5

, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 Unit: MPa Bore size (mm) 32 40 50 63 80 100 Min. operating pressure 0.02 0.01 Note 1) Intermediate

MXW Series Long Stroke Slide Table

moment 70 MXW25 70 100 50 30 40 N m 50 MXW20 Pitch moment Yaw moment Roll moment 25 30 40 MXW20 Model 20 Moment N m Moment N m Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 5 5 3 MXW 8 10 15 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 110 110 65 2 1.5 MXW25 50 100 200 300 500 700 50 100 200 300 500 Piston speed mm/s Piston speed mm/s (Graph3) (Graph2

0.4

Bore size CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 One-touch fitting 800 700 600 500

Floating Joint

25, 30, 40, 50, 63 80, 100, 125, 140, 160 Hydraulic cylinder 3.5 MPa or less Heavy load JAH Series Basic type Flange type Foot type 1151 40, 50, 63, 80, 100 Hydraulic cylinder 7 MPa or less For compact cylinders JB Series Basic type (Female thread) 12, 16, 20, 25, 32 40, 50, 63, 80, 100 1154 1 MPa or less Pneumatic cylinder Stainless steel type JS Series Basic type 1156 10, 16, 20, 25 32,

Table of Contents

Description POM Valve 19033 19014 19024 e Stainless steel Spring 19037 19015 19025 r NBR O-ring 20 x 17 x 1.5 t NBR Ring 19016 19026 y Brass, NBR Seat ring 19013 19023 u Dimensions Model Port size L1 H B AK2000-01/02 22 25 1/8, 1/4 50 AK4000-02/03/04 36 36 1/4, 3/8, 1/2 67 AK6000-06/10 50 50 3/4, 1 95 Caution Be sure to read before handling.

CC

When selecting a converter by its nominal diameter, the converter's oil level speed should be 0.2m/s or less. 300 25 600 500 400 100 200 20 300 CRA1H100-180 300 100 200 CRA1H100-90 200 150 CRA1H80-180 50 eSelect required function for valve unit 100 100 80 CRA1H80-90 Select a model from data , by determining the functions that

Adsorption Plate

Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

Electric Actuator / Slider Type 《 AC Servo Motor 》

For 50-mm stroke type, only four bolts are tightened on the motor side.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

65 60 Inrush Frequency (Hz) 50 45 55 50 65 60 50 60 50 60 50 60 50 60 50 60 50 60 9 7 19 16 30 25 11 8 20 18 32 27 VX21 VX21 VX22 VX22 VX23 VX23 Note) The values are for an ambient temperature of 20C and at the rated voltage.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

500 400 300 200 200 100 1 2 3 4 5 10 20 30 1002 3 4 5 10 20 30 0.5 40 50 100 Load weight (kg) Load weight (kg) 20 Horizontal collision: P = 0.5 MPa 40 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load

Profile Design ISO/VDMA Air Cylinder Series CP95

Piston speed [mm/s] Maximum air consumption Q [Nl/min.] 100 125 2 300 400 500 300 400 500 80 150 200 150 200 63 50 100 100 32 40 30 40 50 30 40 50 25 20 20 20 15 15 16 10 10 8 2000 10 5 4 1500 3 1000 2 6 500 400 300 1 1 200 0.5 100 0.2 0.3 0.4 0.5 0.6 0.7 0.8 Working pressure [MPa] 1.8-26 Series CP95 Average air consumption of compressed air cylinders and piping Thermal loss is not represented

Industrial Filters

56 50 63 06 FGDFB FGESA Note 2) 410 3000 45 90 120 140 100 160 10 FGELA Note 2) 410 3600 50 120 140 170 110 210 20 FGETA FGESB Note 2) 800 3300 70 140 150 160 120 170 10 FGELB Note 2) 800 4200 90 170 180 210 140 230 20 FGETB FGESC Note 2) 1100 3400 83 150 160 170 120 170 10 FGELC Note 2) 1200 4400 120 190 200 220 150 230 20 FGETC FGGSB 160 270 300 320 290 360 FGGLB FGGSC 200 300 320

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load weight (kg) Load weight (kg) 1.

CLS

Graph (1) 50 40 30 20 10 Load movement time: t(S) 1600 st 2000 st 2400 st Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 4 3 Example) 1400 st 1200 st 1000 st 800 st 600 st 500 st 400 st 300 st 2 [Example] 1 200 st 0.5 0.4 0.3 V' 100 st 0.2 V W 0.1 100 200 300 400

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

Modular Design with Uniform Body Style

40 55 9 18 7 50 65 AC40A-06-D 3/4 1/8 155.2 149.1 93 38.4 77.6 110 35.5 50 40 55 9 18 7 50 65 AC50A-D 3/4, 1 1/8 191.2 234.1 155 98.1 110 45 70 50 70 11 20 8 60 80 AC60A-D 1 1/8 196.2 234.1 155 98.1 110 45 70 50 70 11 20 8 60 80 Model Optional specifications Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with level gauge Square embedded type pressure gauge Round type

Series AK1000

0.34 0.62 45 0.31 80 0.55 40 0.28 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 35 0.24 70 0.48 30 0.21 60 25 0.17 0.41 20 0.14 50 0.34 15 0.10 10 0.07 40 0.28 0 5 0.00 0.03 30 0.21 0 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) AK1200HF 150 psig

0.5

distance [mm] wStatic Neutralization Range IZF10 IZF10-L 300 mm 300 mm 8 s 8 s 4 s 4 s 0 0 2 s 6 s 2 s 6 s 300 mm 300 mm 600 300 900 1200 600 300 900 1200 Installation distance [mm] Installation distance [mm] IZF10R (Air flow level: 4) IZF10R (Air flow level: 1) 300 mm 300 mm 6 s 2 s 8 s 6 s 4 s 2 s 8 s 0 0 4 s 300 mm 300 mm 600 300 900 1200 600 300 900 1200 Installation distance [mm] Installation

AC

Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 58 90 117 154 164 109.5 164.5 207.5 259 263 25 40 53 70 70 26 56.8 60.8 70.5 70.5 25 30 41 50 50 50.5 78 92.5 112 114 29 45 58.5 77 82 20 24 35 40 40 4.5 5.5 7 9 9 7.5 8.5 11 13 13 38.5 50 70.5 88 88 50 80 80 105 105 17.5 22 34.2 42.2 46.2 16 23 26 33 36 5 5 7 7 7 130 187.5 AC1010 AC2010 AC3010 AC4010 AC4010-06 1/8, 1/4 248.5 300

energy saving effect

HECR 50 0.43 0.45 Outlet Pump head [m] Pump head [m] Outlet 0.4 0.4 40 40 HEC 0.3 30 0.3 30 HEB 0.2 20 0.2 20 HED Return port 0.1 10 0.1 10 Return port 0 0 0 0 HEA 45 40 50 0 10 20 30 60 70 80 90 100 110 120 Circulating fluid flow rate [L/min] 45 0 20 10 40 30 50 60 70 80 90 100 110 120 130 Circulating fluid flow rate [L/min] IDH HRSH250/300-A-20/4090 0.9 Usable flow rate range Circulating