Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification: C (OUT1: NPN; OUT2: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 04 (1/2), Output Specification: C (OUT1: NPN; OUT2: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F), Bracket: R (Bracket)

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

MXH

CX 0.005 0 D0 0.20 0.39 0.59 Roll moment Mr (Nm) -X MXH10 200.09 0.08 0.07 Data 0.06 0.05 0.04 0.03 0.02 0.01 0 0 0.20 0.98 1.18 1.37 0.78 0.59 0.39 Roll moment Mr (Nm) MXH16 0.06 0.05 Displacement (mm) Displacement (mm) 0.04 0.03 0.02 0.01 0 0 0.78 1.18 1.57 1.96 2.35 2.75 Roll moment Mr (Nm) MXH20 0.1 0.09 0.08 0.07 0.06 0.05 0.04 0.03 0.02 0.01 0 0 0.78 1.57 2.35 3.14 3.92 4.71 5.49 Roll

15

Dimensions: Motor Top/Parallel LEY25, 32, 63 ZZ Y2 Motor flange Motor LEF Rod operating range Note 1) (Stroke + G mm) H thread depth C LEJ T U M LEL EV J LEM D 4 x O1 thread depth R K Note 2) LEY Y1 B + Stroke L S M 4 x O1 M EH thread depth R LES XA H9 depth XA 6 x MO thread depth MR LEPY LEPS Section XX details MH LER LEH MD MC ML + Stroke Section XX XB XA H9 XA LEY -X5 L MA 11LEFS IP65

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mr Mp MHS Fv L MHC MHT MHY L: Distance to the point at which the load is applied (mm) Maximum allowable moment MHW Allowable vertical load Fv (N) Model Pitch moment: Mp (Nm) Yaw moment: My (Nm) Roll moment: Mr (Nm) MRHQ MHZ2-6 0.08 0.04 0.04 10 Misc.

MXH Series Compact Slide

Allowable moment N m (ft lb) Pitch moment Yaw moment Roll moment Model Mp My Mr MXH6 MXH10 MXH16 MXH20 0.47 (0.35) 0.39 (0.29) 0.59 (0.44) MXH6 0.96 (0.71) 0.82 (0.60) 1.37 (1.01) 1.88 (1.34) 1.59 (1.17) 2.75 (2.03) 0.04 3.14 (2.03) 2.75 (4.05) 5.49 (4.05) 0.035 0.03 Displacement (mm) Displacement (mm) 0.025 0.02 0.015 0.01 0.005 0 0 0.20 0.39 0.59 Roll moment Mr(Nm) 1 N m = 0.7375 ft

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Free mount type Shaft type Double vane Double shaft with single flat (size 10 to 30) Long shaft key, Short shaft with single flat (size 40) W Electrical entry/Lead wire length Grommet/Lead wire: 0.5 m Grommet/Lead wire: 3 m Connector/ Lead wire: 0.5 m Connector/ Lead wire: 3 m Connector/Without lead wire Nil L C CL CN Pattern Vane type Standard Simple Specials/Made to Order S D Single vane

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

MRQ 1 3 7 20 MSUA1 MSUA3 MSUA7 MSUA20 Electrical entry/Lead wire length DNil L C CL CN Grommet/Lead wire: 0.5 m Grommet/Lead wire: 3 m Connector/Lead wire: 0.5 m Connector/Lead wire: 3 m Connector/Without lead wire 20Rotating angle Symbol Applicable Rotating angle Available only with R73, R80 and T79 type connectors. Lead wire with connector part nos.

CRBB-OM00004

How to Order With vertical auto switch unit Shaft Type Lead wire length Size Nil Grommet / Lead wire: 0.5 m Double shaft with single flat (Sizes: 10 to 30) Long shaft end key, Short shaft with single flat (Size: 40) 10 15 20 30 40 M Grommet / Lead wire: 1 m W L Grommet / Lead wire: 3 m CN Connector / Without lead wire C Connector / Lead wire: 0.5 m Rotation angele Number of auto switches

IDX-OM-W094

71 46 12.5 330 704 355 126 IDFA70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDFA80 R2 438 957 863 169 480 958 219 78 100 11.0 463 916 485 170 IDFA90 13 IDFA80 IDFA90 mm IDFA60 745 957 () () 704 916 () () 355 330 485 463 IDFA70 890 () 849 () 390 365 IDFA60/70/80/90 Series 7-3 IDX-OM-W094 7.4 CM IDFA60/70 OLR AC 230V(50Hz) FM MC PRS PRS2 ILS THR C01 C11 TB IDFA80/90 CN

Compact Vacuum Ejector Series ZQ

Connector type Lead wire length: 3 m CL Nil Y Standard (1 W for DC) Note) DC low wattage type (0.5 W) Connector type Without connector CN Note) In case of the manifold type or when single unit valves are aligned closely with each other, avoid energization lasting more than 3 days.

Large Type Vacuum Unit Series ZR

output 27 (L) Lead wire length 0.6 (3.0) m NPN output D3 26 (L) Lead wire length 0.6 (3.0) m Analog output 67 (L) Maximum vacuum pressure Lead wire length 0.6 (3.0) m PNP output S 84kPa Vacuum switch specifications (E) L 53kPa Nil Lead wire length 0.6m Grommet type L Lead wire length 3.0m Ejector exhaust type C Lead wire length 0.6m CL Connector type Lead wire length 3.0m 1 Built-in silencer CN

IDX-OM-U010

365 IDFC60/70/80/90 Series 7.3 Dimensions 7-3 IDX-OM-U010 Chapter 7 Documents 7.4 Electric circuit IDFC60/70 230VAC 1PH 50Hz SYMBOL DESCRIPTION CM Refrigerating compressor OLR Overload relay FM Fan motor MC Magnetic contactor PRS High pressure switch ILS Switch with lamp THR Thermal relay C01 Capacitor for refrigerating compressor C11 Capacitor for fan motor IDFC80/90 TB Terminal block CN

IDX-OM-W095

355 126 94 46 12.5 IDFC70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDFC80 R2 438 957 863 169 480 958 219 78 100 11.0 463 916 485 170 IDFC90 13 mm IDFC80 IDFC90 IDFC60 745 957 () () 704 916 () 355 () 330 485 463 IDFC70 890 () 849 () 390 365 IDFC60/70/80/90 Series 7-3 IDX-OM-W095 7.4 IDFC60/70 CM AC230V(50Hz) AC 230V50Hz OLR FM MC PRS ILS THR C01 C11 TB IDFC80/90 CN

IDX-OM-V020

/70/80/90 Series 7.3 Dimensions 7-3 IDX-OM-V020 Chapter 7 Documents 7.4 Electric circuit IDFA60/70 230VAC 1PH 50Hz SYMBOL DESCRIPTION CM Refrigerating compressor OLR Overload relay FM Fan motor MC Magnetic contactor PRS High pressure switch PRS2 Pressure switch ILS Switch with lamp THR Thermal relay C01 Capacitor for refrigerating compressor C11 Capacitor for fan motor TB Terminal block CN

V

R E S W I T C H A 0.7 Including Vacuum Release Valve with Vacuum Switch B 1.0 Including Vacuum Release Valve with Vacuum Switch C 0.7 Including Vacuum Release Valve without Vacuum Switch D 1.0 Including Vacuum Release Valve without Vacuum Switch ZSE1 00 E L E C T R I C A L E N T R Y Blank With 0.6m Grommet Lead L With 3m Grommet Lead C With 0.6m Connector Lead CL With 3m Connector Lead CN

ZQ

Connector type Lead wire length: 3 m CL Nil Y Standard type (1 W for DC) Note) DC low wattage type (0.5 W) Connector type Without connector CN Note) In the case of the manifold type or when single unit valves are aligned closely with each other, avoid energization lasting more than 3 days.

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