Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

rod CQP2 Double acting 7-6-88 Spring return/ 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 Spring extend CQP2 7-6-98 Large Bore Size 125, 140 160, 180 200 Single rod CQ2 7-6-108 10 to 300 Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S

MXQ

-50 MXQ25-50 MXQ25-30 MXQ25-30 MXQ25-50 MXQ25-50 MXQ25-125 MXQ25-125 MXQ25-30 MXQ25-50 MXQ25-125 0.08 0.06 MXQ25-20 MXQ25-20 MXQ25-20 0.04 MXQ25-20 MXQ25-20 MXQ25-20 0.04 MXQ25-10 MXQ25-10 MXQ25-10 MXQ25-10 0.04 0.02 0.02 0 0 0 800 200 400 600 100 200 300 400 500 100 200 300 400 500 Load (N) Load (N) Load (N) 8-5-13 14 Series MXQ Model Selection Model Selection Step Formula/Data Selection

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

76

230 V (50 Hz) Three-phase 200 V (50 Hz) Three-phase 200/220 V (60 Hz) IDU37E R1 1/2 37 215.4 201.3 IDU55E 55 346.0 296.6 R2 IDU75E 75 441.4 388.4 Refer to the separate catalog.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

DB, E dimensions MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB st50 5020050200502005020050 50 141.5 156 199 25 41 84 131 152 172 199 20 16 37 57 84

Compact manifold regulator ARM5 Series

100 150 200 250 0 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

Vacuum System Peripherals:

Nil 3 rotations setting 200 setting 3 rotations setting 200 setting 3 rotations setting 200 setting 18 rotations setting 18 rotations setting E14 1 point setting E15 With analog output 2 points setting E16 E17 Electronic (12 to 24 VDC) 1 point setting E18 E19 With analog output With analog output With analog output Switch model 1 point setting M15 Diaphragm solid state switch (10 to 26 VDC

High Power Cylinder Series RHC

250 =0.7 200 0.5 150 0.1 0.3 100 50 0 1,000 2,000 3,000 Maximum speed Vmax [mm/s] : Cylinder load factor Vmax : Maximum speed (Refer to page 24) 16

REC

*Calculation example: REC32-200 Basic weight 0.90 (Foot style 32) Additional Weight 0.09/50 stroke Cylinder stroke 200 stroke 0.90+0.09 X 200/50=1.26kg Auto Switch Mounting Bracket (including band and screw) Applicable auto switch Bore size (mm) 20 25 40 32 D-C73, D-C76, D-C80 D-C73C, D-C80C Reed BMA2-020 BMA2-032 BMA2-025 BMA2-040 D-H7B, D-H7C, D-H7A1, D-H7A2 D-H7NW, D-H7PW, D-H7BW D-H7LF

Electric Actuator / Slider Type 《 AC Servo Motor 》

/60Hz) 200 to 230VAC (50/60Hz) 3-phase 200 to 230VAC (50/60Hz) option Analog monitor output RS-422 interface Regenerative option PC LEC-MR-RBWhen using this software, order USB cable separately.

Air Cylinder Series MB

Order Made 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 Symbol Specifications/Descriptions 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 XA 100 Change of rod end shape 1500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450,

Support Guide/11-LEFG Series

0 0 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load

PF2A/PF2W

/550 PF2A511/521 PF2A551 Specifications PF2A510 PF2A550 PF2A511 PF2A521 PF2A551 Model Measured fluid Air, Nitrogen Detection type Heater type 20 to 200 l/min 50 to 500 l/min 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min Flow rate measuring range 50 kPa to 0.5 MPa 50 kPa to 0.75 MPa Operating pressure range Proof pressure 1.0 MPa Operating fluid temperature 0 to 50C Linearity Note 1) 5% F

Table of Contents

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

Series AK1000

to 3000 psig (1.4 to 20.7 MPa) 100 0.69 90 0.62 80 0.55 Delivery pressure (MPa) Delivery pressure (psig) 70 0.48 60 0.41 50 0.34 40 0.28 30 0.21 20 0.14 0 10 0.00 0.07 0 50 100 150 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Auto Switch Guide

Auto Switch Specifications Grommet PLC: Abbreviation of Programmable Logic Controller D-B5 (With indicator light) D-B53 D-B54 MX Auto switch model Applicable load PLC Relay, PLC MTS Load voltage 24 VDC 24 VDC 100 VAC 200 VAC (3) Load current range 5 to 50 mA 5 to 50 mA 5 to 25 mA 5 to 12.5 mA MY Contact protection circuit None Built-in Internal voltage drop 2.4 V or less 2.4 V or less (to

MXW Series Long Stroke Slide Table

moment 70 MXW25 70 100 50 30 40 N m 50 MXW20 Pitch moment Yaw moment Roll moment 25 30 40 MXW20 Model 20 Moment N m Moment N m Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 5 5 3 MXW 8 10 15 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 110 110 65 2 1.5 MXW25 50 100 200 300 500 700 50 100 200 300 500 Piston speed mm/s Piston speed mm/s (Graph3) (Graph2

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Coil voltage 1 Note) Refer to p.2.10-39 for sub-plate part No. 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others When requiring AC specification of grommet and/or special voltage, consult SMC. 2 3 4 5 6 9 2.10-24 VQZ100/200/300 Base Mounted How to Order Valve VQZ200/300 VQZ 2 1 5 5 M Series 2 3 VQZ200 Body width 15mm VQZ300 Body width 18mm