HRX-OM-Q026

Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulphate ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or

CS1

Calculation example: CS1L160-500 Basic weight27.57 (Foot style, 160) Additional weight2.39/100 stroke Cylinder stroke500 stroke 27.57 + 2.39 X 500/100 = 39.52kg Weight/Steel tubing (kg) Bore size (mm) 125 140 160 180 200 250 300 Basic 15.20 18.38 25.24 34.16 42.66 79.78 115.94 Foot 16.83 20.90 28.04 38.36 47.54 89.28 133.22 Front flange 17.88 23.38 31.63 43.99 54.57 101.62 146.14 Rear

AZ1000

40 0.21 30 0.14 20 10 0.07 0.00 0.07 0 10 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

DC Red Black 100 VAC Blue Blue 2 200 VAC Red Red 2 (, +) Other AC Gray Gray With surge voltage suppressor With surge voltage suppressor There is no polarity for DC. (For the low power consumption type, there is polarity.) Description Part no. Seal VCW20-15-6 Note) Please order separately.

CC

CCT 63 100 Effective oil level stroke (mm) Converter nominal size/stroke (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50, 100, 200, 300, 400, 500 100, 200, 300, 400, 500, 600 200, 300, 400, 500, 600, 700, 800 63 100 160 Specifications Operating pressure 0

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motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

C85

Bore size Stroke Max. stroke (mm) Bore size (mm) Standard stroke (mm) Standard Non-rotating Double rod 8 10 12 16 20 25 10, 25, 40, 50, 80, 100 100 100 400 10, 25, 40, 50, 80, 100, 125, 160, 200 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 200 200 1000 1000 500 Not available with air cushion. Other strokes available on request.

MNB

F from 0.4MPa Graph 6 m from 0.5MPa Graph 7 F 31 Selection of Models Series MNB Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 1000 1000 500 400 300 500 400 300 100 80 200 200 63 100 80 100 50 40 100 100 Load weight: m(kg) Load weight: m(kg) 63 50 40 30 50 40 30 32 50 40 20 20 32 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V(mm

Thermo-chiller

flow, r Power supply: 200 VAC 7 Standard Type Thermo-chiller Water-cooled 200 V Type Series HRS100/150 RoHS How to Order 100 W 20 HRS Cooling capacity Option 100 10 kW 150 15 kW Cooling method Note) This is a manual fluid fill port that is different from the automatic fluid fill port.

MTS

80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang L (mm

CNG

0.5 1000 1000 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 200 200 100 100 40 32 30 40 50 30 40 50 25 40 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 [Example] 25 10 10 20 5 4 5 4 3 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5MPaP 0.5MPaP 200 200

Cylinder with Lock Series CNG

0.5MPaP 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) 1000 1000 Maximum speed: V(mm/s) Note: 1kg = 2.2046lb 1MPa = 1450psi 1in = 25.4mm 20

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

mm] JSXD30 Series 1/4, 3/8, 1/2 10 100 JSXD40 Series 3/8, 1/2 15 200 JSXD50 Series 3/4 20 430 Grommet Stainless steel NBR Air JSXD60 Series 1 25 DIN terminal Brass 580 N.C.

CXS

Stroke range Standard strokes (mm) Bore sizes (mm) Long strokes (mm) Series 10 80, 90, 100, 110, 120, 125, 150 10 to 75 CXSM CXSL 15 110, 120, 125, 150 20, 25, 32 10 to 100 110, 120, 125, 150, 175, 200 10,15 10, 20, 30, 40, 50 75, 100, 125, 150 CXSWM CXSWL 10, 20, 30, 40, 20, 25, 32 125, 150, 175, 200 50, 75, 100 Dimensions CXS10, 15 CXS20, 25, 32 Stroke ZZ Stroke ZZ SS SS Z Z (Z) (Z) CXS10

MXW

400 500 100 200 300 400 600 500 100 200 300 400 600 Load (N) Load (N) Load (N) 8-7-5 6 Long Stroke Slide Table Series MXW 8, 12, 16, 20, 25 How to Order MXW 16 100 B M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) -X Selection Graph (6) to (8) (Horizontal mounting) 20Data Graph (6) l: 100 mm or less Graph (7) l: 101 to 200 mm Graph (8) l: 201 to 300 mm 300 100 200 100 100 Load weight m (kg) Load weight m (kg) Load weight m (kg) 80 80 80 10 10 10 63 63 63 50 50 50 40 1 1 1 25 20 25 20 40 32 40 32 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000

Lightweight and Compact

HRS HRS 090 HRS 090 HRS 100/150 Protection Circuit Item Unit Standard value Influence HRSH 090 Corrosion Scale generation Caution pH (at 25C) 6.5 to 8.2 v v Electric conductivity (25C) [S/cm] 100* to 800* v v Chloride ion (Cl) [mg/L] 200 or less v Sulfuric acid ion (SO42) [mg/L] 200 or less v HRSH If operating in the below conditions, the protection circuit will activate and an operation

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

16 16 0.2 0.05 0.1 0.2 0.1 0.05 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

ISA2

150 200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure