SY

stations 2 to 20 stations 20 C44 C46 Note 1) An asterisk () indicates order made products.

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

39

1 12.5 R28 M8 x 1.25 8.5 1 12.5 R7 22 1 R28 8.5 22 20 R7 22 20 22 NAAMS code ACA031M ACA032M ACA033M ACA034M ACA035M ACA036M NAAMS code ACA043M ACA044M ACA045M ACA046M ACA047M ACA048M A B C D E F G H I J A B C D E F G H I J Part no.

ZP

/Port size Symbol Connection 2 to 8 10 to 16 40, 50 20 to 32 20 20 N4 4 Nylon tube 25 25 6 Nylon tube N6 Barb fitting 32 32 Vacuum entry 4 Urethane tube U4 40 40 6 Urethane tube U6 50 50 M5 x 0.8 A5 Male thread M6 x 1 A6 M8 x 1 A8 Pad type (Refer to Table (1) for applications.)

MG

80 10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) 8-19-16 Compact Guide Cylinder Series MGP Horizontal Mounting (Ball bushing bearing) (19) l = 50 mm, V = 400 m/s (20) l = 100 mm, V = 400 m/s MGPL12 to 25 5 MGPL12 to 25 5 25 25 25 25 25 25 MX Load weight m (kg) Load weight m (kg) MTS 20 20 20 20 20 20 MY 16 16 16 16 16 16 CY 1 1 MG Courtesy

CXS

400mm/s 2 20 50 CXSM CXSL CXSM CXSL 10 Weight m (kg) Weight m (kg) 10 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s 4 Graph V = up to 600mm/s 3 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph

SYJ300/500/700

VKF (A) 2 (A) 2 X X VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN 4-4-55 56 Series SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.

•

1", 85 MSXO.8 1 ' GN E leclcic NBIllf,1-"'6J B Bellows type M6 x l B6 16. 1 6 .. GS EIecbIC Silicon l'l.bba-(frl-l16) eo> "" 20-;'20 02-2 2~8 ";10 /16 /20 /32 .:,aiSO 04 4 B8 M8 X 1.25 '$'1'>32 ,,~ listO Pad Dia.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

27 32 32 37 37 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 10 (12) 10 (12) 10 (12) 10 (13) 12 (14) 12 (14) 16 (20) 16 (20) 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 0 0 0 23 23 20 20 20 114 (122) 119 (127) 121 (129) 130 (139) 150 (162) 150 (162) 182 (196) 182 (196) Up to

Bag Filter

FGF 1 20 E A X47 B Option Note 1) Note 1) Without pressure gauge/Without option: is not required to enter.

VFR

Material Description AXT335-1-11(M4 x 40) VF4000-20-1 VFR41 VF4000-20-1 VFR42 AXT335-1-11(M4 x 40) VF4000-20-1 VFR43/44/45 NBR Hexagon socket head screw Gasket o AXT335-1-11(M4 x 40) Refer to How to Order Pilot Valve Assembly on page 3-5-54. Refer to How to Order Sub-plate Assembly on page 3-5-55. Steel !0 !

Refrigerated Air dryer Series IDU/IDF

Rc 1 1/2 Rc 2 Rc 1/4 INA-20-41-04 Note 5) Refrigerated air dryer Air cooling aftercooler 59 66 70 100 to 200VAC 220 to 240VAC 62 85 83 115 114 160 170 185 194 Weight (kg) Auto drain Coating color Applicable compressor (screw type) kW Munsell 10Y8/0.5 (White) 11 15 22 37 55 75 Note 1) Select an air dryer according to the selection method and not the rated conditions.

SMC Electronic Switch Series Variations

Output Specifications 14 15 16 17 18 19 55 NPN Open Collector 30V, 80mA Model Output method Hysteresis Analog output Number of outputs Indicator light Trimmer adjustment PNP Open Collector 80mA 1 to 10% of set press. (Variable) 3% F.S. or less (Fixed) 1 to 10% of set prss. (Variable) 1 to 5V 1-10% of set press.

C95Series

Type Auto switch model Number of aulo switch "32 1 "40 1 "50 1 ~3 "80\."101 "32 "40 "50 ,,63 "80 \0'1 00 2IlCS (On dfferent DA5, [).A6 . lY:e.Of _~ ~qel 15 20 60 60 105 110 115 ~ ~ , pc. " 2 pes i?n_~.~ren\ 20 _ ~ ~C!r _ S!~ i!I~} a: D-A59W -25 60 70 65 11 0 115 120 1 pC. 15 .. I ~ .pa. (':'!." 15 . I~ _OJ ~I~) -25 60 70 65 11 0 115 120 OF5J5 1 pC. 10 :!

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Oil bowl B' C C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 10 Stainless steel High Vacuum Angle/In-line Valve Manual Valve/Bellows Seal Series XMH, XYH How to Order XMH XYH 16 25 Angle type In-line type 1 2 3 2.

Power Clamp Cylinder

1 2 3 4 5 6 7 8 9 10 11 12 13 80 0 5 10 15 20 25 30 35 40 45 50 55 60 Load capacity (N) Load capacity (pounds) 63 300 12.0 280 11.0 Distance from pivot point (inches) 260 Distance from pivot point (mm) 10.0 240 9.0 220 200 8.0 180 7.0 160 6.0 140 5.0 120 100 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 4.00 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 Load capacity (N) Load capacity

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

Auto Switch Guide

Grommet Band D-G5BAL 10-20-55 F7BAL 10-20-56 Grommet Rail F7BAVL Grommet D-F5BAL Tie-rod 10-20-57 D-F9BAL 10-20-58 Grommet Direct D-Y7BAL 10-20-59 D-G5NTL Band 10-20-60 Grommet D-F7NTL Rail 10-20-61 Grommet D-F5NTL Tie-rod 10-20-62 Grommet D-M5NTL/M5PTL Direct 10-20-63 Grommet Magnetic field resistance D-P5DWL 10-20-64 Rail Grommet Sensor section: Rail Amplifier section: DIN rail Heat resistant