MLGP

C 0.2 B 0.2 A 0.2 Hexagon socket head mounting screws D Bore size (mm) A (mm) B (mm) C (mm) MGPM MGPL W 20 12 54 14 M5 x 0.8 24 72 25 18 15 M6 x 1.0 64 82 30 B 32 22 18 M8 x 1.25 98 34 78 A A 40 18 22 40 86 M8 x 1.25 106 50 22 110 27 M10 x 1.5 46 130 B W 63 27 22 M10 x 1.5 124 142 58 B: Retraction locking F: Extension locking 80 33 28 M12 x 1.75 180 54 156 100 33 39 62 188 M14 x 2.0 210 23

SV

(Maximum no. of outputs 64 points and no. of inputs 64 points) B B B B Cable with M12 connectors EX500-ACCable with M12 connectors EX500-ACP. 1-2-27 P. 1-2-27 Connection of sensors with M8, M12 connectors (auto switch, pressure switch, etc.)

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

800) 258-9200-www.stevenengineering.com 5.5 15 0.6 0.6 5.3 5.3 13 34 33 29 25.5 6 3 21.5 4 2-3.5 mounting hole 28.5 49 50.5 2-M5 x 0.7 1(P), 3(R) port 3 1 (R) (P) 7.4 3 (13) 2-8-6 7 4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 Dimensions L plug connector: VQD1151-L-M5 M plug connector: VQD1151-M-M5 5 5 5.5 VQC 4(A) 2(B) SQ VQ0 VQ4 VQ5 Lead wire length 300 mm Indicator light 27

VQZ1000/2000/3000

Do not apply excessive torque when turning the locking type manual override. (0.1 Nm or less) Caution 2-7-26 27 27 Series VQZ Option Body Ported External Pilot Specifications (Except VQZ1000) Inch-size One-touch Fittings and Option Thread The external pilot specifications are used when the operating pressure is below the minimum operating pressure 0.1 to 0.2 MPa or when valve is used for

Clamp Cylinder with Lock Series CLK1

Ht BY IA 43 25 Max.Wc 40 36 35 13 D 30 Width across flats K Ws Width across flats 44 R15 Clevis width CLK1A: 16.5 0.050 0.093 +0.027 0 Shaft: 12d9 Hole: 12H8 F +0.3 0 +0.4 0 CLK1B: 19.5 Z + Stroke S + Stroke 1.5 27 2 40 57 97 ZZ + Stroke Approx.

PF2A/PF2W

Pin description Refer to PF2W3 on page 16-11-25 for dimensions of remote type display unit. 1 DC (+) 2 NC/Analog output 3 DC () 4 OUT 16-11-30 27 Digital Flow Switch Series PF2A/PF2W Functions: PF2A, PF2W Refer to the operation manual how to set and to operate. Flow rate measurement selection Output types Real-time flow rate and accumulated flow rate can be selected.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter J 7.8 7.8 7.8 9.6 9.6 10.7 10.7 ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 15.8 12 31.5 32.8 12 27 35 12 ZY 15.8 12 31.5 32.8 12 27 35 12 One-touch and screw-in connection Model A 58.5 41.5

ZPT/ZPX

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 0 0 1 1 0 5 8 16 27 53 84 0 0 0 1 1 3 1 1 2 3 5 8 Misc.

CE

18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7.5 2-M5 x 0.8 (Port size) 71.5 103 + Stroke 24 127 + Stroke 2 10-12-12 12 High Precision Stroke Reading Cylinder Non-rotating Piston Type Series CEP1 Foot style: CEP1L12 Stroke 4-4.5 (Positioning pin hole) 40 5.5 13 25 6 RE A B +0.05 +0.02 4 REC CX 66 54 CY MQQ M RHC MK(2) RS Q G 47.5 RS H A 17 RZQ 40 27 3.5 51

SMC

(The vacuum pressure will be approximately -27 kPa at around 1 m from the vacuum suction port.) Please consult SMC for further details.

CP95

16 94 4 4 4 6.5 26 146 190 46 32.5 15 4 M12 x 1.25 40 24 35 16 G 1/4 14 M6 x 1 6.5 13 27 16 105 4 4 4 9 30 163 213 52 38 17 4 M16 x 1.5 50 32 40 20 G 1/4 15.5 M8 x 1.25 8 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 M16 x 1.5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 16 31.5 16 121 6 4 9 12 37 194 259 75 56.5 24 5 M20 x 1.5 80 40 45 25 G 3/8 19 M10 x 1.5 10 21 38 16 128 8 4 11.5 14 46 218

Table of Contents

Example: -XA1A24C1C30 -XA2C1C4C30 11-2-27 27 Series CRB2 Axial: Top (Long shaft side) Axial: Bottom (Short shaft side) Symbol: A1 Symbol: A2 The short shaft can be further shortened by machining female threads into it. The long shaft can be further shortened by machining female threads into it. (If shortening the shaft is not required, indicate for dimension Y.)

CE

, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G 47.5 RS H A 17 RZQ 40 27 3.5 51 MI W S CEP1 CE1 Rod side flange style: CEP1F12 Stroke CE2 ML2B 4 (Positioning pin hole) C J G5-S CV 4 +0.05 +0.02 (Positioning pin hole) +0.05 +0.02 MVGQ 27 18 CC 6 RB 5.5 38 4-4.5 J 50 D-X 20Data 10-12-13 13 Series

CP95

12 G 1/8 13 M6 x 1 4 15 4 4 4 6.5 26 146 190 46 32.5 M12 x 1.25 40 6.5 16 105 24 13 35 16 27 G 1/4 14 M6 x 1 4 17 4 4 4 9 30 163 213 52 38 M16 x 1.5 50 8 16 106 32 16 40 20 31.5 G 1/4 15.5 M8 x 1.25 6 24 5 4 5 10.5 37 179 244 65 46.5 M16 x 1.5 63 8 16 121 32 45 16 20 31.5 G 3/8 16.5 M8 x 1.25 6 24 5 4 9 12 37 194 259 75 56.5 M20 x 1.5 80 10 16 128 40 45 21 38 25 G 3/8 19 M10 x 1.5 8 30 5

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Bore size Stroke H G (Shock absorber stroke) S T W SD TT E Shock absorber EA h EY Stroke adjusting unit EC FA MY2H16 W Applicable cylinder MY2H16 MY2H25 MY2H40 TT 5.6 (MAX. 12) 7.1 (MAX. 18.6) 10 (MAX. 6) SD 6.7 17.7 Shock absorber model RB1007 RB1412 RB2015 E 14.4 17.5 25 h 6 6 EA 7 8.5 13 EC 6 9 13 EY 27 36 57 FA 12.5 19.3 17 S 46.7 67.3 73.2 T 7 12 15 W 23.5 25.8 38 8-13-27 28 Series

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] Size B1 C1 H1 L1* L2 MM 25 22 20.5 8 38 23.5 M14 x 1.5 32 22 20.5 8 42.0 23.5 M14 x 1.5 63 27 26 11 76.4 39 M18 x 1.5 Width across flats B1 H1 C1 L2 L1 * The L1 measurement is when the unit is in the Zphase first detecting position. At this position, 2 mm at the end (size 25, 32) and 4 mm at the end (size 63).

1

Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height [mm] Auto switch model Auto switch model D-M9m(V) D-M9mW(V) D-M9mA(V) D-M9m D-M9mW D-M9mA D-M9mV D-M9mWV D-M9mAV Bore size Bore size A B 20 4 8.5 25 4.5 9 32 4.5 9.5 40 7 12 Hs1 Hs2 Hs1, Hs2 Hs1 Hs2 20 16.5 17 17 23 17 25 19 19.5 19.5 25.5 19.5 32 22.5 23 23 29 23 40 26.5 27 27 32.5 27 * Adjust the auto switch after confirming

Integrated Controller

Description Material Note 25 Return box Aluminum die-casted Coating 26 Return plate Aluminum die-casted Coating 27 Belt Replacement Parts (Top/Right/Left side parallel only)/Belt No. Size Order no. 27 16 LE-D-2-7 25 LE-D-19-3 32 LE-D-19-4 Replacement Parts/Grease Pack Applied portion Order no.

IZ-OMU0031-CN

L(2) ZS-27-01 -7No.IZ*-OMU0031 LCD (OUT1)() (OUT2)() (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 ON/OFF ON/OFF -8No.IZ*-OMU0031 (2 m)ZS-28-A (1 )ZS-28-C 0.140.2mm 0.81.0 (M3X5 L(2))ZS-28-B (M3X8 L (2 ))ZS-27-C (M38 L(2))ZS-27-D ZS-27-01 -9No.IZ*-OMU0031 M3X5 L(2) 0.50.7 Nm M3X5L (ZS-28-B) M3X5L M3X8 L(2 ) M3X8L ( ZS-27-01) (ZS-27-C) 90 2 -10No.IZ*-OMU0031 ,FG 20mm () SMC 3M

CE

18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7 2-M5 x 0.8 (port size) 71.5 103 + Stroke 24 127 + Stroke 2 5 High Precision Scale Cylinder Series CEP1 Foot type 4-4.5 CEP1L12 Stroke 4 (Positioning pin hole) 40 5.5 13 25 6 +0.05 +0.02 66 54 47.5 17 40 27 3.5 51 Front flange type CEP1F12 Stroke 4 (Positioning pin hole) 4 (Positioning pin hole) +0.05 +0.02 +0.05