FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4200-X4W .5" WC 4" WC 10 0.5" WC 1.2" WC 4A FMW-4200-X5 .2 5 30 .5 .8 4A FMW-4200-X10 .5 5 30 1.0 1.5 4A FMW-4200-X30 1.5 30 30 2.0 3.0 4A 1 Wetted materials. 2 For special deadband or current requirements, contact factory.

FMW-4200-X4W .5" WC 4" WC 10 0.5" WC 1.2" WC 4A FMW-4200-X5 .2 5 30 .5 .8 4A FMW-4200-X10 .5 5 30 1.0 1.5 4A FMW-4200-X30 1.5 30 30 2.0 3.0 4A 1 Wetted materials. 2 For special deadband or current requirements, contact factory.

FMW-4200-X4W .5" WC 4" WC 10 0.5" WC 1.2" WC 4A FMW-4200-X5 .2 5 30 .5 .8 4A FMW-4200-X10 .5 5 30 1.0 1.5 4A FMW-4200-X30 1.5 30 30 2.0 3.0 4A 1 Wetted materials. 2 For special deadband or current requirements, contact factory.

FMW-4200-X4W .5" WC 4" WC 10 0.5" WC 1.2" WC 4A FMW-4200-X5 .2 5 30 .5 .8 4A FMW-4200-X10 .5 5 30 1.0 1.5 4A FMW-4200-X30 1.5 30 30 2.0 3.0 4A 1 Wetted materials. 2 For special deadband or current requirements, contact factory.

CA2

30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 30 35 40 48 58 M14 x 1.5 27 30 31 37 40 10 12 16 20 25 16 19 23 28 36 1/4 3/8 3/8 1/2 1/2 15 18 25 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 84 90 98 116 126 94 100 108 126 136 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5 31.5 M12 x

FMW-4300-2 .2 2 30 .1 .2 3A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 3A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 3A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

C85

16 8 23.5 21.5 18 19.5 19 25 20 10 17 23.5 D-A79W 12.5 28 43.5 16 23 12 19.5 21 20.5 26.5 21 22 18.5 25 20 25 5(30) 5(30) 55 55 80 80 16 23 19.5 23 20.5 26.5 23 22 20.5 25 20 26 22.5 25 23.5 29.5 25 25 22.5 29 ( ) for non rotating type.

Rotary Cylinder Series MRQ Size: 32, 40 1

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.

MRQ

(mm) (mm) 5 20 25 30 10 15 Stroke 50 40 75 100 Y 15 15 20 20 25 12.5 12.5 17.5 15 30 Q 30 20 20 20 73.5 E 66 71 63.5 63.5 63.5 58.5 61 61 61 MRQFS32SMRQ32, #3 (Flange only) 1.5-13 Series MRQ Size40 Basic Style/MRQBS40 The dimensions below shows an actuator with a rotation angle of 80 to 100 style.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

LEC-OM02904

30 (1) (1) (1) 31 32 33 34 1 (2) 35 36 2 37 3D 45 (1) (1) (1) 46 (1) (1) (1) 47 50 1 (1) (1) (1) 51 2 (1) (1) (1) 52 82 /1 (2) 8A USB 8E USB 888 1. 30 2. 8 2 8 8.2 (25) 30 (30) (45) (46) 1(50) 2(51) OFFONCPU 8.1 (ALM) No.