Stations: 3 Stations, AB Port: 03L (3/8, Left), Thread: F (G), Control: None, PR Port: 06B (3/4, Both Sides), PR Thread: F (G)

Stations: 3 Stations, AB Port: 04L (1/2, Left), Thread: F (G), Control: None, PR Port: 06B (3/4, Both Sides), PR Thread: F (G)

Stations: 4 Stations, AB Port: 03L (3/8, Left), Thread: F (G), Control: None, PR Port: 06B (3/4, Both Sides), PR Thread: F (G)

Stations: 9 Stations, AB Port: 04R (1/2, Right), Thread: Rc, Control: None, PR Port: 06B (3/4, Both Sides)

Stations: 1 Station, AB Port: 04Y (1/2, Bottom), Thread: Rc, Control: None, PR Port: 06B (3/4, Both Sides), PR Thread: Rc, Silencer: SB (Silencer Box)

Stations: 7 Stations, AB Port: 04L (1/2, Left), Thread: F (G), Control: None, PR Port: 06B (3/4, Both Sides), PR Thread: F (G)

This is a legacy product, and replaced byVHS50-06B-X1, VALVE, 3 PORT LOCK OUT, VALVE, VHS HAND VALVE, LA, VHS BODY PT >3/4, 1.90695 lb

Stations: 5 Stations, A, B Port: 06B (Side/Bottom, Side Plugged 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 10 (1), P, R Port Location: U Side, Thread: T (NPTF)

Stations: 9 Stations, A, B Port: 06B (Side/Bottom, Side Plugged 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 10 (1), P, R Port Location: U Side, Thread: T (NPTF)

Stations: 8 Stations, A, B Port: 06B (Side/Bottom, Side Plugged 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 10 (1), P, R Port Location: D Side, Thread: F (G)

Stations: 8 Stations, A, B Port: 06B (Side/Bottom, Side Plugged 3/4), SI Unit: 0 (w/o SI Unit), P, R Port Size: 10 (1), P, R Port Location: D Side, Thread: F (G)

Stations: 3 Stations, A, B Port: 06B (Side/Bottom, Side Plugged 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 10 (1), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 7 Stations, A, B Port: 06B (Side/Bottom, Side Plugged 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 10 (1), P, R Port Location: D Side, Thread: T (NPTF)

Table of Contents

Output specifications Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Voltage output type 1 to 5 V Current output type 4 to 20 mA Nil 28 C2 Note 1) Current output type cannot be connected to the Series PSE300.

XL

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

C2 PSE56 0 01 Option Port size 01 02 C01 N01 N02 A2 B2 R 1/8 (with M5 female thread) R 1/4 (with M5 female thread) Rc 1/8 NPT 1/8 (with M5 female thread) NPT 1/4 (with M5 female thread) URJ 1/4 TSJ 1/4 Note Description Part no. Connector for pressure sensor controller ZS-28-C 1 pc. Output specifications Adapter with throttle Rc 1/4 ZS-31-X175 1 pc.

Electric Actuator

Select D for the vacuum port for suction of 50 L/min (ANR) or more. ( Cable length Note 3) I/O connector 0 Cable type Note 1) Note 2) + Driver type Nil S R Nil 2 5 A Nil H Without connector Without cable Standard cable Robotic cable (Flexible cable) Without cable 2 m 5 m 10 m Power supply voltage (V) Compatible drivers 25 32 Size 40 ) ) ) ) ) ) ) ) ) With connector Nil A1 A2 B1 B2 C1 C2

Mechanically Jointed Rodless Cylinders

Application Application Mounting direction w (to minimize the installation width) Work piece Mounting direction q (to minimize the installation height) Work piece Guide Guide Series MY3 Series MY3 Floating mechanism Bracket Floating mechanism Bracket Mounting Example Mounting Example G G D1 D2 Za2 Za1 Ea Ea Ea Ea C1 C2 K2 (Screw length) B2 F2 B1 F1 K1 (Screw length) Detail drawing of Za2

EX500-GPR1A.eng

To the communication connector ( C2 ) or ( 1 ) of SI unit, connect the branch cable with M12 connector from GW. To the communication connector ( C1 ) or ( 0 ), connect the branch cable with M12 connector from Input unit. To the communication connector of Input unit, connect the branch cable with M12 connector from SI unit.