CHANGE, ACTUATOR, CKZN SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .37830 lb
CHANGE, ACTUATOR, CKZN SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .37830 lb
CHANGE, ACTUATOR, CKZN SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .37830 lb
CHANGE, ACTUATOR, CKZN SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .37830 lb
CHANGE, ACTUATOR, CKZN SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .37830 lb
Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold Flat ribbon cable connector Socket: 10 pin MIL type with strain relief Conforming to MIL-C-83503 Applicable connector Internal wiring +COM, COM Location Valve 4(A), 2(B) port Porting specifications Direction Lateral, Upward, Downward Metric 1(P), 3/5(R) port: 8 4(A), 2(B) port: M5, 4, 6 Port size Inch 1(P), 3/5(R) port: 5/16" 4(A), 2(B) port: 5/32", 1/4" Weight W (g) Note 2) n1: Stations n2
With 1 switch 10 90 100 110 0 A4 DIfferent 35 75 80 90 Wilh2 suriace switches Same 100 D-A3 suriace 100 100 100 D-G3 Different 3S+301n2) 7S .. 3Q(n-2) 80+30(1\02) 90...30(n2) D-K3 Withn suriaca rr-2.3.4,5 .. 1'1=2.4.6.8 . n=2,4.6,B ... n=2,4,6 ,8 ... switches Same 1 00. l00(. ll 100+100(1'1 2), n=2,4,5 ,8 .. suriace ro= l ,2,,3. 4..
room Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean blow (With clean gas filter) Line D: For N2
room Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean blow (With clean gas filter) Line D: For N2
room Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean blow (With clean gas filter) Line D: For N2
room Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean blow (With clean gas filter) Line D: For N2
room Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean blow (With clean gas filter) Line D: For N2
VFS ~ = ~ = VS4 VQ7 L Dimension EVS n: Stations n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 VFN L2 Body ported (Top ported) Type 21 Manifold Grommet: G DIN terminal: D VV5K3-21Station (P port) (P port) n1 = Number of VK3000 n2
Nil B Push type Locking type (Tool required) CE compliant Internal/External pilot Nil Q CE compliant Nil R Internal pilot External pilot 27 Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Dimensions (F kit) VV801--FD-W1-M 2 x 1/2" 3(R) port L1 = 19 x n1 + 27 x n2 + 85 L2 = L1 + 17 2 x 1/8" Pilot port n1: Piece of Size 18 mm n2: Piece of Size
Fluid Standard specifications Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x 102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 10-1 Pa) (V, M) Non-leak (106 Pam3/s or less) (V, M) JIS Symbol A C.O.
P2 P' n2 nl Hysteresis mode ~erE!SlS rrode lS1anda
~ Fluid Fluid that will not corrode SUS304 and SUS630 PI P2 Wti:ldow cOfTl)aratoc rnode (standard) nl n2 Wifldow corTlJ3rator mode (reversed) Temp. characteristics 3%F.S.max.
I ::,b[1 OFF~ _ mode ("
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5
There are four vacuum generator models to choose from - two simple vacuum generators, AP 7 and AP70, and two modules, AP71 and AP72, which include vacuum generator, N2 inlet shut off valve and N2 inlet check valve. The modules provide a compact and cost effective solution for vacuum generator installations. The individual vacuum generators provide a variety of configurations.