Vacuum rib O Deep type B Bellows type List o Pad dia.
B Through hole/ Double end tap common (standard) Number of auto switches Bore size 12 16 20 25 2 pcs. 1 pc.
16.5 19.5 B 7.5 9.5 10.5 10.5 14.0 17.0 A 33.0 32.0 34.0 27.5 31.5 32.0 B 12.5 14.5 15.5 15.5 19.0 22.0 A 26.5 25.5 27.5 21.0 25.0 25.5 B 6.0 8.0 9.0 9.0 12.5 15.5 A 27.5 26.5 28.5 22.0 26.0 26.5 B 7.0 9.0 10.0 10.0 13.5 16.5 B 4.5 6.5 7.5 7.5 11.0 14.0 A 27 20.5 24.5 25 B 8.5 8.5 12 15 20 25 32 40 50 63 Note) When setting an auto switch, confirm the operation and adjust its mounting
0.20 0.15 mm 0.3 mm 0.03 mm 0.30 0.03 0.15 0.20 0.02 0.10 0.01 mm 0.10 0.01 0.05 0.05 mm 0.02 mm 0 0 0 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Piping length: 5 m Piping length: 5 m Piping length: 5 m Reference pressure 0.06 Reference pressure 0.30 Reference pressure 0.60 The distance
(B contact) mm Standard stroke 25 0.8 50 1.0 75 1.1 100 1.2 5 to 40 (with no condensation) 3 (2) horizontal Note 1) N.C. (B contact) Body weight kg N.O. (A contact) N.C.
(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 18.8 39.3 18 18.8 39.3 40.1 R R 3/5 3/5 4 A 4 A 4 A 3/5 4 A 4 A 4 A R R 3/5 4 A 4 A 4 A 4 A 4 A 4 A 63.3 79.8 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing
8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 63 80 100 50 54 47 38 42 35 128
Cv b Cv VZ312 VZ322 VZ314 VZ324 N.C. 0.53 0.66 1.2 1.3 0.45 0.45 0.41 0.37 0.14 0.18 0.32 0.33 0.47 0.66 1.1 1.2 0.39 0.45 0.46 0.48 0.12 0.18 0.32 0.34 M5 75 Body ported N.O.
HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)
32 40 50 63 80 100 25 31 38.5 39.5 45.5 54 79 90 110 120 153 178 32 36 45 50 63 75 64 72 90 100 126 150 10 10 12 12 16 16 3 3 2 2 4 4 7 9 9 9 12 14 up to 700 50 55 70 80 100 120 up to 800 Fd up to 1000 FY B up to 1000 CJ1 up to 1000 up to 1000 FX CJP FT FE FZ CJ2 CM2 Rear flange/(G) C85 Port Cushion valve 4-FD Rear flange (mm) CG1 Bore size (mm) Stroke range ZZ FZ FY FX FT FD B FY B MB 32
85.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 18 198.5 211.5 237.5 248 19 209 222 250 260.5 20 219.5 232.5 262.5 273 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104 117 137.5 148 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 13 146 159 187.5 198 14 156.5 169.5 200 210.5 15 167 180 200 210.5 3 41 54 75 85.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 4 51.5 64.5 87.5
The front cylinder B (rod end) must be equal to 5 to allow the full stroke.
(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.
center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.
e Order No. b d f l1 c a 32 M10x1.25 GKM10-20 10 40 10 52 20 20 40 M12x1.25 GKM12-24 12 48 12 62 24 24 50/63 M16x1.5 GKM16-32 16 64 16 83 32 32 80/100 M20x1.5 GKM20-40 20 80 20 105 40 40 Rod end nut (standard equipment) 30 d D C H B Bore size (mm) Order No.
Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.
L1 (mm) With rear lock With front lock Bore size (mm) I J K C D E H Standard stroke A B Q A B F Q 32 72.5 65.5 12.5 65 58 7.5 10.5 13 16 45 M8 x 1.25 60 4.5 14 40 82 75 14 71.5 64.5 8 11 13 16 52 M8 x 1.25 69 5 14 10, 15, 20, 25 50, 75, 100 50 83.5 75.5 14 73.5 65.5 10.5 10.5 15 20 64 M10 x 1.5 86 7 17 63 85 77 15.5 79 71 10.5 15 15 20 77 M10 x 1.5 103 7 17 (mm) Bore size (mm) R W Z L M
Features 2 Model Selection 1 Obtain the correction factor for the temperature from data A or B and the correction factor for the air pressure from data C. Temperature Data A or B = Series IDU: Data A IDF1D to 240D: Data B-1 IDF 370B: Data B-2 Air pressure Data C = Series IDU and Series IDF: Data C 2 Calculate corrected air flow by using A or B and C.
D-A7lH, A80H D-A73C, A80C D-F7l, J79 D-F7lV, J79C D-A79W D-F9l D-F9lV D-F9lWV D-F9lW D-F9BAL D-P5DW D-A9l D-A9lV D-A7, A8 Model B 6.5 7 6 8.5 11.5 14.5 A 28.5 29 33 24 28.5 28.5 B 7 7.5 6.5 9 12 15 B 4 4.5 3.5 6 9 12 B 11 11.5 10.5 13 16 19 B 4.5 7.5 10.5 B 5 7.5 10.5 13.5 B 9 11.5 14.5 17.5 A 34.5 25.5 30 30 B 8 10.5 13.5 16.5 A 19.5 24 24 A 28 28.5 32.5 23.5 28 28 A 25.5 26 30 21
Cv C[dm2/(sbar)] b Cv Flow characteristics 1 2 (P A) 2 3 (A R) Body ported Max. operating frequency (c/s) (AC/DC) (1) 15 21/21 or less 0.125 15 21/21 or less 0.250 Response time (ms) (AC/DC) (2) Weight (kg) (3) Note 1) Minimum operating frequency: As per JIS B 8373 (Once in 30 days) Note 2) Based on JIS B 8375-1981 (Supply pressure; 0.5 MPa; without surge voltage suppressor) Note 3) Value