Auto Switch Guide

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Profile Design ISO/VDMA Air Cylinder Series CP95

Bore stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 700 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 800 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600, 700, 800 1400 100 25, 50, 80, 100, 125, 160, 200,

PF2A/PF2W

Maximum measured Maximum measured Minimum measured Minimum measured Part no. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2 PF2A511--2 PF2A521--2 PF2A551--2 10 50 100 200 500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L8 = 16n + 118.5 100 Drawing shows a SC case.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L8 = 16n + 118.5 100 Drawing shows a SC case.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Movement MOD Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 2 1: Absolute 100 200 3000 3000 0 0 0 100 0 0 0.50 Note) The step data input range changes depending on the actuator model.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes [mm] Bore size [mm] Standard stroke [mm] 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Note) Intermediate strokes not listed above are produced upon receipt of order.

76

Note) Air flow capacity (scfm [ANR]) Applicable air compressor (kW) 50 Hz Model Power supply voltage (Frequency) Port size 60 Hz IDF1E 3.53 4.24 0.75 Single-phase 100 VAC (50 Hz) Single-phase 100/110 VAC (60 Hz) IDF2E 7.06 8.30 1.5 Rc3/8 IDF3E 11.3 13.1 2.2 IDF4E 18.4 20.1 3.7 Rc1/2 Single-phase 100/200 VAC (50 Hz) IDF6E 26.5 29.0 5.5 Single-phase 100/110 VAC, 200/220 VAC (60 Hz) IDF8E 43.1

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

AC Servo Motor Driver (Pulse input type/Positioning type)

PA05 100 100 Electronic gear numerator *3. PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter

3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter

3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter

T

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

Support Guide/11-LEFG Series

: S Step Motor (Servo/24 VDC) AC Servo Motor Servo Motor (24 VDC) LEC SS-T Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 LEC Y 11-LEFG16-S 11-LEFG25-S 11-LEFG32-S 11-LEFG40-S Motorless LAT LZ Weight LC3F2 Ball Screw Drive: S Step Motor (Servo/24 VDC) AC Servo Motor Servo Motor (24 VDC) Stroke [mm] Model 50 100 150 200 250 300 350 400 450

CNS

700 800 900 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-8-7 8 Cylinder with Lock Double Acting, Single Rod Series CNS 125, 140, 160 How to Order 125 125 100 100 Y7BW CDNS D CNS D L Without auto switch L With auto switch Number of auto switches Built-in magnet Port thread type Courtesy

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

200 300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s MY2C MY2 H/HT Maximum Load Mass Select the load mass from within the range of limits shown in the graphs.

Compact manifold regulator ARM5 Series

150 200 250 0 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1