ARM10/11

19.5 22 X 5 5 5.5 5 X 19 20 22 19 Y 20 23 26 20.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 14-4-37 20 Series ARM11A/B End Block Pressure Gauge ARM11E L Indication unit Part no.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

12 17.2 38.5 54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

SYJA3 20-M3-F The mounting bracket for the 2 position double solenoid and 3 position is supplied unattached.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female

HRX-OM-R005

Model number: HRS060-N-20 The transition connector from Rc to NPT is enclosed as an accessory. For NPT piping, be sure to use this connector. Model number: HRS060-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

pitch) 20 80 3.3 5.8 76 1.7 5.3 4-8H10 depth 19 110 110 Stroke + 165 T-slot 1 dimensions (Switch groove) 8 11.5 The body mounting reference plane should be used as a standard when mounting onto equipment.

Cylinder with Lock Series CLS

230 16 107 58 M14 x 1.5 to 1000 50 47 161 78 18 2 160 110 146 128 36 20 212 112 255 16 114 64 M14 x 1.5 to 1000 56 53 182 95 23 5 180 132 169 144 40 20 236 118 275 18.5 130 74 M16 x 1.5 to 1200 (mm) Bore size (mm) Stroke range (mm) 125 140 160 K KA M MM N P S W H ZZ 15 31 19 M30 x 1.5 35 1/2 98 110 332 to 1000 8 15 31 19 M30 x 1.5 35 1/2 98 110 338 to 1000 9 17 36 22 M36 x 1.5 39 3/4 106

High Power Cylinder Series RHC

I H1 MM D NB ND NE C Effective thread E E NF 10 N JD N JC 10 A K F NA S + Stroke F H WH B ZZ + Stroke (mm) A B C D E F GA GB H H1 H2 I Bore size (mm) Stroke range (mm) Effective thread length 26 8 5 44 47.5 53.5 16 14.5 10 18 40.5 32 15.5 200 to 700 20 31 8 6 48 49.5 56.5 16 18 12 22 45.5 36 19.5 200 to 700 25 38 9 6 51 51.5 55 19 18 12 22 51.5 44 19.5 200 to 1000 32 47 11 8 54.5 51.5 56

OMU0023

INP = 1 indicates that the target location has been reached. 18 Repeat steps 17-18 After settling time, the operation of step data No.20 is 19 completed. 66 - Caution If the direct operation parameters such as target position (Step Data No. 20) for D9103 to D9115 are changed using the "Direct Operation Step Data setting" function during direct operation, the changed parameters will not be

AC Servo Motor Driver (CC-Link Type)

Parameter Configuration using Setup software (MR Configurator2TM) . 18 5.1Setup software (MR Configurator2TM) . 18 5.1.1 Installation Method . 18 5.2 Basic driver set-up for Initial Test Drive . 18 5.2.1 Start up the Setup software (MR Configurator2TM) . 19 5.2.2 System Settings . 20 5.2.3 Model Selection . 20 5.2.4 Driver ON LINE Check . 21 5.2.5 Help Function . 21 5.3 Parameter Settings

CLK1

11 2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

One-touch Fittings Series KQ2

D1 D2 L M A Nylon Urethane M5, M6 KQ2S04 to 12 KQ2S16 M5 0.8 M6 1.0 KQ2S04-M5 KQ2S04-M6 KQ2S04-01S KQ2S06-M5 KQ2S06-M6 KQ2S06-01S KQ2S06-02S KQ2S08-01S KQ2S08-02S KQ2S08-03S KQ2S10-01S KQ2S10-02S KQ2S10-03S KQ2S10-04S KQ2S12-02S KQ2S12-03S KQ2S12-04S KQ2S16-03S KQ2S16-04S 2.7 2.8 8 3.3 3.4 9 15 12 11 24 18 12 19 35 23 18 30 42 34 15.6 14.1 19 16.4 15 20 20 24 19.5 21 26 21.5 21 20 27.5 22.5

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VV5FA5-20-051 1 pc. VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.

Clamp Cylinder with Lock Series CLK1

3 x 38l 17 30 30 17 20 20 2-M6 thread depth 11 2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

JXCx-OMT0061CN

CN4I/O . 19 (1) . 19 (2) . 20 5.4 CN5: . 20 6.

7

Grommet Port size P A B C E F I J K L D M T T T 55 (61) 126.5 (134.5) 74.5 (82.5) 82.5 (90.5) 69 (77) U 68.5 (74.5) U V U 107.5 (113.5) 29 60.5 (66.5) 5 C VXD2 3/4 27 64.5 52.5 30 30 71 20 4.5 17 51 32.5 38.5 35 6 D VXD2 1 29.5 67 55 32.5 33 35 95 22 4.5 20 59.5 45.5 49.5 42 Model Mounting bracket dimensions Port size P a b d e f 3/4 1 50.5 55.5 77.5 85.5 74 81 51 58 45.5 49.5 VXD2 VXD2

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

---M5 SYJ522M---M5 A port M5 x 0.8 Type 20 SS3YJ5--20-05 -Stations Bracket P, R port thread type + + + + Nil Nil 02 : 20 Rc G NPT NPTF 2 stations : 20 stations Without bracket Applicable blanking plate assembly SYJ500-10-1A R P 00F 00N 00T With bracket F P port 1/8 R port 1/8 Note) For more than 6 stations, supply air to both sides of P port and exhaust air from both sides of R port.

AC Servo Motor Driver (CC-Link Type)

Parameter Configuration using Setup software (MR Configurator2TM) . 18 5.1Setup software (MR Configurator2TM) . 18 5.1.1 Installation Method . 18 5.2 Basic driver set-up for Initial Test Drive . 18 5.2.1 Start up the Setup software (MR Configurator2TM) . 19 5.2.2 System Settings . 20 5.2.3 Model Selection . 20 5.2.4 Driver ON LINE Check . 21 5.2.5 Help Function . 21 5.3 Parameter Settings

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

2-M2 x 0.4 depth 3 For magnet mounting 4.7 2.5 6-M3 x 0.5 depth 4 15 15 L (mm) N MXP10-10 MXP10-20 SMXP10#1 (#1 + #3) SMXP10#2 (#2 + #4) L K J V H S Z G M W Model 20 20 52.4 44 32 10 60 8 21 6.5 40 MXP10-10 36 36 82.4 74 50 20 90 20 39 7.5 65 MXP10-20 9 Precision Air Slide Table Series MXP Dimensions MXP10/With Shock Absorber Z 3 2-M3 x 0.5 depth 5 V K 5 N M Stroke: S Max. 19 MXP10-10B

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)