Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

H 2 position double: VQ525 3 position closed center: VQ535 3 position exhaust center: VQ545 3 position pressure center: VQ555 3 position double check: VQ565 0 1 0 1 0 1 0 1 G H G H G H G H 194.5 (200) 121.3 53 73.2 (78.7) Indicator light 213 121.3 91.5 13.5 (Port B) 59.5 53 (Port A)17.5 13.5 (Port B) 59.5 (Port A) 17.5 Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Body size Port size Thread type Nil N F Symbol Port size Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 A spacer or spacer with bracket is required if the valve is combined with modular FRL. SUP SUP Applicable air preparation equipment Spacer with bracket part no. Pressure relief 3 port valve VHS20 VHS30 VHS40 VHS40-06 VHS50 IN OUT Spacer part no.

Serial Transmission System Series EX250 Series EX500

Enclosure IP65 Enclosure Weight (g) IP65 [For M8: 20] [For M12: 40] [8 point integrated type, for M8: 55] Note) Weight (g) 100 (Input unit + end block) Note) Not including the DIN rail weight.

PSxx-OMV0008CN

N02 F02 Rc1/4 NPT1/4 G1/4 Al2O3(96) ISE70GC3604()FKM+ ISE75G/ISE76G/ISE77G/ISE78GC3604()FKM ISE70G 179 g 178 g 175 g ISE75G/ISE76G/ISE77G 184 g 183 g 181 g M12 139 g -87No.PS-OMV0008CN-E 2M4 5 -88No.PS-OMV0008CN-E A B -89No.PS-OMV0008CN-E M12 AWG23 0.72 mm 1.14 mm 4 5 m -90No.PS-OMV0008CN-E Revision history A [2018 2 ] B [2018 6 ] C [2020 3 ] D [2021 8 ] E [2022 4 ] 4-14-1, Sotokanda

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Port size NPT1/4 183 g Port size G1/4 181 g Lead wire with connector 139 g Bracket A 17.7 g Bracket B 14.2 g Orifice 1.2 g Weight Option IO-Link type Device IO-Link version V1.1 Communication speed COM2 (38.4 kbps) Configuration file IODD file*5 Minimum cycle time 2.3 ms Process data length Input data: 2 bytes, Output data: 0 byte On request data communication Yes Data storage function Yes

TABLE OF CONTENTS

V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB (G or L) LW53GJ8XGB (G or L) LW53GV8XGB (G or L) LW53GK8XGB (G or L) LW53HH8XGB (G or L) LW53HJ8XGB (G or L) LW53HV8XGB (G or L) LW53HK8XGB (G or L) LW53JJ8XGB (G or L) LW53JV8XGB (G or L) LW53JK8XGB (G or L) LW53VV8XGB (G or L) LW53VK8XGB

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

Table of Contents

Driver Non-standard motor electric actuator Standard motor electric actuator Controller How to Order How to Order B LG1 02 1 Compatible model 1 G LG1 05 Cable length G R Y Matsushita Electric Industrial Co., Ltd. Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

Gun Type Ionizer

Ambient temperature 0 to 40C (No freezing) Ambient humidity 35 to 65%RH (No condensation) Material Case: PBT Emitter: Tungsten Weight (Body only) Standard nozzle 200 g Bypass nozzle 250 g Standards/Directive CE (EMC directive, RoHS directive), UKCA Ambient humidity 20 to 80%RH Safety standards IEC 62368-1 *4 An AC cord included with an AC adapter is only for use in Japan.

Regulator AR30 to 60

-10AS G46-2-02 G36-2-01 G46-2-02 G46-2-02 G46-2-02 0.2MPa Note 3) GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

Soft Start-up Valve

Simple Specials System Please contact your local sales representative for more details. 2 *1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) AV 00 20 02 B B 1 D q w e r t y u i o A *1 CE compliant Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V

REC

Q G C 22 30 35 37 0.5 Graph (2) Applicable Max.

AR425 to 935

VY1 How to Order G PPA Internal pilot operated relieving type regulator AR 25 4 BG R 02 Option Nil Flow direction: Right Left AL None Regulator R Body size Accessory 4 6 8 9 1 2 1 Symbol Description Applicable model Port size 1 Nil 1 4 02 03 04 06 10 12 14 20 2 1 With bracket AR45 to 65 AR25 AR35 B 8 3 2 G46-10-02 G46-2-02 Gauge 1 2 3 4 G Regulating pressure range Pressure gauges are shipped

CJ2X/CUX/CQSX/CQ2X/CM2X

MVGQ 10 16 20, 25 32 0.54 10% M3 CUX32-PS Grease pack (10 g): 1 pc. 1.23 10% M4 It is impossible to replace seals in bore size 10 mm. CC 2.55 10% M5 4.02 10% M6 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1.

CJ2X/CUX/CQSX/CQ2X/CM2X

MVGQ 10 16 20, 25 32 0.54 10% M3 CUX32-PS Grease pack (10 g): 1 pc. 1.23 10% M4 It is impossible to replace seals in bore size 10 mm. CC 2.55 10% M5 4.02 10% M6 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1.

CC

Rc 1/8 Pilot air port port (Stip valve side) RS H A Manual push button RZQ MI W S CEP1 CE1 CE2 Oil port size Rc Oil draining hole Rc 1/4 Throttle valve locking screw ML2B C J G5-S CV MVGQ (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL EA EB EL F H GA GB GL KA KB KL M CC CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G 186 64 86 88 53 121.8 98 151.5 35 18 35 104 45 86 45 83 60 3/8 1

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Indicator light 3.5 to 7 82.5 75 01T 02T M type plug connector (M): VQZ2 5(R)M 56.5 (Lead wire lnegth) Cover diameter 1.5 Cross sectional area 0.23mm2 58 300 77 89 Indicator light 28 Base Mounted Type Series VQZ Dimensions: VQZ300 VQZ300 (mm) Valve Scale: 45% Grommet (G): VQZ3 5(R)G 02T 03T 37 5 2 4.5 Mounting holes 23.5 R5 Cover diameter 1.4 Cross sectional area 0.2mm2 Manual override 2

PSE540/560

42.7 g 49.3 g 41.4 g 41.6 g 43.3 g 44.1 g Weight Without sensor cable 2.9 g 3.2 g 9.8 g 1.9 g 2.1 g 3.8 g 4.6 g 16-3-25 4 Series PSE540 Internal Circuit PSE54 Voltage output type 1 to 5 V Output impedance Approx. 1 k Brown DC (+) Main circuit 1 k Black OUT 10 to 24 VDC + (Analog output) Load Blue DC () Dimensions PSE5R04 R06 PSE54M3 M5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Lightweight and Compact

Contents Applicable model HRS-EP022 NPT thread conversion fitting set HRS090-W-20/40 HRS-EP023 G thread conversion fitting set Part no.