Table of Contents

62 50 38 62 50 38 R2 R1 P R1 R2 P Indicator light Indicator light Mounting hole 2-6.5 42.5 42.5 2-6.5 42.5 42.5 Mounting hole G1/2 (Cable 8 to 10) G1/2 (Cable 8 to 10) 137.5 137.5 125.5 125.5 93 93 25 (X port) 25(X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 1/8 2-3/8 1/4, 3/8 X (PE) port 1/8 R1, R2 port 2-3/8 P Port 1/4, 3/8 X(PE) port P port 3-10-8 9 ISO Standard Solenoid Valve: Size

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

Table of Contents

Applicable cylinder bore size (mm) Model Metric size Inch size 1 8" 3.2 4 6 8 10 12 5 32 " 3 16 " 1 4" 5 16 " 3 8" 1 2" AS1001F 6,10, 16, 20 AS2001F 20, 25, 32 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS2051F 20, 25, 32, 40 AS3001F 40, 50, 63 AS4001F

CM2

12 B B 0() 0() 1(0) 6 B 5(3) 5(3) 6(4) 11 Hs 22.5 25 28.5 32.5 A 7(5) 7(5) 8(6) 13 A Hs 25 27.5 31 35 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A (mm) 20 25 32 40 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 2.5(0.5) 7.5 1.5(0) 3.5(1.5) 8.5 6.5 ( ): Denotes the values with air cushion.

•

c 0 ZPY401 40 43 lB.5 29S 465 25 ~ 1 5 615 6.5 3.3 N41 :.:::') 1 4.5 1.8 ZPY5O!' 53 5 50 19. 295 <7 5 7S.5 6'l5 7.5 3.8 . . 1 012 12 22 13 15 12 22 38 ~ 64 3 1.7 N4( fS:)145 5 1.8 38 20 68 25 64 3 1.8 38.5 64.S 3.5 1.2 ~ i 1 65 7 2.5 ZPY10D 10 12 15 25 .

ZP

Form w 1 Material e Vacuum inlet B2 10 25 2.5 Construction p. 117 13 27.5 16 29 20 32.5 4 25 33 32 38 10 Adapter Assembly p. 121 B5 M5 x 0.8 5 8 25 2.5 13 27.5 16 29 20 32.5 4 25 33 32 38 40 47.5 4.9 12 50 51.5 20 M6 x 1 6 8 B6 N S U F GN GS ZP T B 38.5 3.5 M8 x 1.25 8 12 25 39 32 44 40 47.5 6.6 50 51.5 10 B8 31 2.5 13 33.5 16 35 20 38.5 3.5 25 39 32 44 40 47.5 7 50 51.5 Rc1/8 NPT1/8 NPTF1

MXQ

(L)-X12 25 43.5 B C MXQ-AT16(L) 5 24.5 MXQ16(L) J M10 x 1 M5 x 12 MXQ-AT16(L)-X11 15 33.5 35.5 20 12 17 14 5 34.5 MXQ-AT16(L)-X12 25 44.5 A K MXQ-AT20(L) 5 27.5 MXQ20(L) MXQ-AT20(L)-X11 M5 x 14 15 M12 x 1.25 41 44.5 25 13 37.5 23 17 6 MXQ-AT20(L)-X12 25 47.5 MXQ-AT25(L) 5 32.5 MXQ25(L) M14 x 1.5 M6 x 18 MXQ-AT25(L)-X11 15 42.5 49 53.5 31 15 28 19 6 MXQ-AT25(L)-X12 25 52.5 1) Size of hexagon

V100

mA), Holding 0.5 VA (5 mA) 100 VAC Inrush 0.55 VA (5 mA), Holding 0.55 VA (5 mA) 110 VAC Inrush 1.0 VA (5 mA), Holding 1.0 VA (5 mA) 200 VAC Inrush 1.1 VA (5 mA), Holding 1.1 VA (5 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.

Stability of suction position,

5 5 26.5 44.1 69.1 25 M5 x 0.8/ Effective thread depth 5 23 40.6 65.6 25 5 5 M5 x 0.8/ Effective thread depth 5 21 38.6 63.6 25 5 5 M10 x 1 M10 x 1 M10 x 1 Seal washer Seal washer A A A A A A Seal washer 31 40 31 34.5 7 38 32.5 10 5 35 32 23.3 6 Width across flats 6 44 40 29.4 6 54 50 37 6 Width across flats 6 Width across flats 6 A-A A-A A-A 22 22 22 19 19 19 34.6 61.1 86.1 25 9.5 9.5 9.5

SQ1000/2000

A 15 3 () 3 4 5 6 7 8 9 10 11 12 13 Station 5 16 17 18 19 20 21 22 23 24 25 SOL. B 16 () SOL. A 4 () Station 6 SOL. B 17 () SOL. A 5 () Station 7 SOL. B 18 () SOL. A 6 () Station 8 SOL.

Proposals for Energy Saving

39.5 20 25 32 40 50 63 80 100 30.5 (40.5) 40.5 36 (46) 46 43.5 (53.5) 53.5 53 (63) 63 Bore size (mm) L1 O N Q Th9 L G1 4.5 5 6.5 7 8 8 10 12 19 (20.5) 21 20.5 Note 3) 9.5 10 12 17 18 18 20 22 5 5 5 5 5 20 25 32 40 50 63 80 100 9 depth 7 9 depth 7 9 depth 7 9 depth 7 11 depth 8 14 depth 10.5 17.5 depth 13.5 17.5 depth 13.5 5.5 5.5 5.5 5.5 6.6 9 11 11 11 0 0.052 0 0.062 0 0.062 0 0.062

0.4

VF VP4 Cylinder port SUP port EXH VQ 1/2 2, 4 (A, B) 1, 3 (P, R) VQ 4/5 VQC 1/2 VQC 1/2 25-core cable 26 pins VQC 4/5 25 pins 26 pins 20 pins IP67 compliant IP67 compliant IP67 compliant VQZ SQ VFS VFR VQ7 C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C8 (8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C10 (10) C4 (4) C6 (6) C8 (8) N11 (3/8") In case of branch type C12 (12) N13 (1/2") N3 (5/32") N7

CL

25 32 36 40 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/5 Stroke 1/5 Stroke 1/5 Stroke 368.5 377 415 391.5 400 436 3.1-62 World Wide QS\E Support...

Table of Contents

25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

LX

(5) Cable length 2000 2-M3 x 0.5 depth 5 17.5 18.5 10 20 (5) 62 72 (15) 8 5 22 1 0.2 35 25 22 Home position switch Cable length 200 Connector 1.5 [5.5] 25 (4) Refer to page 100 for connection cables.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

5 6 6 6 6 No. 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

42

Note Option mounting diagram Single valve AXT632-25-4 (M4 x 50) 4 Valve 0 Blanking plate (VVQ5000-10A1 5) AXT632-25-8 (M4 x 17) 4 For manifold Blanking plate Valve + Individual SUP spacer (VVQ5000-P1 5 -03 04) q AXT632-25-5 (M4 x 82) 4 For manifold w AXT632-25-10 (M4 x 34) 2 Valve + Individual EXH spacer (VVQ5000-R1 5 03 04) q AXT632-25-5 (M4 x 82) 4 For manifold w AXT632-25-10 (M4 x 34)

Integrated Controller

10 15 0 5 10 15 20 25 0 1 2 3 4 5 6 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L8 [mm] L8 [mm] L8 [mm] L8 [mm] 600 600 600 600 Z 400 400 400 400 Mep m 200 200 200 200 0 0 0 5 10 15 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 6 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting

CXS

M3 x 0.5 through 25 0.2 4 ST 5 + ST 9 + ST 32 + ST 42 + ST Part no.

High Purity Fluoropolymer

Applicable tubing size Connection tubing size Class 1 2 3 4 5 6 Symbol Connection tubing size Class 1 2 3 4 5 6 Symbol Inch sizes Metric sizes Class 03 05 07 11 13 19 25 03 04 06 08 10 12 19 25 1/8" x 0.086" 3/16" x 0.127" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 0.886" 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22.5 Symbol 1 2 3 4 5 6 LQ2 2 3 4 5 LQ1 11 12 13 14 15