Rotary Table/

80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6 4 2 Load N Load N MSQ50 MSQB7A MSQB50 (Basic type) 100 200 Displacement m Displacement m 90 150 80 120 50 MSQA50 (High precision

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the grommet. 3 78 69 63 80 71 65 6 126 117 111 131 122 116 8 158 149 143 165 156 150 10 190 181 175 199 190 184 2 62 53 47 63 54 48 20 350 341 335 369 360 354 4 94 85 79 97 88 82 5 110 101 95 114 105 99 7 142 133 127 148 139 133 9 174 165 159 182 173 167 11 206 197 191 216 207 201 12 222 213 207 233 224 218 13 238 229 223 250 241 235 14 254 245

CJ5-S

, 200 201 to 350 25 301 to 400 RS H A 32 301 to 450 40 301 to 800 Made to Order Specifications (For details, refer to page 10-21-1.) 25, 50, 75, 100, 125, 150, 200, 250, 300 RZQ 50, 63 301 to 1200 80 301 to 1400 MI W S Symbol Specifications 100 301 to 1500 -XA Change of rod end shape Note) All non-standard strokes are produced upon receipt of order.

39

Relation between clamp arm length and maximum clamping force The length of the clamp arm L should be the length given below or less. operating pressure 0.5 MPa 5000 Arm length L Model 4000 Clamping force (N) CKZ3N50 CKZ3T50 CKZ3N63 CKZ3T63 150 mm 63 3000 300 mm 2000 50 1000 0 350 300 250 200 150 100 50 0 Arm length L (mm) Series CKZ3N Allowable load for clamp arm end Refer to the graph on

CJ5-S

, 200 201 to 350 25 301 to 400 RS H A 32 301 to 450 40 301 to 800 Made to Order Specifications (For details, refer to page 10-21-1.) 25, 50, 75, 100, 125, 150, 200, 250, 300 RZQ 50, 63 301 to 1200 80 301 to 1400 MI W S Symbol Specifications 100 301 to 1500 -XA Change of rod end shape Note) All non-standard strokes are produced upon receipt of order.

Power Clamp Cylinder

Space at manual release Leave a space in order to release by hitting with a plastic hammer. 150 Min.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

For response time, refer to the graph below. 400 350 Response time (ms) 300 250 200 150 100 50 0 1 2 3 4 5 6 7 8 9 10 11 12 * This graph shows delay times between gateway unit and controllers. Fieldbus network delay time is not included.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

260.5 12 193.5 211 237.5 248 11 182 199.5 225 235.5 10 170.5 188 212.5 223 9 159 176.5 200 210.5 8 147.5 165 187.5 198 7 136 153.5 175 185.5 6 124.5 142 162.5 173 5 113 130.5 150 160.5 4 101.5 119 150 160.5 3 90 107.5 137.5 148 2 78.5 96 125 135.5 1 67 84.5 112.5 123 L1 L2 L3 L4 2-3-15 16 Series SQ1000 Kit (PC Wiring System compatible flat ribbon cable kit) J Manifold Specifications PC

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

locking type, Knob locking type SY5000 Manual override Response time ms (at 0.5MPa) Main valve/pilot valve common exhaust type Pilot exhaust Type of actuation Without surge voltage suppressor With surge voltage suppressor Not required Lubrication Types R, U Types S, Z Unrestricted Mounting orientation 2 position single 19 or less 26 or less 19 or less Impact/Vibration resistance m/s2 Note) 150

AC Servo Motor Driver (Pulse input type)

Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 250 150 75 300 200 100 375 250 125 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection *4 PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06 7 7 Machine resonance suppression

OMR0032

[ms] Deceleration time: 20 80 = 250 [ms] Flow chart (Reference) Controller (1) Turn "TL" signal OFF.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 39 45 55 60 UU 134 158 190 220 U 114 136 165 190 N 15 17 20 25 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 H 39 45 55 60 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 H 30 33 43 44 N 15 17 20 25 U 105 124 153 174 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 39 45 55 60 UU 134 158 190 220 N 15 17 20 25 U 114 136 165 190 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 N 15 17 20 25 U 105 124 153 174 H 39 45 55 60 H 30 33 43 44 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

198 225 235.5 169.5 209 237.5 248 180.5 220 250 260.5 57 Manifold Specification Sheet Series VQ1000/Flip, Plug-in Unit 1.

JXCx-OMT0028CN

No. (2) GW (GW [OUT Data]Address.250, bit1-0) (GW [IN Data] Address.250, bit1-0) GW [OUT] GW [IN] Address.250 Address.250 bit1 bit0 bit1 bit0 0 0 0 0 0 1 0 1 1 0 1 0 36 - 10.2 LEC GW LEC ID 1GW [OUT Data]Address.0 Address.1 GW [IN Data]Address.0 Address.1 IO LEC 10.3 LEC LEC (GW [OUT Data]Address.251 Address.252)PLC (GW [IN Data]Address.251Address.252) GW [OUT Data] GW Address

Shot Pin Cylinder

Deflection + L F F (Dimension when extended) + M Built-in coil scraper and Lube-retainer MAllowable lateral load graph MSelectable proximity switches CKZP57L TURCK P&F 400 Allowable lateral load [N] 350 300 250 200 MAdjustable connector angle 150 100 CKZP57L: 45, 90 CKZP71: 0, 45, 90 50 0 0 50 100 150 200 250 Offset distance L [mm] CKZP71 0 50 100 150 200 250 300 350 400 450 500

Compact and Lightweight

100 250 100 100 100 Vacuum pressure Vacuum pressure ZL Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] 200 80 200 80 80 80 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] ZH ZH Air consumption 150 60 60 150 60 60 ZH Air consumption Suction flow rate 100 40 40 100 40 40 ZH -

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12