Industrial Filters

Main applications Cotton Stainless steel 304 20 to 100 0.5, 1, 5, 10, 20, 50, 75, 100 0.2 MPa 0.1 MPa Polypropylene Polypropylene 0 to 60 0.5, 1, 5, 10, 20, 50, 75, 100 Glass fiber Stainless steel 316 1, 5, 10, 20 0 to 400 Note) Size for all is 65 x L250. Different lengths are available as a special order up to 750 mm, only for cotton and polypropylene. Elements Part No.

Compact Cylinder with Air Cushion and Lock Series RLQ

Applicable auto switches: Refer to pages 5.3-1 through 5.3-75 of Best Pneumatics Vol.2 for detailed auto switch specifications.

CG5-S

20 21 14 58 11 72 M10 x 1.5 7 18 22 7 69 1/4 to 600 80 22 M22 x 1.5 60 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 80 3/8 to 750 100 22 M26 x 1.5 60 40 37 41 60 90 30 29 20 71 16 110 M12 x 1.75 10 26 33 8 100 1/2 to 750 (mm) Bore size (mm) Trunnion bracket CD (shaft) Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ RR S U 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

High Vacuum Angle Valve, XL Series

.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2 Bellows 60 30 0 60 30 0 Time (minutes) Time (minutes) Valve F=(1.8xC

XL

.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2 Bellows 60 30 0 60 30 0 Time (minutes) Time (minutes) Valve F=(1.8xC

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

3 38.5 75 15.3 4.2 28 7.5 3 38.5 57 12.8 3.2 24 6 6 6 6 6 6 10 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com One-touch and screw-in connection Applicable tubing diameter B Model A 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60

Cylinder with Lock Series CLS

59 D 30 W 14 AL 5 N N A K 43 C B S + Stroke BY H M ZZ + Stroke With rod boot 75 l 15 40 h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) 125 140 160 K KA M MM A AL B BA BB BC BY BZ C D GA GB GC J 15 31 27 M30 x 1.5 50 47 145 75 18 110 136 115 36 16 107 58 M14 x 1.5 to 1000 15 31 27 M30 x 1.5 50 47 161 78 18 2 110 146 128 36 16 114 64 M14 x 1.5 to 1000 17 36 30.5 M36 x 1.5 56

LVQ

145 25 141 50.2 78.2 10 7 20 50.8 38.5 45 128 2 1 35 70 41 82 75 154.5 32 150 60 88 10 7 20 50.8 38.5 45 137.5 17-5-71 10 Series LVQ Dimensions With by-pass Double acting valve N M LVQ20 SMC C A B D (Max.

VQ7-6/7-8

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer

CE

ML2B C J G5-S CV MVGQ Power supply voltage 12 to 24 VDC Abundant stroke variations Improved noise resistance CC RB Series Variations J System Configuration Series CE1 Standard stroke (mm) Series CEP1 Standard stroke (mm) Bore size (mm) Manufacturable stroke range Bore size (mm) DExtension cable Series CE1-R 250 400 500 300 175 200 150 125 100 75 100 50 75 25 50 25 12 12 equivalent 25 to

CE

ML2B C J G5-S CV MVGQ Power supply voltage 12 to 24 VDC Abundant stroke variations Improved noise resistance CC RB Series Variations J System Configuration Series CE1 Standard stroke (mm) Series CEP1 Standard stroke (mm) Bore size (mm) Manufacturable stroke range Bore size (mm) DExtension cable Series CE1-R 250 400 500 300 175 200 150 125 100 75 100 50 75 25 50 25 12 12 equivalent 25 to

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Valve model Pilot valve model Note) VQZ115-L VQ110-M Note) For the special voltages, please consult with SMC. VQZ115-M VQ110-L 4-14-41

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Note) For the special voltages, please consult with SMC.

Compact

45 L 15 50 CQ-M3 x 50 L 20 55 CQ-M3 x 55 L 25 60 CQ-M3 x 60 L 30 65 CQ-M3 x 65 L 35 70 CQ-M3 x 70 L 40 75 CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

65 40 45 50 55 60 65 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M5 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L

51

st 75 st or more D-B59W 15 st or more 20 to 74 st 75 st or more Other than the applicable auto switches listed in How to Order, the following auto switches are mountable.

KJ

T VMG Union Y P. 60 KCU Use to branch line in the same direction. 2 branched ports has a self-seal function. Check adaptor P. 60 KCJ Use to add the selfseal mechanism to the usual One-touch fittings, Series KQ. Bulkhead union P. 60 KCE Use to connect tubes through a panel. One of two ports has a self-seal function.

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

Digital Gap Checker

0.20 0.15 mm 0.3 mm 0.03 mm 0.30 0.03 0.15 0.20 0.02 0.10 0.01 mm 0.10 0.01 0.05 0.05 mm 0.02 mm 0 0 0 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Piping length: 5 m Piping length: 5 m Piping length: 5 m Reference pressure 0.06 Reference pressure 0.30 Reference pressure 0.60 The distance