High Vacuum Angle Valve Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95
) M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): SYJ5220-L-M5 M plug connector (M): SYJ5220-M-M5 DIN terminal (D): SYJ5220-D-M5 M8 connector (WO): SYJ5220-WO-M5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107 [111.4] 3 3 3 3 87.4 [91.8] 105.2 125.2 90.4
87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn
(20) (port B) 16 (20) (port A) 16 (20) (port B) Manual override A B A B B PB B PB 75 (86) 62 (72) 108.5 (121.5) 141 (154) 153 (166) 75 (86) 62 (72) 50 38 50 38 Indicator light PA PA R2 R1 P R2 R1 P Indicator light 49 (64) 49 (64) 2-7.5 Mounting hole 2-7.5 Mounting hole 49 (64) 49 (64) G1/2 (cable 6.8 to 10) G1/2 (cable 6.8 to 10) 153 (166) 141 (154) 108.5 (121.5) 50 (63) 5 3 38 (53) 32 (42
(for Heavy-duty) Adapter assembly model Applicable pad model Series ZP Page ZP40HB ZP50HB ZP40H ZP50H ZPA-T1-B P. 75 ZP63HB ZP80HB ZP63H ZP80H ZPA-T2-B P. 75 ZP100HB ZP125HB ZP100H ZP125H ZPA-T3-B P. 75 ZP40HB ZP50HB ZP40H ZP50H ZPA-T101 P. 75 ZP63HB ZP80HB ZP63H ZP80H ZPA-T201 P. 75 ZP100HB ZP125HB ZP100H ZP125H ZPA-T301 P. 75 ZP40HB ZP50HB ZP40H ZP50H ZPA-X101-B P. 76 ZP63HB ZP80HB ZP63H
GR GQ H1 I 18 13 38 93 1/8 56.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 20 to 200 15.5 to 200 22 17 45 103 1/8 66 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 20 to 300 19.5 to 300 22 17 45 104 1/8 67.5 20 12 18 2 97 10 25 6.5 9 7 10 6 38 20 to 300 19.5 to 300 30 19 52 112 1/8 75 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 301 to 500 20 to 300 301 to 500 27 to 300 (mm) Bore size (mm) 20 25 32 40 P
)(B port) 16(20)(A port) 16(20)(B port) 16(20)(A port) Manual override Manual override A B PB A B PB 75(86) 62(72) 75(86) 62(72) 50 38 38 50 B B PA R1 R2 P Indicator light PA Indicator light R1 R2 P 49(64) 49(64) Mounting hole 2-6.5 Mounting hole 2-6.5 49(64) 49(64) G1/2 (Cable 8 to 10) G1/2 (Cable 8 to 10) 153(166) 153(166) 141(154) 108.5(121.5) 141(154) 108.5(121.5) 50(63) 50(63) 5 3 38
40 90 63 43 14 18.5 215 35 35 to 1200 + 0.100 0 0.1 0.3 (mm) Bore size (mm) GR J K KA L M MA MM N P Q R RR S T U V VA H Z ZZ 125 140 160 30 M14 x 1.5 15 31 65 19 M12 x 1.75 M30 x 1.5 35 1/2 85.5 25 29 303 87.5 35 20 23 110 478 507 30 M14 x 1.5 15 31 75 19 M12 x 1.75 M30 x 1.5 35 1/2 93.5 25 32 343 95 40 20 28 110 528 560 35 M16 x 1.5 17 36 80 22 M12 x 1.75 M36 x 1.5 39 3/4 104 25 36 396
VV4Z1 05 20 1 VP VG Option Thread type 02 2 stations A port F: With foot bracket VP Nil Rc G NPT 00F 20 20 stations R port 00N S070 Rc NPTF 00T VQ P port Rc Bracket is not mounted.
-Z-X2071 CKQ CLKQ Extended Retracted 95.5 115 98.5 118 121.5 146.5 122.5 147.5 115.5 145 118.5 148 141.5 176.5 142.5 177.5 162 201 165 204 222 291 225 294 72 72 73 73 81.5 81.5 75 75 23.5 43 25.5 45 40 65 47.5 72.5 20 Extended M With arm CK CLK Retracted 25 20H7 (Arm side I.D
than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63 MGTL 199
24 j 12 15 a 20 24 0 l3 14 16 Bore Model GKM10-20A GKM12-24A Thread d3 M10 x 1.5 M12 x 1.75 h 43 50 d6 20 30 b3 b1 14 16 l 20 22 d7 19 22 Bore 32 40 Model KJ10DA KJ12DA dH71 10 12 32 40 10.5 12 13 13 CS1 C76 C85 C95 Floating joint/Series JA JA25/40 CP95 NCM NCA D-X 20(mm) Data M Max. operating tension and compression power kgf (KN) Maximum screwed depth P Allowable eccentricity U A B D E
, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) (mm) a 20 24 j 12 15 c 20 24 g 18 23 f 10 12 d 40 48 b 10 12 Thread e M10 x 1.5 M12 x 1.75 0 l3 14 16 Model GKM10-20A GKM12-24A h 43 50 d6 20 30 b3 b1 14 16 l 20 22 d7 19 22 Thread d3 M10 x 1.5 M12 x 1.75 Bore 32 40 Model KJ10DA KJ12DA Bore
50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.! 734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirens , Pad Diameters @2 . s4 .
50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.! 734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirensio Pad Diameters @2 . s4 .
1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)
psig (0.52 MPa) 25 MPa (0.17MPa) Inlet pressure: 50 psig (0.34 MPa) AZ1300 150 psig (1.0 MPa) 75 psig (0.52 MPa) Inlet pressure: 100 psig (0.69 MPa) 40 0.28 140 0.97 35 0.24 120 0.83 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 30 0.21 100 0.69 25 0.17 80 0.55 20 0.14 60 0.41 15 0.10 40 0.28 10 0.07 20 0.14 5 0.03 0 0.00 0 0.00 0 100 200
(Bracket for centralized lead wire) 28 46 14 16 16 20 19 8 (1.6) 5.5 6 12 22 60 48 2 x 3 6.5 2 x 3.4 4 19.2 2 x 5.5 2 20 ISA3 Series Error Indication Main screen Name Description Measures Supply rated pressure (100 kPa to 200 kPa).
E s .9 6 5 o 25 50 75 Inpul siqnal (%F.s.) l 25 50 75 Inpul signal (%F.S.)