KJ

41.5 42 46.5 47 48 34.5 36.5 34.5 37 35 40 36 41 41.5 43.5 45.5 46 1 8 17.5 2.5 15.5 10 9.6 Applicable tubing 1 4 1 8 5 32 18 3 16 10.4 10 1 4 1 8 1 4 3 16 11.4 19.5 3.5 16.5 10 1 8 1 4 3 8 13.2 20.5 4.6 17 1 4 10 1 8 1 4 3 8 5 16 15.2 23.5 6 18.5 12 Connection thread 97 55 59 55.5 55 55.5 54.5 52 52.5 1 4 17.46 3 8 1 2 3 8 25.5 7 17.9 21 17 22.23 64 64 1 4 9 17.46 54 3 8 1 2 21.7 28 22

Auto Switch Guide

Grommet Band D-G5BAL 10-20-55 F7BAL 10-20-56 Grommet Rail F7BAVL Grommet D-F5BAL Tie-rod 10-20-57 D-F9BAL 10-20-58 Grommet Direct D-Y7BAL 10-20-59 D-G5NTL Band 10-20-60 Grommet D-F7NTL Rail 10-20-61 Grommet D-F5NTL Tie-rod 10-20-62 Grommet D-M5NTL/M5PTL Direct 10-20-63 Grommet Magnetic field resistance D-P5DWL 10-20-64 Rail Grommet Sensor section: Rail Amplifier section: DIN rail Heat resistant

High Purity Fluoropolymer

4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 21 1/8" 25 11.5 10 10 Class 1 31.5 1/8" 35 16.5 14 15 14 L 29 1/4" H (A) W M 36.5 1/4" 1/4 42.5 23 19 20 17 (E) Port size 36 3/8" Class 2 to 5 R (NPT) 46 3/8" 52 28 23 24 21 44 1/2" M H 55 1/2" 62.5 39 32 29 26 53.5 3/4" 72 3/4" 25 1 81 49 46 39.5 36 71 1" Class 6 Inch sizes Connection threads Rc/NPT Model Applicable tubing O.D.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Class Size combination Applicable tubing size (mm) 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 Class Applicable tubing size (inch) 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/

MHZ

, MHZL2-10 No setting No setting No setting 0.4 MHZ2-16, MHZL2-16 (0.4) 0.4 MHW MHZ2-20, MHZL2-20 (0.4) No setting 0.4 0.5 1 0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

MHZ

, MHZL2-10 No setting No setting No setting 0.4 MHZ2-16, MHZL2-16 (0.4) 0.4 MHW MHZ2-20, MHZL2-20 (0.4) No setting 0.4 0.5 1 0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

CJ2

( ) 10 1 10 16 2 15 D-F7LF 1 15 Note 1) Cannot be mounted on 6 cylinder. 1.3-21 Series CJ2 Weight/Spring Return (S) Mounting Accessories/Refer to p.1.3-12 for details.

Stability of suction position,

Tube I.D. 9 10 8 7.5 6.5 6 Equivalent conductance [dm 3/(sbar)] B 4 5 2 4.5 4 ZP3 1 ZP3E ZP3E 0.6 3 2.5 0.4 2.18 ZP2 2 0.2 ZP2V 0.1 ZP 0.06 A ZPT ZPR 0.04 0.5 1 5 10 20 2 3 XT661 Tube length [m] How to read the graph Example: Tube size 8/6 and 1 meter length By extending leftward from the point at which the 1 meter tube length on the horizontal axis intersects the line

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

-Rc(PT)1/4 10 10 22 22 22 22 2-Rc(PT)1/4 31.5 18 18 31.5 (R1, R2 port) 63 63 [ ] for AC Other dimensions are the same as the grommet style

LEC-OM02904

SSCNET 7. 4 SSCNET 8 10 8 (2) 35 1. 2. 3. 4. 36 2 SSCNET (70ms ) 1. SSCNET 2. SSCNET (3.9 ) 3. SSCNET 4. 5. SSCNET SSCNET 2.43.9 6. SSCNET 37 1. 1 TM MR Configulator2 2. No.PA02 No.PA02 2 3. EEP-ROM 12 10 4. 3D No.PD16PD17 8 11 8 (2) 45 1. 55 0 55 2.

Applicable Auto Switch Model

7 47 35 D-A7/A7lH D-A8/A80H D-A9/A9lV 3 wire 3 wire 11 8 52 41 D-9 5 23 Reed switch D-A73C D-A80C 12 54 D-9lA 9 47 Reed switch 2 wire D-A79W 11 53 10 47 D-E7lA D-E8lA 2 wire 3 wire D-J7 11 50 11 55 3 wire 2 wire 13 57 9 49 D-Z7 D-Z8 Solid state switch D-F7 4 wire 3 wire 13 56 10 55 2 wire 1 D-J79C 13 52 9 50 3 wire color 10 53 D-Yl 2 wire 2 11 54 3 wire color 11 54 2 wire 14 53 D-M5 Solid

Auto Switch Guide

(Including bracket, screw) CLS Auto switch mounting screw M2.5 x 10 l (D-E7A/E8A) M2.5 x 12 l (D-M5/M5W/M5T) Applicable bore size (mm) 6 BP-1 10 BP-1 15 BP-1 CLQ Cylinder series CDJP-D 1. Insert the auto switch mounting nut into the auto switch mounting groove and then set the switch at the mounting position by sliding. 2.

Auto Switch Guide

(Including bracket, screw) CA2 Auto switch mounting screw M2.5 x 10 l (D-E7A/E8A) M2.5 x 12 l (D-M5/M5W/M5T) Applicable bore size (mm) 6 BP-1 10 BP-1 15 BP-1 CS1 Cylinder series CDJP-D 1. Insert the auto switch mounting nut into the auto switch mounting groove and then set the switch at the mounting position by sliding. 2.

OMR0032

Note 5) Cables are not included. 15 - 3.2 Parts description Details of the parts of the controller. (1) (2) (3) Remove the housing. (10) (8) (4) (5) ON (6) ON (7) OFF 1 2 3 4 5 6 (9) Pulse input signal switch (default) No.

REC

40 55 20 34.5 32 M10 x 1.25 Up to 1000 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 40 M14 x 1.5 Up to 1000 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 NN P S X Y Z ZZ Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 146 20 8 21 215 25 M26 x 1.5 Up to 700 1/8 146 20 8 25 219 32 M26 x 1.5 Up to 1000 1/8 159 20 8 25 232 40 M32 x 2 Up to

VM

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

Digital Flow Switches Series PF2A

set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse l/min, CFM x 10-2 l, ft3 x 10-2 l/min, CFM x 10-1 l, ft3 x 10-1 Display units Real-time flow rate Accumulated flow Note 1, 2) 0 to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption

ARM10/11

Metric size Inch size 1 2 3 4 5 6 7 8 9 M 1 station Elbow Straight Elbow OUT side IN side Straight 6 Elbow Straight Elbow OUT side IN side Straight 2 stations Symbol Symbol Note) 3 stations 8 10 6 8 10 4 6 4 6 1/4 5/16 3/8 1/4 5/16 3/8 5/32 1/4 5/32 1/4 4 stations 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80

ARM10/11

Metric size Inch size 1 2 3 4 5 6 7 8 9 M 1 station Elbow Straight Elbow OUT side IN side Straight 6 Elbow Straight Elbow OUT side IN side Straight 2 stations Symbol Symbol Note) 3 stations 8 10 6 8 10 4 6 4 6 1/4 5/16 3/8 1/4 5/16 3/8 5/32 1/4 5/32 1/4 4 stations 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1) 0.05 l/pulse 0.1 l/pulse 0.5 l/pulse l/min, gal(US)/min l, gal(US) Real-time flow rate Accumulated flow Display units Note 1) 0 to 9 l, 0 to 9 gal(US) Accumulated flow range Note 1) Power supply voltage Current consumption Power supply voltage for sensor 24 VDC (ripple 10% or less) (With power supply polarity protection) 55 mA or less (Not including the current consumption of the sensor