Thermo-con/Rack Mount Type

Model Air flow [m3/min] Heat generation [W] HECR002-A 2 600 HECR004-A 5 1300 HECR006-A 5 1400 HECR008-A 7 1700 HECR010-A 7 2500 HECR008-W 0.2 200 HECR012-W 0.4 250 Operating Environment/Storage Environment Warning Facility Water Caution 1. Keep within the specified ambient temperature and humidity range.

CQS

Cylinder stroke (mm) Long stroke (mm) 35, 40, 45, 50, 75, 100 Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30 Action D Double acting 12, 16 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

VZ100/300/500

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Pitch) n-Rc 1/8 (A port) (Pitch) (A port) Port size Stations n L1 L2 20 340 331 L1 L2 63 54 80 71 97 88 114 105 131 122 148 139 165 156 182 173 199 190 216 207 233 224 250 241 267 258 284 275 301 292 318 309 335 326 352 343 369 360 19 324 315 18 308

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

Sine Rodless Cylinder Series REBR Direct Mount Type

, 300, 350, 400 450, 500 15 1000 750 25 32 200, 250, 300, 350, 400, 450 500, 600, 700, 800 2000 1500 Note) Intermediate strokes can be arranged in 1mm increments.

Process Valve

150 180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 100 105 120 36 42 54 12 12 14 251.1 266.6 290.6 292.5 308 332 32 40 50 573 A VNB Series Specific Product Precautions Be sure to read this before handling the products.

High Vacuum Angle Valve

800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

CE2

15 40 59 106 + 0.070 0 + 0.3 + 0.1 0.032 0.059 -X 31.5 297 192 20 25 140 61 403 119 130 28 13.5 102 20 160 18 48 76 112.5 + 0.084 0 + 0.3 + 0.1 0.040 0.073 35.5 309 214 25 25 162 64 430 133 150 36 13.5 116 25 180 18 58 92 139.5 + 0.084 0 + 0.3 + 0.1 0.040 0.073 20Mounting Bracket Part No.

Table of Contents

Construction. 112 112 114 115 119 120 120 122 125 127 127 128 128 130 130 133 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 135 135 136 138 144 139 145 145 145 146 146 147 147 149 151 156 157 158 158 159 159 160 162 164 165 166 169 182 182 183 183 186 187 191 199

Suction Filter with Case FH99 Series

140 115 218 150 60 90 77.8 42.9 42.9 77.8 21.5 10 21.5 2B 2 1/2B M16 x 2 Thread depth 34 M16 x 2 Thread depth 34 300 170 150 268 180 80 120 106.4 61.9 61.9 106.4 21.5 10 21.5 3B 3 1/2B M16 x 2 Thread depth 30 M16 x 2 Thread depth 30 280 145 140 273 210 80 120 130 78 78 130 20 5 20 4B Weight (kg) S T U V W X Model Threaded without flange With flange FH990-04 FH990-06 FH990-08 FH990-10 FH990

HRX-OM-W032

Setting of response delay time Setting range: 0 to 250 ms to Setting/Checking: Communication range (simple communication protocol) 27. Press the [SEL] key once. Setting screen of communication range (simple communication protocol) is displayed on the digital display. PV SV 28. Set communication range (simple communication protocol) with [] key or [] key, and press [SEL] key to enter.

Clean Gas Filter

Part No.: SFB100-02X8 002 Part No.: SFB200-02-S -X40 V Specifications Fluid Air Nominal filtration Operating pressure Max. 0.99 MPa Nominal filtration m Note 1) Rated flow rate L/min (ANR) Note 2) Symbol 001 002 005 010 020 040 070 100 Max. operating temperature 80C O-ring 1 2 5 10 20 40 70 100 5 10 15 30 50 80 130 250 Element proof differential pressure Symbol N V T Material NBR FKM PTFE

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

MXS Series Air Slide Table

75 MXS25-50 MXS25-40 MXS25-30 MXS25-20 MXS25-10 0.06 MXS25-125 MXS25-100 MXS25-125 MXS25-150 MXS25-100 0.04 0.030 0.05 MXS2575 MXS2575 Table deflection mm Table deflection mm Table deflection mm 0.025 MXS2540 MXS2550 0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 0.01 0.01 0.005 0 100 200 300 400 0 100 200 300 400 50 100 150 200 250

Booster Regulator Series VBA1110 to 4200 1

Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

VNB

150 180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 100 105 120 36 42 54 12 12 14 244 259.5 283.5 256.5 272 296 300.5 316 340 303.5 319 343 310.5 326 350 32 40 50 17-4-18 7 Series VNB Process Valve: 2 Port Valve For Flow Control Precautions Be sure to read before handling.

IDG

20C IDG1 IDG5 IDG10 IDG20 IDG30 IDG50 IDG60 IDG75 IDG100 IDG3 IDG1 Fluid Compressed air Inlet air pressure (MPa) 0.3 to 0.85 0.3 to 1.0 Range of operating conditions Inlet air temperature (C) (1) 5 to 55 Ambient temperature (C) 5 to 50 5 to 55 IDG10 5 to 50 JIS Symbol Outlet air atmospheric pressure dew point (C) Standard performance 20 Inlet air flow rate (l/min(ANR))(2) 12.5 625 62 125 250

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

M12 x 1.75 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 20 (3/4B) 0 250 73 330 177 120 65 12.9 124 155 2 x M10 x 1.5 18 25 (1B) 32 (1 1/4B) 0 50 342 87 435 255 125 65 124 19.8 180 4 x M12 x 1.75 22 40 (1 1/2B) 50 (2B) 0 60 450 94 545 356 145 75 29 144 200 4 x M12 x 1.75 22 Note) Tapered female thread conforming to JIS B 0203 is compatible.

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic