KR

(mm) Note) L P D Nylon Urethane 2-applicable tubing KGU04-01 KGU04-M5 4 11 20 12 11 21 34 M5 x 0.8 10.4 36 38 40 39.5 42 46 42.5 45.5 49 51 52.5 55.5 56.5 2.2 2.2 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 58.5 59 60.5 M5 x 0.8 13 1 8 1 4 3 8 1 8 17 12.8 12.8 6 13.4 10.6 14 17 25.6 17.7 15 23 35

SMC Pneumatic Clean Series

-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note) Consult SMC for long stroke.

CG1

46 (247+l) 281.5+l 223+l (237+l) 214 (228) 272.5 80 11 110 64 IY-G08 72 85 45 (286.5) (295.5+l) 307.5+l 231+l (245+l) 222 (236) 298.5 100 12 130 72 IY-G10 93 100 60 (312.5) (321.5+l) Note 1) ( ): Long stroke Note 2) Refer to p.1.6-11 for pivot bracket.

Vacuum Pad

11 1.8 6 4.5 4 1.8 1.2 0.8 6.5 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) Non-rotating (J) Rotating (K) A B D A B D Model Model Rotating (K) Non-rotating (J) ZP3-Y04UM:3-B5 ZP3-Y04UM:6-B5 ZP3-Y04UM:10-B5 ZP3-Y06UM:3-B5 ZP3-Y06UM:6-B5 ZP3-Y06UM:10-B5 12.2 13.4 15.4 12.2 13.4 15.4 22.5 25 29 40 46 56 11 14.5 20.5 12.8 14.2 16.6 22.5 25 29 40 46 56 11 14.5 20.5 12.8

C95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 7 8 11 10 38 51 10 21 18 26 31 32 10 6.6 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 11 12 15 12 50 65 12 33 30 32 45 45 12 9 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 12.5 14

Refrigerated Air Dryers

Finalize the model number. 7 Refer to pages 7, 11, 14, 19. Refer to pages 22 and 25.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Direct Operated Pilot Operated Refer to pages 7, 9, 11, 25, 35, and 39 for details. 2-Port Solenoid Valve Improved environmental resistance due to the stainless steel coil cover [IP67 enclosure] Refer to pages 46 to 50 for details.

Vacuum

40 7.5 7 6 Deptt 6 5 1 2 5 15.5 78.5 29 5 M4 x 0.7 6 M O x I O I 20 5.5 I 46 I 9.5 Deptf 8 '13.519.5 89 tlictD!

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

MXS

11 24 27 34 42 MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 A3 13 13 26 30 36 44 A4 16 20 25 31 38 46 A5 16 20 25 31 38 46 A6 6 7.5 8.5 10 14.5 19 A2 6 7.5 8.5 10 14.5 19 MXP MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 Allowable moment coefficient: Graph 2 MG 1.0 MGP 0.7 Allowable moment coefient: MGQ 0.5 Max. allowable moment: Mmax (Nm) Table 4 0.4 MGG Stroke (mm) 100 Model 10 0.7 2.0 4.2 11.3 19.4 30.6

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MRQ DBasic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) 20DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

CXS

Internal circuits D-Y7NW(V) Weights DC(+) Brown [Red] (g) Main circuit of switch OUT Black [White] Lead wire length Auto switch part no. 3m 0.5m 54 11 D-Y7NW, D-Y7NWV, D-Y7PW, D-Y7PWV DC() Blue [Black] 54 11 D-Y7BW, D-Y7BWV Dimensions D-Y7PW(V) D-Y7NW, D-Y7PW D-Y7BW M2.5 x 4 Slotted set screw DC(+) Brown [Red] 2.5 Indicator light Main circuit of switch 3.4 OUT Black [White] SMC SMC 6.2 5

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

Speed Controller with Indicator

AS301FS, AS311FS AS401FS, AS411FS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 06, 07 1000 500 500 0 0 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Note) The numbers above the flow rate characteristic curves in the charts show the applicable tubing

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

cable -# L 33 4.8 10.7 11 Terminating connector for -@ LEC CYRM * LEC-CYRM is JEPMC-W6022-E manufactured by YASKAWA CONTROLS CO., LTD. 19 16 46 774 AC Servo Motor Driver LECY M U Series Options LEF USB cable LEJ PC LECYM2 LECYU2 LEL Drivers Setup software (SigmaWin+TM) (LECYM/LECYU common) LEM * Please download the SigmaWin+TM via our website.

Series KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Series SV

SX5000-57-6 SX3000-146-2 SX5000-138-1 SV2000-55-1SV2000-55-2A SV2000-21-1 (M3 x 30) VZ1000-11-1SV1000-69A SX7000-57-5 SX3000-146-2 SV3000-65-1 SV3000-55-1SV3000-55-2A SV3000-21-1 (M4 x 35) VZ1000-11-4SV3000-69A SX3000-57-4 SX3000-146-2 SX3000-181-1 SV1000-55-1SV1000-55-2-1 SX3000-22-2 (M2 x 24) VZ1000-11-1SV1000-69A SY9000-11-2 SX3000-146-2 SV4000-65-1 SV4000-55-1SV4000-55-2A SV2000-21-2

SX

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.