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Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 10kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 150 100 50 10 1 150 100 50 10 1 10 10 15.1 10.1 5.1 1.1 0.2 15.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 40 40 3.8 2.6 1.3 0.3 0.1 3.8 2.6 1.3 0.3 0.1 80 80 1.9 1.3 0.7 0.2 0.4 1.9 1.3 0.7 0.2

Temperature characteristics 0.5% F.S. (25C reference) Accumulated flow range*1 9.9 L 9 L by 0.1 L by 1 L Switch output NPN or PNP open collector output Maximum load current 80 mA Maximum applied voltage 28 VDC Internal voltage drop NPN: 1 V or less (at load current of 80 mA) PNP: 1.5 V or less (at load current of 80 mA) Response time*2 0.5 s/1 s/2 s/5 s Output protection Short-circuit protection

Reed switch: D-A7/A8, Series MRQ Linear motion part size Solid state switch: D-F7/J7 Output of rotating part (at 0.5MPa) Linear motion stroke (mm) Rotation angle 5 10 15 20 25 30 40 50 75 100 80 to 100 170 to 190 32 1.02N/m An air cushion is also available. 80 to 100 170 to 190 40 1.91N/m Application examples A connecting port can be selected from two positions that are available on the rotation

PM Series Sizing Curves Metric I 40 80 120 160 200 50 75 100 125 150 175 TOTAL ENERGY (Nmrb) TOTAL ENEFGY (Nm/c) 80 120 160 200 244 200 400 TOTAL ENEFIGY (Nm/c) rOTAL ENERGY (Nm/c) i 2 d ; 1 f 200 400 TOTAL ENEFGY INm/c) 00.2 0.4 0.6 0.8 1.0 1.2 TorAL ENERGY (to3Nm) 0.4 0.a 1 2 1 6 2 TOTAL ENEFcY (103Nm) TorAL ENEBGY (1o3Nm) Pil models is O.1 Minimum impact velocity for I LhCIck AbsCIrbers

Size of linear motion parts Output of rotary motion parts (at 0.5 MPa) Linear motion stroke (mm) Rotating angle 100 30 75 5 10 15 20 25 40 50 80 to 100 32 1.02 Nm 170 to 190 80 to 100 1.91 Nm 40 170 to 190 A connecting port can be selected from two positions that are available on the rotation unit.

Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !

1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/Pulse 0.1 L/Pulse 1 L/Pulse -2 L/minCFM10 310 -1 Lft 4 1F.S.() 3%F.S 5F.S.(0.35 MPa ) 2F.S.(1535 ) 5F.S.(015 3550 ) -70750 kPa 1 MPa NPN PNP 80 mA DC28 V(NPN ) NPN 1 V (80 mA )PNP 1.5 V (80 mA ) 1 s(50 ms0.5 s2 s

Model H F E D C B A 1 4 1 4 405.5 441.5 65 80 140 150 204 235 175 185 305.5 341.5 210 240 VNC81 -65F VNC91 -80F 4.2-25 VNC Construction N.C.

-12 FH641-16 15 (1/2B) 15 (1/2B) 1/2 1/2 20 20 20 (3/4B) 20 (3/4B) 3/4 3/4 50 50 Max. 21 MPa 25 (1B) 25 (1B) 1 1 80 80 Max. 7 MPa 32 (1 1/4B) 32 (1 1/4B) 1 1/4 1 1/4 120 120 40 (1 1/2B) 40 (1 1/2B) 1 1/2 1 1/2 160 160 50 (2B) 50 (2B) 260 260 65 (2 1/2B) 450 80 (3B) 600 Note) Tapered female thread connection conforming to JIS B 0203 is compatible.

AMD550 AMD650 AMD850 3/4B/FF/10K 1B/FF/10K 290 AMD350 80 Related poroducts 2B/FF/10K 11/2 B/FF/10K 305 312 AMD450 80 339 AMD550 80 391 AMD650 80 540.5 AMD850 80 Precaution Please refer to p.4.5-7 for with pressure differential gauge (GD40-2-01). 4.6-14

n 2 (" 2. 4. 6. 8 ..) (" = 4. 8. 12. ' 6 ..) (" =4. 8. ' 2. '6.. ) (" = 4. 8. ' 2. ' 6 .. ) With 2 pes tDrtterent slIriaces, 90 80 85 '0 Same surface), Wilh 1 pc. D-M90V D-M90WV 80 + 3O

or less 70 or less 80 or less 70 or less 80 or less 80 or less Single 2-position 5 (R1) 3 (R2) Double 1 (P) N.C.

CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12 MXZ12Standard (Pilot port location: Front) 4 x 6 4 x M3 x 0.5 depth 5 17 14 14 2 x 3.4 (Through holes for mounting) 17 37.4

AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket 20 2BFlange 30 3BFlange 40 4BFlange 20 2BFlange 30 3BFlange 40 4BFlange Shape Piping support style Standing style 60 6BFlange How to Select Max.

63 16.5 IS1000E-303 38 IS1000M-6 15 100 72.5 23 54 AC3000 IS1000E-304 12 40 80 63 17.5 *Without Yoke Clip.

New New Long Stroke MHSL3 Opening/closing stroke more than twice the standard (MHS3) Stroke mm Dia.: Open Closed 10 (4) 10 (4) 12 (6) 16 (8) 20 (8) 28 (12) 32 (16) 40 (20) 48 (24) 64 (32) Open Cylinder bore size mm Height mm Weight g 16 20 25 32 40 50 63 80 100 125 80 135 180 370 550 930 1,550 2,850 5,500 11,300 43.5 46 49 58 64 77.5 89 116 135 175 Closed Gripping of different diameter work

80 70 70 200 100 60 60 Air consumption Air consumption 150 50 50 75 40 40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40

Rc1/4 Rc3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 6 Series VQ7-6 DIN Connector Type VV71-100 80 2n-Rc1/4, 3/8 100 80 9 37 9 23 14 U side 15 R4.5 Manual override Indicator light R4.5 53.5 P=43 9 9 53.5 P=43 20 9 23 38 B B B B B B B B B SMC SMC SMC A PA PA PA PA A A A A B A L1 L2 L2 L1 B A B SMC A B A 4n-Rc1/4, 3/8 (ports A, B) PA L side R side

A B C D E F H Note) Model 1 4 1 4 VNC81 -65F VNC91 -80F 210 240 305.5 341.5 175 185 204 235 140 150 65 80 387.5 (389.5) 423.5 (425.5) Note) ( ): CE-compliant product (-Q) 623 A VNC Series How to Order Pilot Solenoid Valves Valve size 1 Valve size 2 to 9 1 Q SF4 5 D 5 D 23 Q VO307 CE-compliant Coil rated voltage CE-compliant Coil rated voltage CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200