

x 0.7 M4 x 0.7 11 14 6.5 3.3 8 5 26 3 19 2 5 40 30 27 3.5 6 CY1S10-Z 7.5 12 31.5 6.5 25 27 17 13.5 17 M4 x 0.7 M4 x 0.7 10.5 16.5 8 4.4 10 5 33 6 28 2.5 6 40 34 45 4.6 6 CY1S15-Z 7.5 9.5 16.6 38 6.5 28 29.5 20.5 15 20.5 M4 x 0.7 M5 x 0.8 10.5 16.5 5.4 12 2 5 6 52 39 11 60 5.8 28 40 8 CY1S20-Z M6 x 1 M6 x 1 10 9.5 21.6 44 8.5 36 37.5 24 19 20 10.5 22 5.4 16 2 5.5 8 45 16 70 28 62 5.8 46 10

CNG

2$1@2@4!7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

single (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 3 position closed center 3 position closed center/exhaust center/pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position exhaust center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position pressure

Compact manifold regulator ARM5 Series

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at knob locked) 55 (at knob locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side IN

Vacuum Pad

3 2 2 3 Vertical Vacuum Inlet, With Adapter ZP3P Series Dimensions: With Male Thread Adapter ZP3P-T35PTSF-A12 [Weight: 20.7 g] ZP3P-T35PTSF-AG2 [Weight: 14.5 g] 24 M12 x 1.75 G1/4 24 19 25.2 32.5 7.3 Width across flats 21 19 24.5 30.5 6 Width across flats 21 35 4 35 4 3 3 ZP3P-T35PTSF-AG3 [Weight: 21.1 g] ZP3P-T50PTSF-A12 [Weight: 28.4 g] 24 M12 x 1.75 G3/8 24 Width across flats 21 22 28.2

NCA1

5.4 3 13/16 2.032 1 3/8 1 5/8 -18 5 7/8 3 1 7/8 1 3/8 1 3/4 NCA1-CB1200 7 4 15/16 2.531 1 3/4 1 1/4 7/8 -14 6 1/2 7/8 3 1/8 2 1 3/4 1 7/8 NCA1-CB1400 8.1 5 3/4 2.531 2 1 1/4 1-14 7 1/2 1 3 1/2 2 1/8 2 2 1/8 NCA1-CB1401 9.3 6 19/32 3.032 2 1/2 1 1/2 1 1/8-12 8 1/2 1 4 2 5/8 2 1/2 2 1/2 NCA1-CB1402 10.6 7 1/2 3.032 3 1 1/2 1 1/4-12 9 1/2 1 4 1/4 2 7/8 2 3/4 2 3/4 Note) Pivot Pin not included

LX

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

HRX-OM-M090

Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermochiller.

2/3 Port Valve

22 2, 23 2 1 2 3 2 3 4 2 3 4 2 3 4 2 3 4 1 2 3 Option (Bracket) Grommet: G Conduit: C Min. pitch for bracket is H mm.

SMC

ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155

Intrinsically Safe Valve

4/25/3 (A/BEA/EB) Port size Flow-rate characteristics C [dm3/(sbar)] Cv b b C [dm3/(sbar)] Cv 53-SY940--03 Single 3/8 7.9 2.6 0.34 0.43 2.0 9.6 Double 2-position 53-SY940--04 Single Double 2-position 1/2 8.0 2.5 0.48 0.29 2.2 10 22 Series 53-SY5000/7000/9000 Dimensions: 53-SY5000 2-position single L-type plug connector (L) 53-SY5140(R)-L-02 18 19 9.5 60.3 8.3 48 37.2 2 x 4.3 (For mounting

Rotary Table/

4 @2 !3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !