temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital Flow Switch Series PFA How to order Integrated display type PFA7 10 01 27 Unit specification Flow rate range With unit switching function Fixed SI unit Note) Nil M 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51
N Options Hand valve R In/Out Reverse Valve model (Cv) Port size (NPT) 2 3 4 6 (0.4) (1.1) (3.2) (10.5) 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Porting and mounting method Code 0 1 2 3 Mounting method Body Panel mount Body Panel mount Note) Only side porting is available for VH200 and VH600 and R port is located on the bottom.
Back Pressure Check Valve: None, Pilot Valve: Standard (0.7MPa), Coil Specification: Standard, Voltage: 5 (24VDC), Light/Surge Suppressor/Common Specification: U (w/Light/Surge Voltage Suppressor, Non-polar), Manual Override: Non-locking Push Type, A,B Port Size: None, A,B Port Thread Type: Rc (or None), Mounting Option: Mounting Screw, Round Head Combination Screw, Wiring Specification: W2
Actuation: 3 Position Exhaust Center, Mounting/Porting: Base Mounted, Seal: Rubber, Pilot Specification: Internal Pilot, Back Pressure Check Valve: None, Pilot Valve: Standard (0.7MPa), Coil Specification: Standard, Voltage: 24VDC, Light/Surge Suppressor/Common Specification: w/Light/Surge Voltage Suppressor, Non-polar, Manual Override: Non-locking Push Type, A,B Port Size: None, A,B Port
VK300-82-2-01 VK300-82-2-03 110 VAC 110V VK300-82-2-02 200 VAC 200V VK300-82-2-04 220 VAC 220V 240 VAC 240V 6 VDC 6V 12 VDC 12V 24 VDC 24VD 48 VDC 48VD VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 DIN terminal type Indicator light (Built-in connector) Marking Circuit with indicator light AC circuit diagram 12 VDC or less circuit diagram 24 VDC or more circuit diagram
Male threads 17 : 3/8-16 45 : 2-12 78 : M18 x 1.5 cannot be specified equal to, but 18 : 3/8-24 46 : 2 1/4-12 79 : M18 x 2.5 19 : 7/16-14 47 : 1 7/8-12 80 : M20 x 2.0 not, greater than the rod diame20 : 7/16-20 48 : 2 3/4-12 81 : M20 x 2.5 ters as standard. 21 : 1/2-13 49 : 3-12 82 : M22 x 1.5 22 : 1/2-20 50 : 3 1/4-12 83 : M22 x 2.5 23 : 9/16-12 51 : 3 1/2-12 84 : M24 x 2.0 24 : 9/16-18
Hs A B A B Proper Auto Switch Mounting Position (mm) D-A7H, A80H, A73C, A80C D-F7, F7V, F79F, J79 D-J79C, F7W, F7WV D-J79W, F7BAL, F7BAVL D-A7 D-A80 D-F7NTL D-A79W Bore size (mm) B B A A B A B A 32 3 11 51 43 6 46 5.5 45.5 40 5.5 13.5 49.5 57.5 8.5 52.5 8 52 50 19 11 53.5 61.5 14 56.5 13.5 56 63 22 14 59 67 17 62 16.5 61.5 Auto Switch Mounting Height (mm) D-A7H, A80H D-F7, J79, F7W D-J79W
Metric size*1 Inch size*1 Type 02 2*3 23 3.2*2 04 4 06 6 01 1/8" 03 5/32" 2 Elbow Control type*1 0 Meter-out 1 Meter-in *1 Metric size: Light gray Inch size: Orange *1 Meter-out and meter-in types can be visually identified by the color of the knob. Meter-out: Gray Meter-in: Light blue *2 Use 1/8" tubing. *3 Only polyurethane tubing is applicable for 2.
VK300-82-2-01 VK300-82-2-03 110 VAC 110V VK300-82-2-02 200 VAC 200V VK300-82-2-04 220 VAC 220V DIN terminal type VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 240 VAC 240V 6 VDC 6V 12 VDC 12V 24 VDC 24VD 48 VDC 48VD Indicator light (Built-in connector) Marking Circuit with indicator light AC circuit diagram 12 VDC or less circuit diagram 24 VDC or more circuit diagram
VK300-37-2-01 VK300-37-2-02 VK300-37-2-07 VK300-37-4-51 VK300-37-4-06 VK300-37-3-05 VK300-37-3-53 A1 A2 A3 LW06 LW2 LD4 LD8 100 VAC 200 VAC 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC 4-13-3 4 For details about the applicable products conforming to international standards, visit us at www.smcworld.com. 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 How to Order Valves Electrical entry
Male threads 17 : 3/8-16 45 : 2-12 78 : M18 x 1.5 cannot be specified equal to, but 18 : 3/8-24 46 : 2 1/4-12 79 : M18 x 2.5 19 : 7/16-14 47 : 1 7/8-12 80 : M20 x 2.0 not, greater than the rod diame20 : 7/16-20 48 : 2 3/4-12 81 : M20 x 2.5 ters as standard. 21 : 1/2-13 49 : 3-12 82 : M22 x 1.5 22 : 1/2-20 50 : 3 1/4-12 83 : M22 x 2.5 23 : 9/16-12 51 : 3 1/2-12 84 : M24 x 2.0 24 : 9/16-18
Description RLQ40 RLQ50 RLQ63 T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 T1 81.4 93.3 99.8 Compact Cylinder with Air Cushion and Lock PT elbow Restrictor PT tee 32, 40: AS2200-(N, F)01-S 50, 63: AS2200-(N, F)02-S 32, 40: KRL06-01SW2 50, 63: KRL06-02SW2 TRB0604W KR-06C 2 Metal speed controller 5 2 Male elbow By-pass tubing Spatter
3.1 INOUT R INOUT 3.2 ONON IN OUT 5 IDF100150F-W 3.1 3 1 IDX-OM-Z004 3 ONOFF 0.05MPa 3.3 OFF OFF 3.4 3 3 5 3.5 OFF IDF100150F-W 3.3 3 2 IDX-OM-Z004 3 3.6 0 1 0 1 0 1 2 3 2 3 4 5 4 5 6 7 6 7 2 3 4 5 6 7 0 1 3 4 5 OFF OFF5.2 3 3 IDF100150F-W 3.6 3 3 IDX-OM-Z004 3 3.7 2A 80VA 100W DC5V,2mA IDF100150F-W 3.7 3 4 IDX-OM-Z004 4 4 4.1 5 310 4.2 4.2.1 (1) (2) JRA-GL-02
VK300-37-2-01 VK300-37-2-02 VK300-37-2-07 VK300-37-4-51 VK300-37-4-06 VK300-37-3-05 VK300-37-3-53 Rated voltage 100VAC 200VAC 240VAC 6VDC 12VDC 24VDC 48VDC Rating symbol A1 A2 A3 LW06 LW2 LD4 LD8 DIN terminal Circuit diagram for connector with light The bushing may be damaged if the tightening torque of 0.8Nm is exceeded.
Y60 Interface G36-10-01 G36-10-01G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G36-10-01 1.0MPa G27-10-R1 Pressure gauge (G27-10-R1)(4) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 0.2MPa AD43 AD43 AD44 AD44 AD44 AD44 AD44 N.O.
roller VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Cross roller plunger Toggle lever VM220-02-08 VM230-02-08 VM-30AR Red VM220-02-30R VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y Push button (Mushroom) VM-30AB Black VM220-02-30B VM-30AG Green VM220-02-30G VM-30AY Yellow VM220-02-30Y VM-32AR Red VM220-02-32R VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y VM-32AB Black VM220
) T-interface Note 6) (02) 02 02 03 03 (04) 04 Y61004 02 VHS40-06 02 04 VHS50-(10) pressure release 02 02 06 3-port valve for residual Note 6) 03 VHS2001 VHS3003 VHS3003 VHS4002 03 01 02 02 06 06 06 Piping adapter Note 6) E200-02 E30003 E300-03 E40004 E500-06 E600-10 E60010 E60010 E100-M5 03 04 04 06 02 01 02 02 Pressure switch Note 6) 03 IS1000E-20 02 IS1000E-3003 IS1000E-3003 IS1000E
VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360
-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.
SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 46 76 IDFB 51 96 IDH 0.0001 1000 1 10 100 59 120 ID Flow rate L/min (ANR) IDG SFA20 SFA102, SFA202, SFA302 IDK 0.1 2 x TSJ 1/4 Inlet pressure AMG 0.3 MPa Max. flow rate line AFF Pressure drop MPa 0.1 MPa B IN 0.01 AM 0.7 MPa AMD A 0.001 AMH 0.5 MPa A B Model Connection SFA102-02 SFA202-02 SFA302-02 76 96 120 89 93 101 TSJ 1/4 Tube Swage Joint