Modular F.R.L. Units

D*7 N.O. (Normally open) Drain port is open when pressure is not applied.

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 11 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: External Pilot, A, B Port: NPT1/4, Mounting Method: -

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 11 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: R (External Pilot), A, B Port: N9 (5/16" One-touch Fitting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 11 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: R (External Pilot), A, B Port: N7 (1/4" One-touch Fitting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 11 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: R (External Pilot), A, B Port: N11 (3/8" One-touch Fitting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 11 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: R (External Pilot), A, B Port: N7 (1/4" One-touch Fitting)

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 11 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: External Pilot, A, B Port: 5/16" One-touch Fitting, Mounting Method: -

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 11 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: External Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: -

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 11 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: External Pilot, A, B Port: ø8 One-touch Fitting, Mounting Method: -

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 11 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: External Pilot, A, B Port: 3/8" One-touch Fitting, Mounting Method: -

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 11 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: External Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: -

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 11 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: R (External Pilot), A, B Port: 02N (NPT1/4)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 11 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: R (External Pilot), A, B Port: C8 (ø8 One-touch Fitting)

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 Piping adapter ZS-46-N1 NPT1/8 Piping adapter ZS-46-N2 9 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20

MHZ2/MHZJ2

Mounting Type D-Y59 , D-Y69 , D-Y7P(V) A B A B Auto Switch Specifications Grommet D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y59B D-Y7P D-Y7PV D-Y69A D-Y59A Perpendicular D-Y69B Auto switch part no.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

PSE200

Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

V100

) (D, Y) VS N.C.

0.4

or D.