Prevents Micro-Bubbles

1/4, 3/8 M6 x 1 (SUS) 46 60 99 16 20.5 138 142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5 44 14.5 10 79 80.5 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 84 56 19 19 113.5 115.5 7.5 34 46

AC Servo Motor Driver (SSCNET /H Type)

temperature of servo motor 1 SD (Note 1) (Note 1) (Note 1) 46.2 Abnormal temperature of servo motor 2 SD (Note 1) (Note 1) (Note 1) 46 Servo motor overheat 46.3 Thermistor disconnected SD (Note 1) (Note 1) (Note 1) (Note 1) 46.5 Abnormal temperature of servo motor 3 DB (Note 1) (Note 1) (Note 1) 46.6 Abnormal temperature of servo motor 4 DB (Note 1) (Note 1) (Note 1) 47 Cooling fan error

JXCx-OMT0005CN

Instance Attribute Access Size Name Byte Semantics of Value 0-1 2byte *1 *2 2-3 2byte *1 *2 4-7 4byte *1 *2 8-9 2byte *1 *2 10-11 2byte *1 *2 12-13 2byte *1 *2 1 100 Get/Set 32 No.0 14-15 2byte *1 *2 16-17 2byte *1 *2 18-19 2byte *1 *2 20-23 14byte *1 *2 24-27 24byte *1 *2 28-31 4byte *1 *2 64 100 Get/Set 32 No.63 0-1 2byte *1 *2 28-31 4byte *1 *2 *1 *2 21(P.85 19 - 2IO Class 68h

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P611070-1 P611090-1 P611060-1 P611080-1 P612010-1 P611010-1 P611070-1 P611090-1 P611060-1 P611080-1 P612010-1 P411020-1 P411030-1 P411040-1 P411050-1 Series Vane type Unit part no.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P611070-1 P611090-1 P611060-1 P611080-1 P612010-1 P611010-1 P611070-1 P611090-1 P611060-1 P611080-1 P612010-1 P411020-1 P411030-1 P411040-1 P411050-1 Series Vane type Unit part no.

Digital Flow Switches, Series PF2A, Series PF2W

2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.

CXWM/CXWL

For dimensions of 25 stroke, refer to page 8-26-28. 8-26-27 26 Series CXWM 25 With End Lock: CXWM2525 stroke R 2 x 2-M6 x 1.0 thread depth 12 +0.012 0 2 x 2-6H7 depth 8 2-M10 x 1.0 Adjusting bolt 2-Rc 1/8 Plug (R 1/8) (Cylinder port) 4-5.5 through 4-9.5 counterbore depth 5.5 2-Rc 1/8 Cylinder port 2-Rc 1/8 Plug (R 1/8) (Cylinder port) 2-RB1006 shock absorber (Housing installed on single side

OMR0031

Controller Product name Quantity Controller (LATCA-) 1 pc. Counter plug Power supply plug Power supply plug 1 pc. Counter plug 1 pc.

Table of Contents - Tubing

I.D. 1 2 3 1 2 3 1 L 210 280 265 D 18 TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 52 35 22 54 27 17 41 1.5 4 2.5 28 1 2 1.5 1 2 24 325 6 4 37 305 330 8 31 5 Burst Pressure Characteristics Chart 725 Burst pressure psi 580 Burst pressure 435 290 145 Max. operating pressure 0 4 32 68 Operating temperature F 104 140 TUB-10 Polyurethane Coil Tubing (Metric) continued

1.63

pc. 5 Note 1) 5 D-M9 10 2 pcs. 5 Note 2) 1 pc.

VQ4000

) 27 79 X PE 41.5 30.5 32 R1 R2 27 P 15.5 14.5 G1/2 Electrical entry Rc1/8 PE port 19.5 (21) 19.5 Rc1/8 External pilot port (21) 31 31 5-Rc1/4, 3/8 P, A, B, R1, R2 port ( ): Rc3/8 0 1 0 1 0 1 0 1 3 position double check: VQ460 l 0 1 2 position double: VQ420 l 3 position closed center: VQ430 l 3 position exhaust center: VQ440 l 3 position pressure center: VQ450 l 181 108 73 90 50 11(A port

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

x F 2 x M3 x 0.5 thread depth 5 2 27 3H9 ( ) depth 2.5 +0.025 0 21 M 20 Z ZZ (NN 1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7

Table of Contents

1 3 7 Stroke 3 + Stroke 7 CUJ CU CQS Note 1) Solid state switch: D-M9 includes one auto switch.

NCA1

3/8 1.69 M16x1.5 325 (3.25") 1 3/4-16 1 1/8 3.9 1 1/2 1/2 7/8 3/8-24 3 3/4 0 1/2 1.57 1.10 5/8 27/64 2.76 1 3/8 2.34 4 1/4 2.72 8.02 1 1/2 2 7/16 2 5/8 2.40 M24x1.5 400 (4") 1 3/4-16 1 1/8 4.7 1 1/2 1/2 7/8 3/8-24 4 1/2 0 1/2 1.57 1.10 5/8 27/64 3.32 1 3/8 2.34 4 1/4 2.72 8.02 2 1/16 2 7/16 2 5/8 2.40 M24x1.5 Bore size (in) NT ND 150 (1.5") 1/4-20 9/32 200 (2") 5/16-18 7/16 250 (2.5") 3/

NCA1

2 4.33 1 5/8 2.59 4 1/4 2.72 3.95 1 5/8 3.9 2 1 1/2 5/8 1 1/4 3/8-24 3 3/4 0 1/2 5/8 1.57 1.18 2.76 1 3/8 1-14 400 (4") 1 1 5 1/4 1.57 7 1/4 5.12 1 5/8 2.59 4 1/4 2.72 3.99 1 5/8 4.7 2 1 1/2 5/8 1 1/4 3/8-24 4 1/2 0 1/2 5/8 1.57 1.18 3.32 1 3/8 1-14 6 5/64 6-15-27 27 Series NCA1 Oversized Rod-Double Detachable Head Side Clevis Style: NCA1D (XB5) P + Stroke LR 2-EE (NPTF) D across flats AA

SYJ3000/5000/7000

0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base mounted SYJ74 for internal pilot Note) Value at manifold base mounted, 2 position single operating How to Order Manifold

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P Note 1) U S U S U S U S w AXT100-1-J 20 Note 1) AXT100-1-FU15 AXT100-1-FS e Note 1) Top entry connector for PU, JU while side entry connector for PS, JS.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P Note 1) U S U S U S U S w AXT100-1-J 20 Note 1) AXT100-1-FU15 AXT100-1-FS e Note 1) Top entry connector for PU, JU while side entry connector for PS, JS.

Vacuum

Selection Graph 5: Adsorolion resoonse time 90 63 45 *, 27 < E ' " E 9 9 . 0 E --i 6.3 I ;4.s x \ ! 1 2 7 Eiector size determination by calculation: '1 .

15

1 1 1 1 1 1 1 1 Description Quantity Motor type NZ NY NX NM1 NM2 Motor side hub 1 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 Ring spacer 1 1 * For screw sizes, refer to the hub mounting dimensions