Stroke Reading Cylinder and Counter

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

HRX-OM-W060

HRX-OM-W060 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

HRX-OM-M090

HRX-OM-M090 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.3.3 Types of hazard labels . 1-3 1.3.4 Locations of Hazard Labels . 1-4 1.4 Other Labels . 1-5 1.4.1 Product Label . 1-5 1.5 Safety Measures . 1-5 1.5.1 Safety

IDUS/IDFS

-1 2 The models IDF1E to 11E and IDU3E to 6E have been revised.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

x 10-6 Operating pressure Pa Main exhaust valve 14 45 80 160 200 Conductance l/s Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10{1 x 10-10} at ambient temperatures, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperatures, excluding gas permeation External Main exhaust valve 0.10 0.21 0.24 0.26 0.28 Operating time

Prevents Micro-Bubbles

68 22 55 18 8 42 57 5.5 48 96 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 Rc 3/4 NPT 3/4 LVA5 58 75 84 26 68 27.5 8 56 71 6.5 62 129 Rc 1 NPT 1 LVA6 58 75 84 32 77 27.5 8 56 71 6.5 71 117 138 17-5-22 20 Series LVA Manifolds Manifold Specifications LLA5A LLA4A LLA3A Model LLA2A Manifold type Stacking type VC P (IN), A (OUT) type Common IN/Individual OUT Valve stations 2 to 5 stations VDW 3/4 1/2 3/8 1

VQ7-6/7-8

size ISO size 2 Series VQ7-8 ISO size 2 0.96n + 0.77 (n: Stations) Max. 10 stations 3/8 1/2 1/2 3/4 3-10-27 28 Series VQ7-8 DIN Terminal Type VV72-2n-3/8, 1/2 118 142 67 9 118 142 9 34 20 2-1/8 14 Indicator light P , R1, R2 port for Rc 3/4 only U side U side 18 R4.5 60(73) P = 56 P = 56 60(73) 23 R4.5 Manual override B PA 18 42 14 1313 B A SMC SMC SMC B B B A PA B PA B A A B PA Courtesy

HRS100/150

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 32 BQ-2 BMU1-025 80 BQ-2 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

Thermo-chiller

0 Union (Size: 1/2 inch) Stainless steel 1 (197) !1 DI sensor piping assembly Stainless steel 1 !2 Mounting bracket 1 !3 DI filter inlet hose PVC 1 !4 DI filter outlet hose PVC 1 !5 Hose clamp 4 !6 Mounting screw (Size: M5) 2 !7 Cable tie holder 5 !8 Binding band 4 !

End Lock Cylinder Series CBG1

81 11 M6 x 0.75 10 5 1 6.5 15 123 +0.08 0 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12 5.5 1 7.5 24 123 +0.08 0 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14 6 1.25 8.5 24 144 +0.08 0 50 +0.08 0 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18 11.5 3 14.5 24 167 +0.08 0 80 10 22 M22 x 1.5 23 80 3/8 21 130 40

VQ7-6/7-8

(86) 62 (72) 75 (86) 62 (72) 50 PA R2 R1 P A B Indicator light 2-7.5 Mounting hole 2-Rc1/8 49 (64) 49 (64) (20) 18 18 (20) 5-Rc3/8, 1/2, 3/4 (P, A, B, R1, R2) 44 (58) 44 (58) G1/2 (cable 6.8 to 10) Bottom port drawing Rc1/8 Port Y (PE) 141 (154) 153 (166) SMC 108.5 (121.5) 23 (30) (ports A, B) Y 12 50 (63) 38 (53) 3 5 38 (53) 32 (42) 23 (30) 1 2-Rc3/8, 1/2, 3/4 Ports R1, R 2-Rc3/8, 1/2, 3

Rotary Actuator/Vane Type

[mm] [mm] Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 14 1 to 14 1 to 14 15 4 to 18 1.5 to 18 1.5 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 30 5 to 22 2 to 22 2 to 22 2 to 22 40 18 to 30 18 to 30 18 to 30 18 to 30 Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 14 1 to 14 1 to 14 15 4 to 18 1.5 to 18 1.5 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 30 5 to 22 2 to 22 2

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

-09S 18.5 44.8 5/16" 15.2 28.2 ASD430FG-N02-07S 17 43.9 1/4" 13.2 25.6 18 55 15 36.7 ASD430FG-N02-09S 34.9 34.6 29.6 17.5 18.5 41.7 39.9 11 18.5 46.5 5/16" NPT 1/4 15.2 28.2 ASD430FG-N02-11S 21 19.7 49.3 62 3/8" 18.5 31 ASD530FG-N02-07S 17 48.7 1/4" 13.2 25.6 20.3 76 41.9 ASD530FG-N02-09S 43.3 43 38 19 18.5 46.9 48.3 15.4 23 51.3 5/16" NPT 1/4 15.2 28.2 19.8 ASD530FG-N02-11S 21 23.1 54.1

Vacuum

3la 95 L,. , . 1 s : : High suction flow type 1 6 (400) High tlowBody poded Type -ta 3la 43 ZHl8DL 1 . 8 3la "/e 55 rl 95 Specif ications Ejector Symbol __-IR + I Max.

Vacuum

3la 95 L,. , . 1 s : : High suction flow type 1 6 (400) High tlowBody poded Type -ta 3la 43 ZHl8DL 1 . 8 3la "/e 55 rl 95 Specif ications Ejector Symbol __-IR + I Max.

42

D side Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC 461 VQ4000 Series Kit (Terminal block box kit) T 38 91 1/8" PE. port 18 18 17.2 PE 41.7 R1 R2 3 5 P 1 SMC 1/2" 1(P), 5(R1), 3(R2) port 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port M5 x 0.8 Ground screw 2 x G3/4 Conduit port 10.7 U side 129.5 126.5 3.5 163

•

Detecting rod assembly . 0.025 (8S-2) 18(Exclusive plug) 88-1 0.74+ 0.10 X 1 00/ 25 +0.28+0.4 + 0.025 = 1,845kgf Conc :litIOOS OUTside, supply pressure 5kgf/ cm ~, No-load (!)