Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Electroless nickel plated q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Output 1 Output 2 A B C Dimensions L5 D2 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tubing O.D. d L1 D3 Metric sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9 26.4 VR1211F-23 14.8 4 12.8 10.4 56 26.6 38.5 21.9 15.7 15.8 30.4 VR1211F-04 6.8 6 12.8 12.8 53.2 28.8 41.9 25.2 16.8 16.8 25.0 VR1211F-06 Inch sizes Weight g Model d D1 D2 L3 L2 D3 L1

ZMA

Description q w e r t y Note Body Valve cover Adapter plate Cover Tension bolt Flow adjustment screw AMJ Misc. ZMA-HCB Electroless nickel plated Replacement Parts No. Description u i o !0 !1 !2 Part no.

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F5PW Indicator light / Operation D-A59W D-859W D-F5-W, DGs',W, D-J59W, D-Fs'F, D-.J59W, D-K59W. DJsBAL ON operarios f-l-l t u s e l t l l o r r Caution 6 When handling, please avoid dropping, cylinder nicks, and excessive shock.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Note 2) Brass parts of AS2201FE-01 are electroless nickel plated. Note 3) Only for AS21FE-01. 660 ASFE Series Speed Controller with Residual Pressure Release Valve with One-touch Fitting Dimensions Elbow type Applicable tubing O.D. d Model Weight (g) T H1 H2 D1 D2 L1 L2 L3 L4 (1) A (2) M1 Max. Min. Max. Min.

Air Cylinder CLA Series Fine Lock Model

F5PW Indicator light / Operation D-A59W D-859W D-F5-W, DGs',W, D-J59W, D-Fs'F, D-.J59W, D-K59W. DJsBAL ON operarios f-l-l t u s e l t l l o r r Caution 6 When handling, please avoid dropping, cylinder nicks, and excessive shock.

TA301

A port size Symbol Port size Exhaust style Individual exhaust Common exhaust 01 1 8 VVTA300-051-01 1 pc. VOA301 4 pcs. DXT060-51-13A1 pc. Manifold bases same as those for Series VVT300 manifold valves are available.

AS-FPQ/AS-FPG

T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

5 Port Solenoid Valve Series SQ1000/2000

1 08 D N Series P, R port inch bore size Symbol Series SQ1000 SQ2000 1 2 Options Symbol 02 to 24 B K Option specifications Specifies DIN rail length Back pressure check valve on all stations Special wiring specification (except double wiring) With name plate (valve with side port specification only) External pilot specification Built-in silencer Valve stations Symbol Stations 1 station 01

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Dimensions Formulae L1 = 11n + 15.5 L2 = 11n + 55 n: Stations (max. 16 stations) L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 191.5 231 262.5 273 16 L1 L2 (L3 ) (L4 ) 26.5 66 87.5 98 37.5 77 100 110.5 48.5 88 112.5 123 59.5 99 125 135.5 70.5 110 137.5 148 81.5 121 150 160.5 92.5 132 162.5 173 103.5 143 162.5 173 114.5 154 175 185.5 125.5 165 187.5 198 136.5 176 200 210.5 147.5 187 212.5 223 158.5

Compact and

13.3 12 13.3 2 x Connection thread Rc1/8 13.3 12 L1 One-touch Connection Screw-in Connection Model L1 L2 ZU05mA 52 25.4 ZU07mA 59 32.4 Model L1 ZU05mA01 67.2 ZU07mA01 74.2 2 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

VSA4

VSA4120-02 VSA4120-03 VSA4220-01 VSA4220-02 VSA4220-03 VSA4320-01 VSA4320-02 VSA4320-03 VSA4420-01 VSA4420-02 VSA4420-03 2 position single VA 1 4 1 8 Rc 0.60 1 8 Rc 1 8 Rc SA 2 position double 1 4 1 8 Rc 0.70 1 8 Rc VA 1 8 Rc 3 position closed center 1 4 1 8 Rc 0.86 VM 1 8 Rc Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

Pressure Gauge Guide

VE 3 Bleed port Model (Made to Order) Pressure range Note) Indication unit Connection thread VY1 Note Model MPa G43-2-01 to 02-X2 G43-4-01 to 02-X2 G43-6-01-X2 G43-7-01 to 02-X2 G43-10-01 to 02-X2 G43-2-01 to 02-X3 G43-4-01 to 02-X3 G43-6-01-X3 G43-7-01 to 02-X3 G43-10-01 to 02-X3 G43-2-01 to 02-X4 G43-4-01 to 02-X4 G43-6-01-X4 G43-7-01 to 02-X4 G43-10-01 to 02-X4 0 to 0.2 0 to 0.4 0 to 0.6

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS22l1FSl-U01-01 1/8" 7.2 12 19.1 26.1 (26) 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS22l1FSl-U01-03 5/32" 8.2 AS22l1FSl-U01-07 1/4" 11.2 20.8 27.8 (27.7) 14 (13) AS22l1FSl-U01-09 5/16" 13.2 22.4 29.4 (29.3) 14.2 15 (14) AS22l1FSl-U02-01 1/8" 1/8 13 (12.7) 7.2

ZB-OM00301

10 ZB1-VPN3A KJ H 04 04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS2200-01-X12 Ex.) AS2200-01-X21 Note 1) Not particle-free Note 2) Throttle valve is only compatible with the part no. of the meter-out type. Throttle Valve (Without Check Valve) X214 Ex.)

KK/KK13

Orange Calculation of Connected Plug and Socket Dimension Overall length of connected plug and socket B = Plug (L1 L2) + Socket (L2) + 0.5 Plug Socket Example) Overall length of KK3P-01MS (plug) and KK3S-01MS (socket) when they are connected.

S Couplers Series KK/KK13

Orange Calculation of Connected Plug and Socket Dimension Overall length of connected plug and socket B = Plug (L1 L2) + Socket (L2) + 0.5 Plug Socket Example) Overall length of KK3P-01MS (plug) and KK3S-01MS (socket) when they are connected.

Air Suction Filter

Example: In case of 6 stations of air suction filter ZFA100-01 ZZFA1-06 1 pc. (Brackets for 6 stations) ZFA100-01 6 pcs.