3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(A) 2 Port size {2(A) port} 1 1 (P) 3 (R) One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 M5 thread C3 C4 C6 M5 Note) Refer to p.2.10-18 for inch-size One-touch fitting.

One-touch Fittings Series KQ2

M5 A D1 L1 D2 M L2 Part No.

IR1000/2000/3000

When a system hazard can be expected due to a drop in vacuum pressure caused by power loss or vacuum pump trouble, install a safety circuit and configure the system so that it can avoid the danger. 2. When a system hazard can be expected with a malfunction of the vacuum regulator, install a safety circuit and configure the system so that it can avoid the danger. 1.

Dual Speed Controller with One-touch Fitting Series ASD 1

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

Speed Controller with

AS2052F-A AS1002F-A AS2002F-A 500 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 01, 23, 03, 04, 06, 07 100 08, 09 06, 07 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 400 200 06, 07 03, 04 300 50 200 100 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002F-A AS4002F-A 1500

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Sensors 3 position exhaust center D: Push-turn locking slotted type J: With switch 2(B) (A)4 4 M5: M5 x 0.8 (EA)5 1 (P) 3(EB) 3 position pressure center A 4 2(B) (A)4 5 2 B (EA)5 1 (P) 3(EB) For switch operation, refer to page 412.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

C6 :One-touch fitting 6 VVQZ200-10A-5 2.10-33 VQZ100/200/300 Base Mounted Dimensions: VQZ100 VV3QZ15C Station Port size (35) 27 (11) Grommet(G) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3,C4,C6,M5 (5.5) 20 (7.5) 2-4.5 Mounting holes (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Maual override 5.5 A 2 A 2 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

SZ3000

] Applicable tubing O.D.: 8 2n1-M5 x 0.8 [4(A), 2(B) port] (L4) L3 (3.2) 101.2 8 3.1 18 28.8 35 36.3 58.2 3.5 5.5 B B A A A A A (When equipped with switch) DIN rail Manual override Press and turn for the locking type.

VS 8-2/VS 8-4

Regarding a vacuum switch valve and a vacuum release valve If a non-vacuum valve is installed in the middle of piping system having a vacuum, the vacuum condition will not be maintained. Use a valve designed for use under vacuum condition. 10.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VS VFN C6: One-touch fitting for 6 VVQZ200-10A-5 4-14-35 Base Mounted 36 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ15Stations Port size C Grommet (G) (35) 27.5 (11) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3, C4, C6, M5 (5.5) 2-4.5 mounting hole 20 (7.5) (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Manual override 5.5 A 2 A 2 5

Auto Switch Guide

switch mounting screw (M4) M5 x 0.8 x 12 l RHC Mounting bracket (A) MK(2) RS Q G Auto switch Auto switch mounting bracket RS H A Set screw (M4) RZQ Mounting bracket (b) Tie-rod MI W S Auto switch mounting screw (With hexagon socket head) M5 x 0.8 CEP1 CE1 Auto switch CE2 Bracket set screw M5 x 0.8 x 12 l ML2B Mounting bracket (A) C J G5-S 1.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2-One-touch fitting 2-One-touch fitting 2n1-M5 x 0.8 (A, B ports) (A, B ports) Applicable tube O.D.: 4 6 (X, PE ports) Applicable tube O.D.: 6 (L4) L3 Applicable connector: D-SUB equivalent { } JIS-X-5101 MIL-C-24308 Connector case attachment lever (both sides) (3.2) 101.2 9 3.1 Lateral connector entry 8 36.3 5.5 35 6.5 18 28.8 34

Miniature Regulator Series ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

Auto Switch Guide

x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 6-16-37 38 Solid State Switch Direct Mounting Style D-Y59 /D-Y69 /D-Y7P(V) A B A B For details about certified products conforming to international standards, visit us at www.smcworld.com.

Compact 5-Port Solenoid Valve

port side: Blue 2(B) port side: Yellow (Light/surge voltage suppressor) DIN rail holding screw (For DIN rail mounting) 141.3 (8) Plug-in Common Dimensions Made to Order Manifold Exploded View (8) (5.5) A B A B A B A B 4 A 4 A 4 A 4 A 97.5 80 31.8 128.8 96.6 (35) (77.1) B 2 B 2 B 2 B 2 26.3 5.5 1.8 2 x M5 Mounting hole 4 x M5 Mounting hole (15.8) (16.7) (Recommended tightening torque: 2.9

A

Using a regulator on the secondary side When mounting a regulator on the secondary side (A port side), use a residual pressure relief regulator (AR2550 to 4050) or a check type regulator (AR2560 to 6060). With a standard regulator (AR1000 to 6000), the secondary side pressure may not be released when this valve is exhausted. 5.

Soft Start-up Valve AV2000/3000/4000/5000 1

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

Soft Start-up Valve AV2000/3000/4000/5000

K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Mounting Caution Caution For M5, 10-32UNF For G Thread (Face seal type) Tightening method Chamfered area for female thread (Recommended value) 1. Conforming to ISO 16030-2001, the chamfered dimensions shown in the First, tighten it by hand, then give it an additional 1/6 turn to 1/4 turn with a wrench. A reference value for the tightening torque is 1 to 1.5 Nm.

Auto Switch Guide

bracket 20Set screw (M4) Data Mounting bracket (b) Tie-rod Auto switch mounting screw (With hexagon socket head) M5 x 0.8 Auto switch Bracket set screw M5 x 0.8 x 12 l Mounting bracket (A) 1.